Gregory M. Bartlett

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Chandler, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for mass flow controller verification
- Patent number 9,169,975
- Issue date Oct 27, 2015
- ASM IP Holding B.V.
- Michael Christopher Sarin
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,834,955
- Issue date Sep 16, 2014
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,728,239
- Issue date May 20, 2014
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 8,088,225
- Issue date Jan 3, 2012
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of temperature control system for semiconductor process...
- Patent number 8,047,706
- Issue date Nov 1, 2011
- ASM America, Inc.
- Matthew G. Goodman
- G01 - MEASURING TESTING
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 7,648,579
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR A GAS PANEL WITH CONSTANT GAS FLOW
- Publication number 20140209177
- Publication date Jul 31, 2014
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
- Publication number 20140060147
- Publication date Mar 6, 2014
- ASM IP HOLDING B.V.
- Michael Christopher Sarin
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for a Gas Panel with Constant Gas Flow
- Publication number 20130029496
- Publication date Jan 31, 2013
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...
- Publication number 20100089314
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...
- Publication number 20090147819
- Publication date Jun 11, 2009
- ASM AMERICA, INC
- MATTHEW G. GOODMAN
- G01 - MEASURING TESTING
Information Patent Application
Substrate support system for reduced autodoping and backside deposi...
- Publication number 20050193952
- Publication date Sep 8, 2005
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS