Hans-Artur Boesser

Person

Breidenbach, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Interferometric device for position measurement and coordinate meas...
- Patent number 8,351,049
- Issue date Jan 8, 2013
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for automatic detection of incorrect measurements...
- Patent number 8,154,595
- Issue date Apr 10, 2012
- Vistec Semiconductor Systems Jena GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Measuring system for structures on a substrate for semiconductor ma...
- Patent number 7,982,950
- Issue date Jul 19, 2011
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
System and method for determining positions of structures on a subs...
- Patent number 7,978,340
- Issue date Jul 12, 2011
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Coordinate measuring machine for measuring structures on a substrate
- Patent number 7,961,334
- Issue date Jun 14, 2011
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for determining an optical property of a mask
- Patent number 7,864,319
- Issue date Jan 4, 2011
- Vistec Semiconductor System GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining the focal position of at least two edges of...
- Patent number 7,551,296
- Issue date Jun 23, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G02 - OPTICS
Information Patent Grant
Measuring device and method for determining relative positions of a...
- Patent number 7,450,246
- Issue date Nov 11, 2008
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Metrology system and method for monitoring and correcting system ge...
- Publication number 20100302555
- Publication date Dec 2, 2010
- KLA-TENCOR MIE GMBH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Interferometric device for position measurement and coordinate meas...
- Publication number 20100020332
- Publication date Jan 28, 2010
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Device and method for determining an optical property of a mask
- Publication number 20090066955
- Publication date Mar 12, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Arrangement and method for improving the measurement accuracy in th...
- Publication number 20090066970
- Publication date Mar 12, 2009
- MueTec Automatisierte Mikroskopie und Messtechnik GmbH
- Gerd Scheuring
- G01 - MEASURING TESTING
Information Patent Application
Coordinate measuring machine for measuring structures on a substrate
- Publication number 20090031572
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
System and method for determining positions of structures on a subs...
- Publication number 20090033508
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS WITH ENHANCED RESOLUTION FOR MEASURING STRUCTURES ON A SU...
- Publication number 20080278790
- Publication date Nov 13, 2008
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G02 - OPTICS
Information Patent Application
Device for Inspecting a Microscopic Component
- Publication number 20080259327
- Publication date Oct 23, 2008
- Vistec Semiconductor Systems GmbH
- Hans-Juergen Brueck
- G02 - OPTICS
Information Patent Application
METHOD FOR DETERMINING THE FOCAL POSITION OF AT LEAST TWO EDGES OF...
- Publication number 20080252903
- Publication date Oct 16, 2008
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS...
- Publication number 20080202201
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems Jena GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERS...
- Publication number 20070206279
- Publication date Sep 6, 2007
- Vistec Semiconductor Systems GmbH
- Hans-Juergen Brueck
- G02 - OPTICS
Information Patent Application
Coordinate measuring device
- Publication number 20070046949
- Publication date Mar 1, 2007
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Measuring device and method for determining relative positions of a...
- Publication number 20060279743
- Publication date Dec 14, 2006
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for improving measuring accuracy in the determ...
- Publication number 20060274934
- Publication date Dec 7, 2006
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G02 - OPTICS
Information Patent Application
Apparatus and method for optically detecting an object
- Publication number 20060275017
- Publication date Dec 7, 2006
- Vistec Semiconductor Systems GmbH
- Wolfgang Sulik
- G02 - OPTICS

Hans-Artur Boesser

Person

Patents Grantslast 30 patents

Interferometric device for position measurement and coordinate meas...

Device and method for automatic detection of incorrect measurements...

Measuring system for structures on a substrate for semiconductor ma...

System and method for determining positions of structures on a subs...

Coordinate measuring machine for measuring structures on a substrate

Device and method for determining an optical property of a mask

Method for determining the focal position of at least two edges of...

Measuring device and method for determining relative positions of a...

Patents Applicationslast 30 patents

Metrology system and method for monitoring and correcting system ge...

Interferometric device for position measurement and coordinate meas...

Device and method for determining an optical property of a mask

Arrangement and method for improving the measurement accuracy in th...

Coordinate measuring machine for measuring structures on a substrate

System and method for determining positions of structures on a subs...

APPARATUS WITH ENHANCED RESOLUTION FOR MEASURING STRUCTURES ON A SU...

Device for Inspecting a Microscopic Component

METHOD FOR DETERMINING THE FOCAL POSITION OF AT LEAST TWO EDGES OF...

DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS...

DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERS...

Coordinate measuring device

Measuring device and method for determining relative positions of a...

Apparatus and method for improving measuring accuracy in the determ...

Apparatus and method for optically detecting an object