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KYUNGKI-DO, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method of attaching pad on edge ring
Patent number
11,189,467
Issue date
Nov 30, 2021
Samsung Electronics Co., Ltd.
Jin-Uk Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber system having compact installation set-up for an etch...
Patent number
7,776,226
Issue date
Aug 17, 2010
Samsung Electronics Co., Ltd.
Ki-Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber system having compact installation set-up for an etch...
Patent number
6,930,050
Issue date
Aug 16, 2005
Samsung Electronics Co., Ltd.
Ki-sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber system having compact installation set-up for an etch...
Patent number
6,503,365
Issue date
Jan 7, 2003
Samsung Electronics Co., Ltd.
Ki-sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device fabrication system
Patent number
6,398,430
Issue date
Jun 4, 2002
Samsung Electronics Co., Ltd.
Gyu-chan Jeoung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming semiconductor device pattern including cross-link...
Patent number
6,358,672
Issue date
Mar 19, 2002
Samsung Electronics Co., Ltd.
Gyu-chan Jeoung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD OF ATTACHING PAD ON EDGE RING
Publication number
20200161099
Publication date
May 21, 2020
Samsung Electronics Co., Ltd.
Jin-Uk Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER SYSTEM HAVING COMPACT INSTALLATION SET-UP FOR AN ETCH...
Publication number
20090291558
Publication date
Nov 26, 2009
Samsung Electronics Co., Ltd.
Ki-sang KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER SYSTEM HAVING COMPACT INSTALLATION SET-UP FOR AN ETCH...
Publication number
20090203211
Publication date
Aug 13, 2009
Samsung Electronics Co., Ltd.
Ki-sang KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-chambers system having compact installation set-up for an etc...
Publication number
20060026857
Publication date
Feb 9, 2006
Ki-sang Kim
D21 - PAPER-MAKING PRODUCTION OF CELLULOSE
Information
Patent Application
Multi-chamber system having compact installation set-up for an etch...
Publication number
20050236092
Publication date
Oct 27, 2005
Ki-Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-chamber system having compact installation set-up for an etch...
Publication number
20030073323
Publication date
Apr 17, 2003
Ki-Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE FABRICATION SYSTEM AND METHOD OF FORMING SEMIC...
Publication number
20010053500
Publication date
Dec 20, 2001
GYU-CHAN JEOUNG
H01 - BASIC ELECTRIC ELEMENTS