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Linnich, DE
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Patents Grants
last 30 patents
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Patent Grant
Process and device for cleaning and etching a substrate with a tran...
Patent number
8,425,793
Issue date
Apr 23, 2013
Forschungszentrum Juelich GmbH
Joachim Müller
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Process and Device for Cleaning and Etching a Substrate Wi
Publication number
20080296262
Publication date
Dec 4, 2008
Joachim Muller
H01 - BASIC ELECTRIC ELEMENTS