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CVD method and CVD reactor
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Patent number 9,018,105
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Issue date Apr 28, 2015
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Aixtron SE
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Gerhard Karl Strauch
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for equipping an epitaxy reactor
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Patent number 8,846,501
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Issue date Sep 30, 2014
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Aixtron SE
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Gerhard Karl Strauch
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Gas inlet element for a CVD reactor
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Patent number 8,298,337
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Issue date Oct 30, 2012
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Aixtron, Inc.
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Markus Reinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Inlet system for an MOCVD reactor
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Patent number 7,625,448
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Issue date Dec 1, 2009
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Aixtron AG
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Martin Dauelsberg
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CVD coating device
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Patent number 7,067,012
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Issue date Jun 27, 2006
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Aixtron AG
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Holger Jürgensen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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