Gregory M. Bartlett

Person

Chandler, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-port gas injection system and reactor system including same
- Patent number 11,053,591
- Issue date Jul 6, 2021
- ASM IP Holding B.V.
- Mingyang Ma
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Process for forming a film on a substrate using multi-port injectio...
- Patent number 10,262,859
- Issue date Apr 16, 2019
- ASM IP Holding B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radial and thickness control via biased multi-port injection settings
- Patent number 9,892,913
- Issue date Feb 13, 2018
- ASM IP Holding B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for mass flow controller verification
- Patent number 9,169,975
- Issue date Oct 27, 2015
- ASM IP Holding B.V.
- Michael Christopher Sarin
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,834,955
- Issue date Sep 16, 2014
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,728,239
- Issue date May 20, 2014
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 8,088,225
- Issue date Jan 3, 2012
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of temperature control system for semiconductor process...
- Patent number 8,047,706
- Issue date Nov 1, 2011
- ASM America, Inc.
- Matthew G. Goodman
- G01 - MEASURING TESTING
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 7,648,579
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etch method using non-halocarbon source gases
- Patent number 5,431,778
- Issue date Jul 11, 1995
- Motorola, Inc.
- Jonathan C. Dahm
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER ARRANGEMENTS INCLUDING BACKPRESSURE CONTROLLERS, SEMICONDUC...
- Publication number 20250207257
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Saikat Banerjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PORT GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20210310125
- Publication date Oct 7, 2021
- ASM IP HOLDING B.V.
- Mingyang Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PORT GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20200040458
- Publication date Feb 6, 2020
- ASM IP HOLDING B.V.
- Mingyang Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS
- Publication number 20180151358
- Publication date May 31, 2018
- ASM IP HOLDING B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS
- Publication number 20170278707
- Publication date Sep 28, 2017
- ASM IP HOLDING B.V.
- Joe Margetis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR A GAS PANEL WITH CONSTANT GAS FLOW
- Publication number 20140209177
- Publication date Jul 31, 2014
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
- Publication number 20140060147
- Publication date Mar 6, 2014
- ASM IP HOLDING B.V.
- Michael Christopher Sarin
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for a Gas Panel with Constant Gas Flow
- Publication number 20130029496
- Publication date Jan 31, 2013
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...
- Publication number 20100089314
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...
- Publication number 20090147819
- Publication date Jun 11, 2009
- ASM AMERICA, INC
- MATTHEW G. GOODMAN
- G01 - MEASURING TESTING
Information Patent Application
Substrate support system for reduced autodoping and backside deposi...
- Publication number 20050193952
- Publication date Sep 8, 2005
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Gregory M. Bartlett

Person

Patents Grantslast 30 patents

Multi-port gas injection system and reactor system including same

Process for forming a film on a substrate using multi-port injectio...

Radial and thickness control via biased multi-port injection settings

Systems and methods for mass flow controller verification

Methods and apparatus for a gas panel with constant gas flow

Methods and apparatus for a gas panel with constant gas flow

Substrate support system for reduced autodoping and backside deposi...

Calibration of temperature control system for semiconductor process...

Substrate support system for reduced autodoping and backside deposi...

Dry etch method using non-halocarbon source gases

Patents Applicationslast 30 patents

CHAMBER ARRANGEMENTS INCLUDING BACKPRESSURE CONTROLLERS, SEMICONDUC...

MULTI-PORT GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME

MULTI-PORT GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME

RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS

RADIAL AND THICKNESS CONTROL VIA BIASED MULTI-PORT INJECTION SETTINGS

METHODS AND APPARATUS FOR A GAS PANEL WITH CONSTANT GAS FLOW

SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION

Methods and Apparatus for a Gas Panel with Constant Gas Flow

SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...

CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...

Substrate support system for reduced autodoping and backside deposi...