PLASMA GENERATING APPARATUS AND METHOD USING NEUTRAL BEAM

Abstract

A plasma generating apparatus and method using a neutral beam, capable of readily generating plasma at the same gas flow rate by changing the structure of an ion gun, without a separate ignition device, are provided. The apparatus includes a plasma generating part formed of a quartz cup, a radio frequency (RF) applying antenna disposed at the periphery of the plasma generating part, a cooling water supply part disposed at the periphery of the plasma generating part, and an igniter in direct communication with the plasma generating part, wherein a gas for generating plasma is supplied into the igniter, and the igniter has a higher local pressure than the plasma generating part at the same gas flow rate. The ion gun is also cheaper to manufacture since it does not require a separate power supply.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a schematic cross-sectional view of an atmospheric pressure plasma generating apparatus including a conventional igniter;

FIG. 2 is a view of an etching apparatus using a neutral beam applied to the present invention;

FIG. 3 is a view of a plasma generating apparatus using a neutral beam according to the present invention; and

FIG. 4 is a flowchart for explaining a process of generating plasma in the plasma generating apparatus shown in FIG. 3.

Claims

1. A plasma generating apparatus using a neutral beam comprising: a plasma generating part formed of a quartz cup;a radio frequency (RF) applying antenna disposed at the periphery of the plasma generating part;a cooling water supply part disposed at the periphery of the plasma generating part; andan igniter in direct communication with the plasma generating part,wherein a gas for generating plasma is supplied into the igniter, and the igniter has a higher local pressure than the plasma generating part at the same gas flow rate.

2. The plasma generating apparatus according to claim 1, wherein the igniter has a smaller volume than the plasma generating part.

3. The plasma generating apparatus according to claim 2, wherein the igniter has a hole in communication with the plasma generating part.

4. The plasma generating apparatus according to claim 3, wherein the hole has a diameter of about 0.5 mm-2 mm.

5. The plasma generating apparatus according to claim 4, wherein the igniter is disposed on the plasma generating part.

6. The plasma generating apparatus according to claim 5, further comprising an electromagnetic interference (EMI) filter for blocking electromagnetic waves generated in the plasma generating apparatus.

7. A plasma generating method using a neutral beam comprising: preparing a plasma gas source for using a neutral beam;supplying the gas source to a first plasma generating part; andsupplying plasma generated from the first plasma generating part to a second plasma generating part,wherein the first plasma generating part is in direct communication with the second plasma generating part, and the plasma is supplied from the first plasma generating part to the second plasma generating part through a hole formed at the first plasma generating part.

8. The plasma generating method according to claim 7, wherein the first plasma generating part is an igniter having a smaller volume than the second plasma generating part.

9. The plasma generating method according to claim 8, wherein the hole has a diameter of about 0.5 mm-2 mm.

10. The plasma generating method according to claim 9, wherein the igniter has a higher local pressure than the second plasma generating part at the same gas flow rate.