Gerd Reisinger

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection objective for microlithography, projection exposure appa...
- Patent number 8,228,483
- Issue date Jul 24, 2012
- Carl Zeiss SMT GmbH
- Ulrich Loering
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Projection exposure system, beam delivery system and method of gene...
- Patent number 7,995,280
- Issue date Aug 9, 2011
- Carl Zeiss SMT GmbH
- Matthias Kuss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical system and method for improving imaging properties thereof
- Patent number 7,605,914
- Issue date Oct 20, 2009
- Carl Zeiss SMT AG
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of optimizing imaging performance
- Patent number 7,570,345
- Issue date Aug 4, 2009
- Carl Zeiss SMT AG
- Gerd Reisinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of optimizing imaging performance
- Patent number 7,233,386
- Issue date Jun 19, 2007
- Carl Zeiss SMT AG
- Gerd Reisinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for the decontamination of microlithographic projection exp...
- Patent number 6,936,825
- Issue date Aug 30, 2005
- Carl Zeiss SMT AG
- Michael Gerhard
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Projection Exposure System, Beam Delivery System and Method of Gene...
- Publication number 20120013878
- Publication date Jan 19, 2012
- Carl Zeiss SMT GMBH
- Matthias Kuss
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY, PROJECTION EXPOSURE APPA...
- Publication number 20100195070
- Publication date Aug 5, 2010
- Carl Zeiss SMT AG
- Ulrich Loering
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR IMPROVING IMAGING PROPERTIES THEREOF
- Publication number 20090225308
- Publication date Sep 10, 2009
- Carl Zeiss SMT AG
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Exposure System, Beam Delivery System and Method of Gene...
- Publication number 20080225921
- Publication date Sep 18, 2008
- Carl Zeiss SMT AG
- Matthias Kuss
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method For Structuring A Substrate Using Multiple Exposure
- Publication number 20080036982
- Publication date Feb 14, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of optimizing imaging performance
- Publication number 20080007706
- Publication date Jan 10, 2008
- Carl Zeiss SMT AG
- Gerd Reisinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic projection exposure apparatus and method for intr...
- Publication number 20070132969
- Publication date Jun 14, 2007
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical system and method for improving imaging properties thereof
- Publication number 20070071303
- Publication date Mar 29, 2007
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of optimizing imaging performance
- Publication number 20050237506
- Publication date Oct 27, 2005
- Carl Zeiss SMT AG
- Gerd Reisinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process for the decontamination of microlithographic projection exp...
- Publication number 20010026402
- Publication date Oct 4, 2001
- Michael Gerhard
- B08 - CLEANING

Gerd Reisinger

Person

Patents Grantslast 30 patents

Projection objective for microlithography, projection exposure appa...

Projection exposure system, beam delivery system and method of gene...

Optical system and method for improving imaging properties thereof

Method of optimizing imaging performance

Method of optimizing imaging performance

Process for the decontamination of microlithographic projection exp...

Patents Applicationslast 30 patents

Projection Exposure System, Beam Delivery System and Method of Gene...

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY, PROJECTION EXPOSURE APPA...

OPTICAL SYSTEM AND METHOD FOR IMPROVING IMAGING PROPERTIES THEREOF

Projection Exposure System, Beam Delivery System and Method of Gene...

Method For Structuring A Substrate Using Multiple Exposure

Method of optimizing imaging performance

Microlithographic projection exposure apparatus and method for intr...

Optical system and method for improving imaging properties thereof

Method of optimizing imaging performance

Process for the decontamination of microlithographic projection exp...