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Micromechanical component
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Patent number 6,465,854
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Issue date Oct 15, 2002
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Robert Bosch GmbH
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Horst Muenzel
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micromechanical device
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Patent number 6,360,605
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Issue date Mar 26, 2002
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Robert Bosch GmbH
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Stefan Pinter
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Mass flow sensor
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Patent number 5,705,745
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Issue date Jan 6, 1998
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Robert Bosch GmbH
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Christoph Treutler
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G01 - MEASURING TESTING
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Acceleration sensor
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Patent number 5,461,917
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Issue date Oct 31, 1995
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Robert Bosch GmbH
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Jiri Marek
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G01 - MEASURING TESTING
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Method of making sensor
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Patent number 5,355,569
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Issue date Oct 18, 1994
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Robert Bosch GmbH
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Jiri Marek
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G01 - MEASURING TESTING
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