Glen Gilchrist

Person

Danvers, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Angle control for neutral reactive species generated in a plasma
- Patent number 11,881,378
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming elongated contact hole ends
- Patent number 11,842,923
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for spatially resolved optical metrology of an io...
- Patent number 11,380,517
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition using a substrate scanning system
- Patent number 11,361,968
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Glen F R Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming elongated contact hole ends
- Patent number 11,335,590
- Issue date May 17, 2022
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming elongated contact hole ends
- Patent number 10,840,132
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for differential in situ cleaning
- Patent number 10,730,082
- Issue date Aug 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Glen F R Gilchrist
- B08 - CLEANING
Information Patent Grant
System and method for spatially resolved optical metrology of an io...
- Patent number 10,699,871
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,633,743
- Issue date Apr 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,600,616
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Angular control of ion beam for vertical surface treatment
- Patent number 10,535,522
- Issue date Jan 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques for anisotropic substrate etching
- Patent number 10,193,066
- Issue date Jan 29, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Angle control for radicals and reactive neutral ion beams
- Patent number 10,141,161
- Issue date Nov 27, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,128,082
- Issue date Nov 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for ion beam device
- Patent number 10,062,548
- Issue date Aug 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,000,853
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma dry strip pretreatment to enhance ion implanted resist removal
- Patent number 9,740,104
- Issue date Aug 22, 2017
- Lam Research Corporation
- Ivan L. Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 9,611,552
- Issue date Apr 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for electronic diagnostics of a process vacuum en...
- Patent number 7,289,863
- Issue date Oct 30, 2007
- Brooks Automation, Inc.
- Joseph D. Arruda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ANGLE CONTROL FOR NEUTRAL REACTIVE SPECIES GENERATED IN A PLASMA
- Publication number 20230369013
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES
- Publication number 20230369022
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING ELONGATED CONTACT HOLE ENDS
- Publication number 20220277990
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Glen F.R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Atomic Layer Deposition Using A Substrate Scanning System
- Publication number 20220068644
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Glen F R Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW VOLATILITY MATERIAL REMOVAL FROM A SEMICONDUCTOR DEVICE
- Publication number 20210159068
- Publication date May 27, 2021
- Applied Materials, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING ELONGATED CONTACT HOLE ENDS
- Publication number 20210020499
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Glen F.R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...
- Publication number 20200273661
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...
- Publication number 20200152417
- Publication date May 14, 2020
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20190006149
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES FOR ANISOTROPIC SUBSTRATE ETCHING
- Publication number 20190006587
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Glen F. R. Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20180265988
- Publication date Sep 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus And Method For Differential In Situ Cleaning
- Publication number 20180111171
- Publication date Apr 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- B08 - CLEANING
Information Patent Application
Angle Control For Radicals And Reactive Neutral Ion Beams
- Publication number 20180076007
- Publication date Mar 15, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20170159188
- Publication date Jun 8, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION SYSTEM FOR ION BEAM DEVICE
- Publication number 20170062185
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170025252
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20160265121
- Publication date Sep 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA DRY STRIP PRETREATMENT TO ENHANCE ION IMPLANTED RESIST REMOVAL
- Publication number 20150316857
- Publication date Nov 5, 2015
- LAM RESEARCH CORPORATION
- Ivan L. Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20130305989
- Publication date Nov 21, 2013
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
- Publication number 20110108058
- Publication date May 12, 2011
- Axcelis Technologies, Inc.
- Aseem K. Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for electronic diagnostics of a process vacuum en...
- Publication number 20070043534
- Publication date Feb 22, 2007
- Joseph D. Arruda
- G01 - MEASURING TESTING

Glen Gilchrist

Person

Patents Grantslast 30 patents

Angle control for neutral reactive species generated in a plasma

Methods for forming elongated contact hole ends

System and method for spatially resolved optical metrology of an io...

Atomic layer deposition using a substrate scanning system

Methods for forming elongated contact hole ends

Methods for forming elongated contact hole ends

Apparatus and method for differential in situ cleaning

System and method for spatially resolved optical metrology of an io...

System and method for controllable non-volatile metal removal

Apparatus and techniques to treat substrates using directional plas...

Angular control of ion beam for vertical surface treatment

Apparatus and techniques for anisotropic substrate etching

Angle control for radicals and reactive neutral ion beams

Apparatus and techniques to treat substrates using directional plas...

Gas injection system for ion beam device

System and method for controllable non-volatile metal removal

Apparatus and techniques to treat substrates using directional plas...

Plasma dry strip pretreatment to enhance ion implanted resist removal

Apparatus and techniques to treat substrates using directional plas...

System and method for controllable non-volatile metal removal

System and method for electronic diagnostics of a process vacuum en...

Patents Applicationslast 30 patents

ANGLE CONTROL FOR NEUTRAL REACTIVE SPECIES GENERATED IN A PLASMA

RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES

METHODS FOR FORMING ELONGATED CONTACT HOLE ENDS

Atomic Layer Deposition Using A Substrate Scanning System

LOW VOLATILITY MATERIAL REMOVAL FROM A SEMICONDUCTOR DEVICE

METHODS FOR FORMING ELONGATED CONTACT HOLE ENDS

SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...

SYSTEM AND METHOD FOR SPATIALLY RESOLVED OPTICAL METROLOGY OF AN IO...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES FOR ANISOTROPIC SUBSTRATE ETCHING

System And Method For Controllable Non-Volatile Metal Removal

Apparatus And Method For Differential In Situ Cleaning

Angle Control For Radicals And Reactive Neutral Ion Beams

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

System And Method For Controllable Non-Volatile Metal Removal

GAS INJECTION SYSTEM FOR ION BEAM DEVICE

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

System And Method For Controllable Non-Volatile Metal Removal

PLASMA DRY STRIP PRETREATMENT TO ENHANCE ION IMPLANTED RESIST REMOVAL

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

System and method for electronic diagnostics of a process vacuum en...