Greg Bettencourt

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ductile mode drilling methods for brittle components of plasma proc...
- Patent number 9,314,854
- Issue date Apr 19, 2016
- Lam Research Corporation
- Lihua Li Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,796,153
- Issue date Aug 5, 2014
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,536,071
- Issue date Sep 17, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cam-locked showerhead electrode and assembly
- Patent number 8,470,127
- Issue date Jun 25, 2013
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,419,959
- Issue date Apr 16, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,414,719
- Issue date Apr 9, 2013
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,272,346
- Issue date Sep 25, 2012
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Showerhead electrodes
- Patent number 8,268,117
- Issue date Sep 18, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,221,582
- Issue date Jul 17, 2012
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,216,418
- Issue date Jul 10, 2012
- Lam Research Corporation
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,187,413
- Issue date May 29, 2012
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies and plasma processing chambers inco...
- Patent number 8,152,954
- Issue date Apr 10, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot edge ring with sloped upper surface
- Patent number 8,084,375
- Issue date Dec 27, 2011
- Lam Research Corporation
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding and spinning assembly and methods for making the...
- Patent number 7,226,055
- Issue date Jun 5, 2007
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DUCTILE MODE DRILLING METHODS FOR BRITTLE COMPONENTS OF PLASMA PROC...
- Publication number 20140213061
- Publication date Jul 31, 2014
- LAM RESEARCH CORPORATION
- Lihua Li Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20130337654
- Publication date Dec 19, 2013
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20130034967
- Publication date Feb 7, 2013
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20120258603
- Publication date Oct 11, 2012
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY
- Publication number 20120175062
- Publication date Jul 12, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODES
- Publication number 20120160941
- Publication date Jun 28, 2012
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT EDGE RING WITH SLOPED UPPER SURFACE
- Publication number 20110104884
- Publication date May 5, 2011
- LAM RESEARCH CORPORATION
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20110070740
- Publication date Mar 24, 2011
- LAM RESEARCH CORPORATION
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20100261354
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- GREGORY R. BETTENCOURT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamped monolithic showerhead electrode
- Publication number 20100003829
- Publication date Jan 7, 2010
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20090236040
- Publication date Sep 24, 2009
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
- Publication number 20090095424
- Publication date Apr 16, 2009
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20080308229
- Publication date Dec 18, 2008
- LAM RESEARCH CORPORATION
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Chemical mechanical polishing atomizing rinse system
- Publication number 20040162007
- Publication date Aug 19, 2004
- Ky Phan
- B24 - GRINDING POLISHING

Greg Bettencourt

Person

Patents Grantslast 30 patents

Ductile mode drilling methods for brittle components of plasma proc...

Clamped monolithic showerhead electrode

Gasket with positioning feature for clamped monolithic showerhead e...

Cam-locked showerhead electrode and assembly

Clamped monolithic showerhead electrode

Clamped monolithic showerhead electrode

Gasket with positioning feature for clamped monolithic showerhead e...

Showerhead electrodes

Clamped monolithic showerhead electrode

Electrode assembly and plasma processing chamber utilizing thermall...

Electrode assembly and plasma processing chamber utilizing thermall...

Showerhead electrode assemblies and plasma processing chambers inco...

Hot edge ring with sloped upper surface

Substrate holding and spinning assembly and methods for making the...

Patents Applicationslast 30 patents

DUCTILE MODE DRILLING METHODS FOR BRITTLE COMPONENTS OF PLASMA PROC...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

SHOWERHEAD ELECTRODES

HOT EDGE RING WITH SLOPED UPPER SURFACE

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...

Clamped monolithic showerhead electrode

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

Chemical mechanical polishing atomizing rinse system