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Gopu KRISHNA
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Whitefield, IN
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Patents Grants
last 30 patents
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Patent Grant
Capacitive method of detecting wafer chucking and de-chucking
Patent number
11,610,800
Issue date
Mar 21, 2023
Applied Materials, Inc.
Job George Konnoth Joseph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-station chamber lid with precise temperature and flow control
Patent number
11,098,404
Issue date
Aug 24, 2021
Applied Materials, Inc.
Dhritiman Subha Kashyap
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for semiconductor processing chamber isolation...
Patent number
10,679,827
Issue date
Jun 9, 2020
Applied Materials, Inc.
Gopu Krishna
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CAPACITIVE METHOD OF DETECTING WAFER CHUCKING AND DE-CHUCKING
Publication number
20220301915
Publication date
Sep 22, 2022
Applied Materials, Inc.
Job George Konnoth Joseph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING
Publication number
20210159094
Publication date
May 27, 2021
Applied Materials, Inc.
Yuxing ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Station Chamber Lid With Precise Temperature And Flow Control
Publication number
20200102651
Publication date
Apr 2, 2020
Applied Materials, Inc.
Dhritiman Subha Kashyap
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING CHAMBER ISOLATION...
Publication number
20180211820
Publication date
Jul 26, 2018
Applied Materials, Inc.
Gopu KRISHNA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...