Glen Eric Egami

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chuck for mounting a semiconductor wafer for liquid immersion proce...
- Patent number 9,177,849
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Rajesh Kelekar
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method for reducing particles and marks on wafer surface...
- Patent number 9,016,289
- Issue date Apr 28, 2015
- Intermolecular, Inc.
- Satbir Kahlon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Chuck for Mounting a Semiconductor Wafer for Liquid Immersion Proce...
- Publication number 20140166050
- Publication date Jun 19, 2014
- Intermolecular, Inc.
- Rajesh Kelekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION SITE ISOLATION REACTOR
- Publication number 20130164937
- Publication date Jun 27, 2013
- Intermolecular, Inc.
- Glen Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR REDUCING PARTICLES AND MARKS ON WAFER SURFACE...
- Publication number 20130133704
- Publication date May 30, 2013
- Intermolecular, Inc.
- Satbir Kahlon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
No-Contact Wet Processing Tool with Fluid Barrier
- Publication number 20130025688
- Publication date Jan 31, 2013
- Intermolecular, Inc.
- Glen Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
No-Contact Wet Processing Tool with Liquid Barrier
- Publication number 20130025690
- Publication date Jan 31, 2013
- Intermolecular, Inc.
- Glen Egami
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Induction Heating for Substrate Processing
- Publication number 20120148760
- Publication date Jun 14, 2012
- Glen Eric Egami
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE CARRIER DESIGN FOR IMPROVED PHOTOLUMINESCENCE UNIFORMITY
- Publication number 20110049779
- Publication date Mar 3, 2011
- Applied Materials, Inc.
- GLEN ERIC EGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE CATHODE FOR PLASMA ETCHING
- Publication number 20090014323
- Publication date Jan 15, 2009
- Boris Yendler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Catch-cup to diverter alignment leveling jig
- Publication number 20080268651
- Publication date Oct 30, 2008
- Kent Riley Child
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE WAFER BACKSIDE WET CLEAN
- Publication number 20070181149
- Publication date Aug 9, 2007
- Alexander Sou-Kang Ko
- B08 - CLEANING

Glen Eric Egami

Person

Patents Grantslast 30 patents

Chuck for mounting a semiconductor wafer for liquid immersion proce...

System and method for reducing particles and marks on wafer surface...

Patents Applicationslast 30 patents

Chuck for Mounting a Semiconductor Wafer for Liquid Immersion Proce...

CHEMICAL MECHANICAL PLANARIZATION SITE ISOLATION REACTOR

SYSTEM AND METHOD FOR REDUCING PARTICLES AND MARKS ON WAFER SURFACE...

No-Contact Wet Processing Tool with Fluid Barrier

No-Contact Wet Processing Tool with Liquid Barrier

Induction Heating for Substrate Processing

SUBSTRATE CARRIER DESIGN FOR IMPROVED PHOTOLUMINESCENCE UNIFORMITY

HIGH TEMPERATURE CATHODE FOR PLASMA ETCHING

Catch-cup to diverter alignment leveling jig

SINGLE WAFER BACKSIDE WET CLEAN