Gerold Buchel

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Ruggel, LI

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Patents Applicationslast 30 patents

Information Patent Application
REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD
- Publication number 20110203610
- Publication date Aug 25, 2011
- OERLIKON SOLAR AG, TRUBBACH
- Felix-George Leu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...