Hans-Peter Feuerbaum

Person

Munchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device with retarding field analyzer
- Patent number 8,203,119
- Issue date Jun 19, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Ralf Degenhardt
- G01 - MEASURING TESTING
Information Patent Grant
Focussing lens for charged particle beams
- Patent number 7,652,263
- Issue date Jan 26, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging system with multi source array
- Patent number 7,638,777
- Issue date Dec 29, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting a sample of a specimen by means...
- Patent number 7,586,093
- Issue date Sep 8, 2009
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and method for operating the same
- Patent number 7,274,018
- Issue date Sep 25, 2007
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microscope with minicolumn
- Patent number 7,075,092
- Issue date Jul 11, 2006
- Applied Materials, Inc.
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for operating the same
- Patent number 7,045,781
- Issue date May 16, 2006
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik Mbh
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi beam charged particle device
- Patent number 6,943,349
- Issue date Sep 13, 2005
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical column for charged particle beam device
- Patent number 6,936,817
- Issue date Aug 30, 2005
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microscope with minicolumn
- Patent number 6,740,889
- Issue date May 25, 2004
- Applied Materials, Inc.
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle device
- Patent number 6,730,907
- Issue date May 4, 2004
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterpruftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam column for charged particle beam device
- Patent number 6,576,908
- Issue date Jun 10, 2003
- Applied Materials, Inc.
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for examining specimen with a charged particle...
- Patent number 6,555,815
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for focusing a charged particle beam
- Patent number 6,555,824
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for testing the function of microstructure ele...
- Patent number 5,834,773
- Issue date Nov 10, 1998
- Ebetech Electron-Beam Technology Vertriebs GmbH
- Matthias Brunner
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Electrostatic-magnetic lens arrangement
- Patent number 5,780,859
- Issue date Jul 14, 1998
- ACT Advanced Circuit Testing Gesellschaft
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam device
- Patent number 5,422,486
- Issue date Jun 6, 1995
- ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruftechnik MbH
- Karl H. Herrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for corpuscular-optical examination and/or processing of mat...
- Patent number 5,329,125
- Issue date Jul 12, 1994
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik, mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating an electron beam measuring device
- Patent number 5,041,724
- Issue date Aug 20, 1991
- ICT Integrated Circuit Testing Gesellschaft fur, Halbleit Erpruftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector objective for particle beam apparatus
- Patent number 4,831,266
- Issue date May 16, 1989
- Siemens Aktiengesellschaft
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectrometer objective for particle beam measuring instruments
- Patent number 4,812,651
- Issue date Mar 14, 1989
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectrometer objective for electron beam mensuration techniques
- Patent number 4,808,821
- Issue date Feb 28, 1989
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for locating defects in an electrical circuit...
- Patent number 4,733,176
- Issue date Mar 22, 1988
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Scanning particle microscope
- Patent number 4,713,543
- Issue date Dec 15, 1987
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for automatically setting the voltage resolution in particle...
- Patent number 4,686,466
- Issue date Aug 11, 1987
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Opposing field spectrometer for electron beam mensuration technology
- Patent number 4,683,376
- Issue date Jul 28, 1987
- ICT Integrated Circuit Testing Gesellschaft, fuer Halbleiterpruftechnik mbH
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Method for automatically setting an operating point given signal cu...
- Patent number 4,675,602
- Issue date Jun 23, 1987
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Particle-accelerating electrode
- Patent number 4,651,003
- Issue date Mar 17, 1987
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for suppressing disturbances in the measuremen...
- Patent number 4,539,477
- Issue date Sep 3, 1985
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Grant
Secondary electron spectrometer for measuring voltages on a sample...
- Patent number 4,514,682
- Issue date Apr 30, 1985
- Siemens Aktiengesellschaft
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Device With Retarding Field Analyzer
- Publication number 20090200463
- Publication date Aug 13, 2009
- Ralf Degenhardt
- G01 - MEASURING TESTING
Information Patent Application
Focussing Lens for Charged Particle Beams
- Publication number 20070262255
- Publication date Nov 15, 2007
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for inspecting a sample of a specimen by means...
- Publication number 20070057182
- Publication date Mar 15, 2007
- Hans-Peter Feuerbaum
- G01 - MEASURING TESTING
Information Patent Application
Imaging system with multi source array
- Publication number 20060237659
- Publication date Oct 26, 2006
- ICT Integrated Circuit Testing Gesellschaft Fur Ha
- Hans Peter Feuerbaum
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam apparatus and method for operating the same
- Publication number 20060192145
- Publication date Aug 31, 2006
- ICT. INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam microscope with minicolumn
- Publication number 20040195522
- Publication date Oct 7, 2004
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and method for operating the same
- Publication number 20040169141
- Publication date Sep 2, 2004
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi beam charged particle device
- Publication number 20030168606
- Publication date Sep 11, 2003
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical column for charged particle beam device
- Publication number 20030155521
- Publication date Aug 21, 2003
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR EXAMING SPECIMEN WITH A CHARGED PARTICLE BEAM
- Publication number 20020053638
- Publication date May 9, 2002
- DIETER WINKLER
- H01 - BASIC ELECTRIC ELEMENTS

Hans-Peter Feuerbaum

Person

Patents Grantslast 30 patents

Charged particle beam device with retarding field analyzer

Focussing lens for charged particle beams

Imaging system with multi source array

Apparatus and method for inspecting a sample of a specimen by means...

Charged particle beam apparatus and method for operating the same

Charged particle beam microscope with minicolumn

Charged particle beam apparatus and method for operating the same

Multi beam charged particle device

Optical column for charged particle beam device

Charged particle beam microscope with minicolumn

Charged particle device

Beam column for charged particle beam device

Apparatus and method for examining specimen with a charged particle...

Method and device for focusing a charged particle beam

Method and apparatus for testing the function of microstructure ele...

Electrostatic-magnetic lens arrangement

Scanning electron beam device

Device for corpuscular-optical examination and/or processing of mat...

Method of operating an electron beam measuring device

Detector objective for particle beam apparatus

Spectrometer objective for particle beam measuring instruments

Spectrometer objective for electron beam mensuration techniques

Method and apparatus for locating defects in an electrical circuit...

Scanning particle microscope

Method for automatically setting the voltage resolution in particle...

Opposing field spectrometer for electron beam mensuration technology

Method for automatically setting an operating point given signal cu...

Particle-accelerating electrode

Method and apparatus for suppressing disturbances in the measuremen...

Secondary electron spectrometer for measuring voltages on a sample...

Patents Applicationslast 30 patents

Charged Particle Beam Device With Retarding Field Analyzer

Focussing Lens for Charged Particle Beams

Apparatus and method for inspecting a sample of a specimen by means...

Imaging system with multi source array

Charged particle beam apparatus and method for operating the same

Charged particle beam microscope with minicolumn

Charged particle beam apparatus and method for operating the same

Multi beam charged particle device

Optical column for charged particle beam device

APPARATUS AND METHOD FOR EXAMING SPECIMEN WITH A CHARGED PARTICLE BEAM