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Gunilla Jacobson
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Gilbert, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Treatment of a dielectric layer using supercritical CO2
Patent number
7,387,868
Issue date
Jun 17, 2008
TOKYO ELECTRON LIMITED
Gunilla Jacobson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for processing a substrate using supercritical ca...
Patent number
7,250,374
Issue date
Jul 31, 2007
Tokyo Electron Limited
Glenn Gale
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Encapsulated Nanoparticles for Drug Delivery
Publication number
20080095856
Publication date
Apr 24, 2008
Gunilla B. Jacobson
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Removal of residues for low-k dielectric materials in wafer processing
Publication number
20070000519
Publication date
Jan 4, 2007
Gunilla Jacobson
B08 - CLEANING
Information
Patent Application
REMOVAL OF PARTICLES FROM SUBSTRATE SURFACES USING SUPERCRITICAL PR...
Publication number
20060255012
Publication date
Nov 16, 2006
Gunilla Jacobson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Neutralization of systemic poisoning in wafer processing
Publication number
20060219268
Publication date
Oct 5, 2006
Gunilla Jacobson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etching and cleaning BPSG material using supercritical processing
Publication number
20060186088
Publication date
Aug 24, 2006
Gunilla Jacobson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOVAL OF POST ETCH RESIDUE FOR A SUBSTRATE WITH OPEN METAL SURFACES
Publication number
20060180572
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
Gunilla Jacobson
B08 - CLEANING
Information
Patent Application
Method for removing a residue from a substrate using supercritical...
Publication number
20060102204
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Gunilla Jacobson
B08 - CLEANING
Information
Patent Application
Method and system for treating a substrate using a supercritical fluid
Publication number
20060102591
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Gunilla Jacobson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System for removing a residue from a substrate using supercritical...
Publication number
20060102208
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Gunilla Jacobson
B08 - CLEANING
Information
Patent Application
System and method for processing a substrate using supercritical ca...
Publication number
20060003592
Publication date
Jan 5, 2006
TOKYO ELECTRON LIMITED
Glenn Gale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Treatment of a dielectric layer using supercritical CO2
Publication number
20050191865
Publication date
Sep 1, 2005
Gunilla Jacobson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...