Glenn A. Roberson Jr.

Person

Hollister, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Removal of CMP residue from semiconductor substrate using supercrit...
- Patent number 6,537,916
- Issue date Mar 25, 2003
- Tokyo Electron Limited
- William H. Mullee
- B08 - CLEANING
Information Patent Grant
Molecular contamination control system
- Patent number 6,368,411
- Issue date Apr 9, 2002
- Semifab Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of CMP residue from semiconductors using supercritical carb...
- Patent number 6,277,753
- Issue date Aug 21, 2001
- Supercritical Systems Inc.
- William H. Mullee
- B08 - CLEANING
Information Patent Grant
Molecular contamination control system
- Patent number 6,221,163
- Issue date Apr 24, 2001
- Semifab Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking and environmental purging system for integrated circuit waf...
- Patent number 6,120,371
- Issue date Sep 19, 2000
- Semifab Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molecular contamination control system
- Patent number 6,042,651
- Issue date Mar 28, 2000
- Semifab Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molecular contamination control system
- Patent number 5,879,458
- Issue date Mar 9, 1999
- Semifab Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking and environmental purging system for integrated circuit waf...
- Patent number 5,848,933
- Issue date Dec 15, 1998
- Semifab, Incorporated
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking and environmental purging system for integrated circuit waf...
- Patent number 5,674,123
- Issue date Oct 7, 1997
- Semifab
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for precise volumetrio diluting/mixing of chemicals
- Patent number 5,490,611
- Issue date Feb 13, 1996
- Applied Chemical Solutions, Inc.
- Eugene W. Bernosky
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information Patent Grant
Process and apparatus for precise volumetric diluting/mixing of che...
- Patent number 5,370,269
- Issue date Dec 6, 1994
- Applied Chemical Solutions
- Eugene W. Bernosky
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information Patent Grant
Vapor device and method for drying articles such as semiconductor w...
- Patent number 5,315,766
- Issue date May 31, 1994
- Semifab Incorporated
- Glenn A. Roberson
- F26 - DRYING
Information Patent Grant
Vapor device and method for drying articles such as semiconductor w...
- Patent number 5,115,576
- Issue date May 26, 1992
- Semifab Incorporated
- Glenn A. Roberson
- F26 - DRYING
Information Patent Grant
Vapor device and method for drying articles such as semiconductor w...
- Patent number 4,977,688
- Issue date Dec 18, 1990
- Semifab Incorporated
- Glenn A. Roberson
- F26 - DRYING

Patents Applicationslast 30 patents

Information Patent Application
Removal of CMP and post-CMP residue from semiconductors using super...
- Publication number 20040142564
- Publication date Jul 22, 2004
- William H. Mullee
- B08 - CLEANING
Information Patent Application
Removal of CMP residue from semiconductor substrate using supercrit...
- Publication number 20020086537
- Publication date Jul 4, 2002
- Supercritical Systems Inc.
- William H. Mullee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Molecular contamination control system
- Publication number 20010042439
- Publication date Nov 22, 2001
- Glenn A. Roberson
- H01 - BASIC ELECTRIC ELEMENTS

Glenn A. Roberson Jr.

Person

Patents Grantslast 30 patents

Removal of CMP residue from semiconductor substrate using supercrit...

Molecular contamination control system

Removal of CMP residue from semiconductors using supercritical carb...

Molecular contamination control system

Docking and environmental purging system for integrated circuit waf...

Molecular contamination control system

Molecular contamination control system

Docking and environmental purging system for integrated circuit waf...

Docking and environmental purging system for integrated circuit waf...

Process for precise volumetrio diluting/mixing of chemicals

Process and apparatus for precise volumetric diluting/mixing of che...

Vapor device and method for drying articles such as semiconductor w...

Vapor device and method for drying articles such as semiconductor w...

Vapor device and method for drying articles such as semiconductor w...

Patents Applicationslast 30 patents

Removal of CMP and post-CMP residue from semiconductors using super...

Removal of CMP residue from semiconductor substrate using supercrit...

Molecular contamination control system