Membership
Tour
Register
Log in
Guy Hudson
Follow
Person
Boise, ID, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and methods for selective removal of material from wafer...
Patent number
8,053,371
Issue date
Nov 8, 2011
Micron Technology, Inc.
Russell C. Zahorik
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Contact integration method
Patent number
7,294,570
Issue date
Nov 13, 2007
Micron Technology, Inc.
Richard L. Elliott
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for selective removal of material from wafer alignment marks
Patent number
7,244,681
Issue date
Jul 17, 2007
Micron Technology, Inc.
Guy F. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling pH during planarization and cleaning of micr...
Patent number
7,214,125
Issue date
May 8, 2007
Micron Technology, Inc.
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Grant
Low friction polish-stop stratum for endpointing chemical-mechanica...
Patent number
RE39413
Issue date
Nov 28, 2006
Micron Technology, Inc.
Guy F. Hudson
438 - Semiconductor device manufacturing: process
Information
Patent Grant
Methods for using bi-modal abrasive slurries for mechanical and che...
Patent number
7,122,475
Issue date
Oct 17, 2006
Micron Technology, Inc.
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Grant
Method for post chemical-mechanical planarization cleaning of semic...
Patent number
7,045,017
Issue date
May 16, 2006
Micron Technology, Inc.
David Gonzales
B08 - CLEANING
Information
Patent Grant
Method for controlling pH during planarization and cleaning of micr...
Patent number
6,913,523
Issue date
Jul 5, 2005
Micron Technology, Inc.
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for selective removal of material from wafer alignment marks
Patent number
6,889,698
Issue date
May 10, 2005
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of planarizing by removing all or part of an oxidizable mate...
Patent number
6,803,316
Issue date
Oct 12, 2004
Micron Technology, Inc.
Guy F. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatuses for making and using bi-modal abrasive slurr...
Patent number
6,794,289
Issue date
Sep 21, 2004
Micron Technology, Inc.
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Grant
Method for controlling pH during planarization and cleaning of micr...
Patent number
6,716,089
Issue date
Apr 6, 2004
Micron Technology, Inc.
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Grant
Contact integration method
Patent number
6,713,384
Issue date
Mar 30, 2004
Micron Technology, Inc.
Richard L. Elliott
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for post chemical-mechanical planarization cleaning of semic...
Patent number
6,640,816
Issue date
Nov 4, 2003
Micron Technology, Inc.
David Gonzales
B08 - CLEANING
Information
Patent Grant
Method of removing material from a semiconductor substrate
Patent number
6,635,574
Issue date
Oct 21, 2003
Micron Technology, Inc.
Guy F. Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for selective removal of material from wafer alignment marks
Patent number
6,610,610
Issue date
Aug 26, 2003
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact integration article
Patent number
6,593,657
Issue date
Jul 15, 2003
Micron Technology, Inc.
Richard L. Elliott
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for selective removal of material from wafer alignment marks
Patent number
6,530,113
Issue date
Mar 11, 2003
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for selective removal of material from wafer a...
Patent number
6,447,634
Issue date
Sep 10, 2002
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for predicting process characteristics of poly...
Patent number
6,440,319
Issue date
Aug 27, 2002
Micron Technology, Inc.
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatuses for making and using bi-modal abrasive slurr...
Patent number
6,407,000
Issue date
Jun 18, 2002
Micron Technology, Inc.
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Grant
Planarization process with abrasive polishing slurry that is select...
Patent number
6,379,225
Issue date
Apr 30, 2002
Micron Technology, Inc.
Karl M. Robinson
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for controlling PH during planarization and cleaning of m...
Patent number
6,368,194
Issue date
Apr 9, 2002
Micron Technology, Inc.
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for selective removal of material from wafer a...
Patent number
6,329,301
Issue date
Dec 11, 2001
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for post chemical-mechanical planarization cleaning of semic...
Patent number
6,273,101
Issue date
Aug 14, 2001
Micron Technology, Inc.
David Gonzales
B08 - CLEANING
Information
Patent Grant
Method for controlling pH during planarization and cleaning of micr...
Patent number
6,220,934
Issue date
Apr 24, 2001
Micron Technology, Inc.
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing polymer surfaces on non-porous CMP pads
Patent number
6,200,901
Issue date
Mar 13, 2001
Micron Technology, Inc.
Guy F. Hudson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for predicting process characteristics of poly...
Patent number
6,114,706
Issue date
Sep 5, 2000
Micron Technology, Inc.
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for selective removal of material from wafer a...
Patent number
6,103,636
Issue date
Aug 15, 2000
Micron Technology, Inc.
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization process with abrasive polishing slurry that is select...
Patent number
6,062,952
Issue date
May 16, 2000
Karl M. Robinson
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Methods for selective removal of material from wafer alignment marks
Publication number
20070207613
Publication date
Sep 6, 2007
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING PH DURING PLANARIZATION AND CLEANING OF MICR...
Publication number
20060011585
Publication date
Jan 19, 2006
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Application
Systems for making and using bi-modal abrasive slurries for mechani...
Publication number
20040229551
Publication date
Nov 18, 2004
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Application
Methods for using bi-modal abrasive slurries for mechanical and che...
Publication number
20040198194
Publication date
Oct 7, 2004
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Application
Apparatuses for making and using bi-modal abrasive slurries for mec...
Publication number
20040198195
Publication date
Oct 7, 2004
Guy F. Hudson
B24 - GRINDING POLISHING
Information
Patent Application
Method for controlling PH during planarization and cleaning of micr...
Publication number
20040192174
Publication date
Sep 30, 2004
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Application
Contact integration method
Publication number
20040180535
Publication date
Sep 16, 2004
Micron Technology, Inc.
Richard L. Elliott
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for post chemical-mechanical planarization cleaning of semic...
Publication number
20040089326
Publication date
May 13, 2004
David Gonzales
B08 - CLEANING
Information
Patent Application
Methods for selective removal of material from wafer alignment marks
Publication number
20040038543
Publication date
Feb 26, 2004
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing polymer surfaces on nonporous CMP pads
Publication number
20030207577
Publication date
Nov 6, 2003
Guy F. Hudson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for selective removal of material from wafer alignment marks
Publication number
20030121538
Publication date
Jul 3, 2003
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for selective removal of material from wafer a...
Publication number
20020144720
Publication date
Oct 10, 2002
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatuses for making and using bi-modal abrasive slurr...
Publication number
20020146907
Publication date
Oct 10, 2002
Guy F. Hudson
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method and apparatus for selective removal of material from wafer a...
Publication number
20020025687
Publication date
Feb 28, 2002
Russell C. Zahorik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for controlling pH during planarization and cl...
Publication number
20020019197
Publication date
Feb 14, 2002
Judson R. Sharples
B24 - GRINDING POLISHING
Information
Patent Application
Method for post chemical-mechanical planarization cleaning of semic...
Publication number
20020011255
Publication date
Jan 31, 2002
David Gonzales
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing polymer surfaces on non-porous CMP pads
Publication number
20010007796
Publication date
Jul 12, 2001
Guy F. Hudson
H01 - BASIC ELECTRIC ELEMENTS