Helmut Haidner

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus for measuring a wavefront aberration of an im...
- Patent number 11,441,970
- Issue date Sep 13, 2022
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus and method for measuring an imaging a...
- Patent number 10,324,380
- Issue date Jun 18, 2019
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for determining an optical property of an optical imaging...
- Patent number 10,006,807
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring system for measuring an imaging quality of an EUV lens
- Patent number 9,494,483
- Issue date Nov 15, 2016
- Carl Zeiss SMT GmbH
- Ralf Frese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring system
- Patent number 9,482,968
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Markus Goeppert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,836,929
- Issue date Sep 16, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for measuring wavefronts and for determining...
- Patent number 8,134,716
- Issue date Mar 13, 2012
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the interferometric measurement of phase masks
- Patent number 7,911,624
- Issue date Mar 22, 2011
- Carl Zeiss SMS GmbH
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing a miniaturized device
- Patent number 7,623,218
- Issue date Nov 24, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,417,745
- Issue date Aug 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 7,408,652
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffuser, wavefront source, wavefront sensor and projection exposur...
- Patent number 7,388,696
- Issue date Jun 17, 2008
- Carl Zeiss SMT AG
- Martin Schriever
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring the wavefront of an optical system
- Patent number 7,336,371
- Issue date Feb 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for wavefront detection
- Patent number 7,333,216
- Issue date Feb 19, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the determination of imaging errors and micro...
- Patent number 7,301,646
- Issue date Nov 27, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining the influencing of the state o...
- Patent number 7,286,245
- Issue date Oct 23, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric measuring device and projection exposure installati...
- Patent number 7,158,237
- Issue date Jan 2, 2007
- Carl Zeiss SMT AG
- Martin Schriever
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS FOR MEASURING A WAVEFRONT ABERRATION OF AN IM...
- Publication number 20200003655
- Publication date Jan 2, 2020
- Carl Zeiss SMT GMBH
- Albrecht EHRMANN
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING AN IMAGING A...
- Publication number 20180196350
- Publication date Jul 12, 2018
- Carl Zeiss SMT GMBH
- Stig BIELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...
- Publication number 20160202118
- Publication date Jul 14, 2016
- Carl Zeiss SMT GMBH
- Albrecht EHRMANN
- G01 - MEASURING TESTING
Information Patent Application
Measuring System for Measuring an Imaging Quality of an EUV Lens
- Publication number 20150009492
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Ralf Frese
- G01 - MEASURING TESTING
Information Patent Application
MEASURING SYSTEM
- Publication number 20140118712
- Publication date May 1, 2014
- Carl Zeiss SMT GMBH
- Markus GOEPPERT
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus For Measuring Wavefronts and For Determining...
- Publication number 20080231840
- Publication date Sep 25, 2008
- CARL ZEISS SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
Device and Method for the Interferometric Measurement of Phase Masks
- Publication number 20080231862
- Publication date Sep 25, 2008
- CARL ZEISS SMS GMBH
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR WAVEFRONT DETECTION
- Publication number 20080144043
- Publication date Jun 19, 2008
- Carl Zeiss SMT AG
- Ulrich WEGMANN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE DETERMINATION OF IMAGING ERRORS AND MICRO...
- Publication number 20080130012
- Publication date Jun 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...
- Publication number 20080037905
- Publication date Feb 14, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
INTERFEROMETRIC MEASURING DEVICE AND PROJECTION EXPOSURE INSTALLATI...
- Publication number 20070046912
- Publication date Mar 1, 2007
- Carl Zeiss SMT AG
- Martin Schriever
- G02 - OPTICS
Information Patent Application
Method of manufacturing a miniaturized device
- Publication number 20060139583
- Publication date Jun 29, 2006
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diffuser, wavefront source, wavefront sensor and projection exposur...
- Publication number 20060109533
- Publication date May 25, 2006
- Carl Zeiss SMT AG
- Martin Schriever
- G02 - OPTICS
Information Patent Application
Interferometric measuring device and projection exposure installati...
- Publication number 20050264827
- Publication date Dec 1, 2005
- Carl Zeiss SMT AG
- Martin Schriever
- G02 - OPTICS
Information Patent Application
Device and method for the optical measurement of an optical system,...
- Publication number 20050243328
- Publication date Nov 3, 2005
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for the determination of imaging errors and micro...
- Publication number 20050190376
- Publication date Sep 1, 2005
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for wavefront measurement of an optical imaging s...
- Publication number 20050007602
- Publication date Jan 13, 2005
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for determining the influencing of the state o...
- Publication number 20040114150
- Publication date Jun 17, 2004
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
Apparatus for wavefront detection
- Publication number 20020001088
- Publication date Jan 3, 2002
- Ulrich Wegmann
- G01 - MEASURING TESTING

Helmut Haidner

Person

Patents Grantslast 30 patents

Measurement apparatus for measuring a wavefront aberration of an im...

Projection exposure apparatus and method for measuring an imaging a...

Apparatus for determining an optical property of an optical imaging...

Measuring system for measuring an imaging quality of an EUV lens

Measuring system

Device and method for the optical measurement of an optical system...

Methods and apparatus for measuring wavefronts and for determining...

Device and method for the optical measurement of an optical system...

Device and method for the interferometric measurement of phase masks

Method of manufacturing a miniaturized device

Device and method for wavefront measurement of an optical imaging s...

Device and method for the optical measurement of an optical system...

Diffuser, wavefront source, wavefront sensor and projection exposur...

Apparatus and method for measuring the wavefront of an optical system

Apparatus for wavefront detection

Device and method for the determination of imaging errors and micro...

Method and apparatus for determining the influencing of the state o...

Interferometric measuring device and projection exposure installati...

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS FOR MEASURING A WAVEFRONT ABERRATION OF AN IM...

PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING AN IMAGING A...

APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...

Measuring System for Measuring an Imaging Quality of an EUV Lens

MEASURING SYSTEM

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

Methods and Apparatus For Measuring Wavefronts and For Determining...

Device and Method for the Interferometric Measurement of Phase Masks

APPARATUS FOR WAVEFRONT DETECTION

DEVICE AND METHOD FOR THE DETERMINATION OF IMAGING ERRORS AND MICRO...

METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...

INTERFEROMETRIC MEASURING DEVICE AND PROJECTION EXPOSURE INSTALLATI...

Method of manufacturing a miniaturized device

Diffuser, wavefront source, wavefront sensor and projection exposur...

Interferometric measuring device and projection exposure installati...

Device and method for the optical measurement of an optical system,...

Device and method for the determination of imaging errors and micro...

Device and method for wavefront measurement of an optical imaging s...

Method and apparatus for determining the influencing of the state o...

Apparatus for wavefront detection