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Guy Ben Dov
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Haifa, IL
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last 30 patents
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Patent Grant
Field-to-field corrections using overlay targets
Patent number
10,990,022
Issue date
Apr 27, 2021
KLA Corporation
Enna Leshinsky-Altshuller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Symmetric target design in scatterometry overlay metrology
Patent number
10,591,406
Issue date
Mar 17, 2020
KLA-Tencor Corporation
Barak Bringoltz
G01 - MEASURING TESTING
Information
Patent Grant
Pupil plane calibration for scatterometry overlay measurement
Patent number
9,909,982
Issue date
Mar 6, 2018
KLA-Tencor Corporation
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Symmetric target design in scatterometry overlay metrology
Patent number
9,739,702
Issue date
Aug 22, 2017
KLA-Tencor Corporation
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Field-to-Field Corrections Using Overlay Targets
Publication number
20200201193
Publication date
Jun 25, 2020
KLA Corporation
Enna Leshinsky-Altshuller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY
Publication number
20160216197
Publication date
Jul 28, 2016
KLA-Tencor Corporation
Barak Bringoltz
G02 - OPTICS
Information
Patent Application
SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY
Publication number
20150204664
Publication date
Jul 23, 2015
KLA-Tencor Corporation
Barak Bringoltz
G01 - MEASURING TESTING
Information
Patent Application
PUPIL PLANE CALIBRATION FOR SCATTEROMETRY OVERLAY MEASUREMENT
Publication number
20140257734
Publication date
Sep 11, 2014
KLA-Tencor Corporation
Barak Bringoltz
G01 - MEASURING TESTING