GUODONG BIAN

Follow

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
- Patent number 11,952,653
- Issue date Apr 9, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Liren Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precleaning chamber and plasma processing apparatus
- Patent number 10,622,224
- Issue date Apr 14, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING REACTION CHAMBER AND PROCESS ASSEMBLY OF SPUTTERING REAC...
- Publication number 20230055006
- Publication date Feb 23, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Liren HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELD COOLING ASSEMBLY, REACTION CHAMBER AND SEMICONDUCTOR PROCESS...
- Publication number 20210351016
- Publication date Nov 11, 2021
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS
- Publication number 20170330769
- Publication date Nov 16, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing SHE
- B08 - CLEANING
Information Patent Application
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...
- Publication number 20160148789
- Publication date May 26, 2016
- BEIJING NMC CO., LTD
- PENG CHEN
- H01 - BASIC ELECTRIC ELEMENTS