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Graham W. Hills
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Salisbury, PA, US
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last 30 patents
Information
Patent Grant
Mechanism for bow reduction and critical dimension control in etchi...
Patent number
6,217,786
Issue date
Apr 17, 2001
Lam Research Corporation
Graham Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor with enhanced plasma uniformity by gas addition, red...
Patent number
6,125,788
Issue date
Oct 3, 2000
Applied Materials, Inc.
Graham W. Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor with enhanced plasma uniformity by gas addition, and...
Patent number
5,744,049
Issue date
Apr 28, 1998
Applied Materials, Inc.
Graham W. Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focus ring for semiconductor wafer processing in a plasma reactor
Patent number
5,685,914
Issue date
Nov 11, 1997
Applied Materials, Inc.
Graham W. Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for altering magnetic coil current to produce...
Patent number
5,534,108
Issue date
Jul 9, 1996
Applied Materials, Inc.
Xue-Yu Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of electrostatic forces to reduce particle contamination in sem...
Patent number
5,410,122
Issue date
Apr 25, 1995
Applied Materials, Inc.
Yuh-Jia Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for simultaneous removal of photoresist and polysilicon/pol...
Patent number
5,382,316
Issue date
Jan 17, 1995
Applied Materials, Inc.
Graham W. Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reactive ion etch process including hydrogen radicals
Patent number
5,242,538
Issue date
Sep 7, 1993
Applied Materials, Inc.
Matt M. Hamrah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for forming a via in an integrated circuit structure by etc...
Patent number
5,176,790
Issue date
Jan 5, 1993
Applied Materials, Inc.
Paul Arleo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of taper-etching with photoresist adhesion layer
Patent number
5,057,186
Issue date
Oct 15, 1991
AT&T Bell Laboratories
Hongzong Chew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making integrated circuits having a planarized dielectric
Patent number
5,026,666
Issue date
Jun 25, 1991
AT&T Bell Laboratories
Graham W. Hills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing mobile ion contamination in semiconductor integ...
Patent number
4,980,301
Issue date
Dec 25, 1990
AT&T Bell Laboratories
Alain S. Harrus
H01 - BASIC ELECTRIC ELEMENTS