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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
Patent number
8,236,706
Issue date
Aug 7, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single wafer thermal CVD processes for hemispherical grained silico...
Patent number
7,341,907
Issue date
Mar 11, 2008
Applied Materials, Inc.
Ming Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for exposing a substrate to plasma radicals
Patent number
6,450,116
Issue date
Sep 17, 2002
Applied Materials, Inc.
David B. Noble
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for insitu vapor generation
Patent number
6,410,456
Issue date
Jun 25, 2002
Applied Materials, Inc.
Christian M. Gronet
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method for insitu vapor generation for forming an oxide on a substrate
Patent number
6,159,866
Issue date
Dec 12, 2000
Applied Materials, Inc.
Christian M. Gronet
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method of oxidizing a substrate in the presence of nitride and oxyn...
Patent number
6,114,258
Issue date
Sep 5, 2000
Applied Materials, Inc.
Gary E. Miner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for insitu vapor generation
Patent number
6,037,273
Issue date
Mar 14, 2000
Applied Materials, Inc.
Christian M. Gronet
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20120298039
Publication date
Nov 29, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20100151694
Publication date
Jun 17, 2010
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single wafer thermal CVD processes for hemispherical grained silico...
Publication number
20060223333
Publication date
Oct 5, 2006
Ming Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of annealing an oxide film
Publication number
20030124873
Publication date
Jul 3, 2003
Guangcai Xing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for insitu vapor generation
Publication number
20020136831
Publication date
Sep 26, 2002
Christian M. Gronet
C01 - INORGANIC CHEMISTRY
Information
Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO PLASMA RADICALS
Publication number
20020073925
Publication date
Jun 20, 2002
DAVID B. NOBLE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...