Geun-Young Yeom

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Dry etching method using potential control of grid and substrate
- Patent number 12,148,626
- Issue date Nov 19, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoelectronic device, photodiode, and phototransistor
- Patent number 11,424,375
- Issue date Aug 23, 2022
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and plasma generation apparatus using the same
- Patent number 11,127,570
- Issue date Sep 21, 2021
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching apparatus
- Patent number 11,120,975
- Issue date Sep 14, 2021
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, photoelectronic device, and method for manufa...
- Patent number 10,916,670
- Issue date Feb 9, 2021
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating plasma and apparatus for treating substrat...
- Patent number 10,784,082
- Issue date Sep 22, 2020
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, photoelectronic device, and method for manufa...
- Patent number 10,593,819
- Issue date Mar 17, 2020
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching atomic layer of graphene
- Patent number 9,245,752
- Issue date Jan 26, 2016
- Research & Business Foundation Sungkyunkwan University
- Geun Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma processing apparatus having internal lin...
- Patent number 8,974,630
- Issue date Mar 10, 2015
- Sungkyunkwan University
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma apparatus
- Patent number 8,293,069
- Issue date Oct 23, 2012
- Sungkyunkwan University
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition apparatus using neutral beam and method of...
- Patent number 7,919,142
- Issue date Apr 5, 2011
- Sungkyunkwan University Foundation for Corporate Collaboration
- Geun-Young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively coupled plasma processing apparatus for very large area...
- Patent number 7,842,159
- Issue date Nov 30, 2010
- Sungkyunkwan University Foundation for Corporate Collaboration
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Neutral beam-assisted atomic layer chemical vapor deposition appara...
- Patent number 7,799,706
- Issue date Sep 21, 2010
- Sungkyunkwan University Foundation for Corporate Collaboration
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating apparatus and method using neutral beam
- Patent number 7,777,178
- Issue date Aug 17, 2010
- Sungyunkwan University Foundation for Corporate Collaboration
- Geun-Young Yeom
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of forming nano-sized MTJ cell without contact hole
- Patent number 7,397,099
- Issue date Jul 8, 2008
- Samsung Electronics Co., Ltd.
- Soon-won Hwang
- G11 - INFORMATION STORAGE
Information Patent Grant
Inductively coupled plasma processing apparatus having internal lin...
- Patent number 7,338,577
- Issue date Mar 4, 2008
- Sungkyukwan University
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming nano-sized MTJ cell without contact hole
- Patent number 7,220,601
- Issue date May 22, 2007
- Samsung Electronics Co., Ltd.
- Soon-won Hwang
- G11 - INFORMATION STORAGE
Information Patent Grant
Layer-by-layer etching apparatus using neutral beam and method of e...
- Patent number 7,094,702
- Issue date Aug 22, 2006
- Sungkyunkwan University
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Neutral beam source having electromagnet used for etching semicondu...
- Patent number 7,060,931
- Issue date Jun 13, 2006
- Sungkyunkwan University
- Geun-Young Yeom
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of etching substrates
- Patent number 7,012,012
- Issue date Mar 14, 2006
- LG Electronics Inc.
- Geun-young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3-grid neutral beam source used for etching semiconductor device
- Patent number 6,933,495
- Issue date Aug 23, 2005
- Sungkyunkwan University
- Geun-Young Yeom
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Etching apparatus using neutral beam
- Patent number 6,926,799
- Issue date Aug 9, 2005
- Sungkyunkwan University
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer-by-layer etching apparatus using neutral beam and etching met...
- Patent number 6,874,443
- Issue date Apr 5, 2005
- Sungkyunkwan University
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of etching substrates
- Patent number 6,818,532
- Issue date Nov 16, 2004
- Oriol, Inc.
- Geun-young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating capillary discharge plasma display panel usin...
- Patent number 6,685,523
- Issue date Feb 3, 2004
- Plasmion Displays LLC
- Steven Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DRY ETCHING USING PLASMA
- Publication number 20240412979
- Publication date Dec 12, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCE...
- Publication number 20240234146
- Publication date Jul 11, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOTROPIC ECHING METHOD FOR TWO-DIMENSIONAL SEMICONDUCTOR MATERIALS
- Publication number 20240203747
- Publication date Jun 20, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE USING MULTIPLE PULSES TO FILL GAP OF...
- Publication number 20240194448
- Publication date Jun 13, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING SYSTEM, APPARATUS, AND METHOD FOR DETERMINING MAINTENANC...
- Publication number 20240186126
- Publication date Jun 6, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ETCHING ATOMIC LAYER
- Publication number 20240177972
- Publication date May 30, 2024
- Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCE...
- Publication number 20240136187
- Publication date Apr 25, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE
- Publication number 20240096596
- Publication date Mar 21, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING APPARATUS AND ETCHING PROCESSING METHOD
- Publication number 20230395386
- Publication date Dec 7, 2023
- Daejeon University Industry-University Cooperation Foundation
- Kyong Nam KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD USING POTENTIAL CONTROL OF GRID AND SUBSTRATE
- Publication number 20220375761
- Publication date Nov 24, 2022
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING TH...
- Publication number 20210384374
- Publication date Dec 9, 2021
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOELECTRONIC DEVICE, PHOTODIODE, AND PHOTOTRANSISTOR
- Publication number 20200274010
- Publication date Aug 27, 2020
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, PHOTOELECTRONIC DEVICE, AND METHOD FOR MANUFA...
- Publication number 20200176620
- Publication date Jun 4, 2020
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GENERATING PLASMA AND APPARATUS FOR TREATING SUBSTRAT...
- Publication number 20190252153
- Publication date Aug 15, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SOURCE AND PLASMA GENERATION APPARATUS USING THE SAME
- Publication number 20190221404
- Publication date Jul 18, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, PHOTOELECTRONIC DEVICE, AND METHOD FOR MANUFA...
- Publication number 20190044009
- Publication date Feb 7, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING APPARATUS
- Publication number 20190035610
- Publication date Jan 31, 2019
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING ATOMIC LAYER OF GRAPHINE
- Publication number 20140206192
- Publication date Jul 24, 2014
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING SYNCHRONIZATION OF PULSED PLASMA BY APPLYING...
- Publication number 20130049592
- Publication date Feb 28, 2013
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method For Incorporating Composition Into Substrate U...
- Publication number 20120129347
- Publication date May 24, 2012
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME
- Publication number 20110192820
- Publication date Aug 11, 2011
- SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS USING NEUTRAL BEAM AND METHOD OF...
- Publication number 20110162581
- Publication date Jul 7, 2011
- Sungkyunkwan University Foundation for Corporate Collaboration
- Geun-Young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARA...
- Publication number 20090203226
- Publication date Aug 13, 2009
- SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
- Geun-young Yeom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR INCORPORATING COMPOSITION INTO SUBSTRATE U...
- Publication number 20090203221
- Publication date Aug 13, 2009
- SUNGKYUNKWAN UNIVERSITY Foundation
- Geun-young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LI...
- Publication number 20090173445
- Publication date Jul 9, 2009
- SUNGKYUNKWAN UNIVERSITY
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS
- Publication number 20090133840
- Publication date May 28, 2009
- SUNGKYUNKWAN UNIVERSITY
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for depositing thin film
- Publication number 20080315188
- Publication date Dec 25, 2008
- Tae-Hyung Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING APPARATUS AND METHOD USING NEUTRAL BEAM
- Publication number 20070221833
- Publication date Sep 27, 2007
- SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
- Geun-Young YEOM
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of forming nano-sized MTJ cell without contact hole
- Publication number 20070164338
- Publication date Jul 19, 2007
- Samsung Electronics Co., Ltd.
- Soon-won Hwang
- G11 - INFORMATION STORAGE
Information Patent Application
Inductively coupled plasma processing apparatus having internal lin...
- Publication number 20070101938
- Publication date May 10, 2007
- SUNGKYUNKWAN UNIVERSITY
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS

Geun-Young Yeom

Person

Patents Grantslast 30 patents

Dry etching method using potential control of grid and substrate

Photoelectronic device, photodiode, and phototransistor

Plasma source and plasma generation apparatus using the same

Ion beam etching apparatus

Semiconductor device, photoelectronic device, and method for manufa...

Apparatus for generating plasma and apparatus for treating substrat...

Semiconductor device, photoelectronic device, and method for manufa...

Method for etching atomic layer of graphene

Inductively coupled plasma processing apparatus having internal lin...

Inductively coupled plasma apparatus

Atomic layer deposition apparatus using neutral beam and method of...

Inductively coupled plasma processing apparatus for very large area...

Neutral beam-assisted atomic layer chemical vapor deposition appara...

Plasma generating apparatus and method using neutral beam

Method of forming nano-sized MTJ cell without contact hole

Inductively coupled plasma processing apparatus having internal lin...

Method of forming nano-sized MTJ cell without contact hole

Layer-by-layer etching apparatus using neutral beam and method of e...

Neutral beam source having electromagnet used for etching semicondu...

Method of etching substrates

3-grid neutral beam source used for etching semiconductor device

Etching apparatus using neutral beam

Layer-by-layer etching apparatus using neutral beam and etching met...

Method of etching substrates

Method of fabricating capillary discharge plasma display panel usin...

Patents Applicationslast 30 patents

METHOD FOR DRY ETCHING USING PLASMA

METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCE...

ISOTROPIC ECHING METHOD FOR TWO-DIMENSIONAL SEMICONDUCTOR MATERIALS

ATOMIC LAYER DEPOSITION DEVICE USING MULTIPLE PULSES TO FILL GAP OF...

MONITORING SYSTEM, APPARATUS, AND METHOD FOR DETERMINING MAINTENANC...

METHOD FOR ETCHING ATOMIC LAYER

METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCE...

PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE

ETCHING PROCESSING APPARATUS AND ETCHING PROCESSING METHOD

DRY ETCHING METHOD USING POTENTIAL CONTROL OF GRID AND SUBSTRATE

SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING TH...

PHOTOELECTRONIC DEVICE, PHOTODIODE, AND PHOTOTRANSISTOR

SEMICONDUCTOR DEVICE, PHOTOELECTRONIC DEVICE, AND METHOD FOR MANUFA...

APPARATUS FOR GENERATING PLASMA AND APPARATUS FOR TREATING SUBSTRAT...

PLASMA SOURCE AND PLASMA GENERATION APPARATUS USING THE SAME

SEMICONDUCTOR DEVICE, PHOTOELECTRONIC DEVICE, AND METHOD FOR MANUFA...

ION BEAM ETCHING APPARATUS

METHOD FOR ETCHING ATOMIC LAYER OF GRAPHINE

METHOD FOR CONTROLLING SYNCHRONIZATION OF PULSED PLASMA BY APPLYING...

Apparatus and Method For Incorporating Composition Into Substrate U...

ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME

ATOMIC LAYER DEPOSITION APPARATUS USING NEUTRAL BEAM AND METHOD OF...

NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARA...

APPARATUS AND METHOD FOR INCORPORATING COMPOSITION INTO SUBSTRATE U...

INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LI...

INDUCTIVELY COUPLED PLASMA APPARATUS

Apparatus and method for depositing thin film

PLASMA GENERATING APPARATUS AND METHOD USING NEUTRAL BEAM

Method of forming nano-sized MTJ cell without contact hole

Inductively coupled plasma processing apparatus having internal lin...