Membership
Tour
Register
Log in
Gerhard BRAUN
Follow
Person
Ederheim, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Mirror for the EUV wavelength range, substrate for such a mirror, p...
Patent number
9,494,718
Issue date
Nov 15, 2016
Carl Zeiss SMT GmbH
Stephan Muellender
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective optical imaging system
Patent number
9,188,771
Issue date
Nov 17, 2015
Carl Zeiss SMT GmbH
Aurelian Dodoc
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
MIRROR FOR THE EUV WAVELENGTH RANGE, SUBSTRATE FOR SUCH A MIRROR, P...
Publication number
20130038929
Publication date
Feb 14, 2013
Carl Zeiss SMT GMBH
Stephan MUELLENDER
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE OPTICAL IMAGING SYSTEM
Publication number
20120224160
Publication date
Sep 6, 2012
Carl Zeiss SMT GMBH
Aurelian Dodoc
G02 - OPTICS
Information
Patent Application
MIRROR FOR THE EUV WAVELENGTH RANGE, PROJECTION OBJECTIVE FOR MICRO...
Publication number
20120212810
Publication date
Aug 23, 2012
Carl Zeiss SMT GMBH
Hans-Jochen PAUL
G02 - OPTICS
Information
Patent Application
MIRROR FOR EUV WAVELENGTHS, PROJECTION OBJECTIVE FOR MICROLITHOGRAP...
Publication number
20120134015
Publication date
May 31, 2012
Carl Zeiss SMT GMBH
Hans-Jochen PAUL
G02 - OPTICS