Haoquan Fang

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 12,211,709
- Issue date Jan 28, 2025
- Lam Research Corporation
- Dengliang Yang
- B08 - CLEANING
Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 11,694,911
- Issue date Jul 4, 2023
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detecting oxygen in-situ in a substrate are...
- Patent number 10,267,728
- Issue date Apr 23, 2019
- Lam Research Corporation
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Grant
Ultra low silicon loss high dose implant strip
- Patent number 9,564,344
- Issue date Feb 7, 2017
- Novellus Systems, Inc.
- David Cheung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for reducing copper contamination due to substr...
- Patent number 9,397,011
- Issue date Jul 19, 2016
- Lam Research Corporation
- Haoquan Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced passivation process to protect silicon prior to high dose...
- Patent number 8,721,797
- Issue date May 13, 2014
- Novellus Systems, Inc.
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,980,255
- Issue date Jul 19, 2011
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,513,062
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 6,955,516
- Issue date Oct 18, 2005
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING
- Publication number 20250062163
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Nicholas A. Wiswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258129
- Publication date Aug 1, 2024
- Lam Reseach Corporation
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258131
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258130
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN
- Publication number 20240139905
- Publication date May 2, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING
- Publication number 20230390891
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CMP RETAINING RING
- Publication number 20230390883
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20230369076
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Dengliang Yang
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20180174870
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...
- Publication number 20180088031
- Publication date Mar 29, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Application
ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP
- Publication number 20150332933
- Publication date Nov 19, 2015
- Novellus Systems, Inc.
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED PASSIVATION PROCESS TO PROTECT SILICON PRIOR TO HIGH DOSE...
- Publication number 20110139175
- Publication date Jun 16, 2011
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP
- Publication number 20110143548
- Publication date Jun 16, 2011
- David Cheung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Partial Contact Wafer Retaining Ring Apparatus
- Publication number 20100120335
- Publication date May 13, 2010
- Novellus Systems, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20090241996
- Publication date Oct 1, 2009
- Younes Achkire
- B08 - CLEANING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20070295371
- Publication date Dec 27, 2007
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20060174921
- Publication date Aug 10, 2006
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050241684
- Publication date Nov 3, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050229426
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20030121170
- Publication date Jul 3, 2003
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING

Haoquan Fang

Person

Patents Grantslast 30 patents

Systems and methods for metastable activated radical selective stri...

Systems and methods for metastable activated radical selective stri...

Systems and methods for detecting oxygen in-situ in a substrate are...

Ultra low silicon loss high dose implant strip

Systems and methods for reducing copper contamination due to substr...

Enhanced passivation process to protect silicon prior to high dose...

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Patents Applicationslast 30 patents

ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN

ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING

ACOUSTIC MONITORING OF CMP RETAINING RING

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...

ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP

ENHANCED PASSIVATION PROCESS TO PROTECT SILICON PRIOR TO HIGH DOSE...

ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP

Partial Contact Wafer Retaining Ring Apparatus

SINGLE WAFER DRYER AND DRYING METHODS

SINGLE WAFER DRYER AND DRYING METHODS

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Single wafer dryer and drying methods