Hemant P. Mungekar

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer de-chucking detection and arcing prevention
- Patent number 12,002,702
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ganesh Balasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer de-chucking detection and arcing prevention
- Patent number 11,437,262
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Ganesh Balasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for monitoring input power for process control...
- Patent number 11,355,325
- Issue date Jun 7, 2022
- Applied Materials, Inc.
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Virtual sensor for spatially resolved wafer temperature control
- Patent number 11,024,522
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Hemant Mungekar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer placement error detection based on measuring a current throug...
- Patent number 11,004,710
- Issue date May 11, 2021
- Applied Materials, Inc.
- Hemant Mungekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Virtual sensor for chamber cleaning endpoint
- Patent number 10,777,394
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber and method with thermal control
- Patent number 10,636,630
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Hemant P. Mungekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation process for solar cell fabrication
- Patent number 8,168,462
- Issue date May 1, 2012
- Applied Materials, Inc.
- Peter Borden
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Reduction of etch-rate drift in HDP processes
- Patent number 7,867,921
- Issue date Jan 11, 2011
- Applied Materials, Inc.
- Anchuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas baffle and distributor for semiconductor processing chamber
- Patent number 7,799,704
- Issue date Sep 21, 2010
- Applied Materials, Inc.
- Soonam Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impurity control in HDP-CVD DEP/ETCH/DEP processes
- Patent number 7,745,350
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Anchuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas baffle and distributor for semiconductor processing chamber
- Patent number 7,740,706
- Issue date Jun 22, 2010
- Applied Materials, Inc.
- Soonam Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD SiON films for gap-fill
- Patent number 7,704,897
- Issue date Apr 27, 2010
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low wet etch rate silicon nitride film
- Patent number 7,678,715
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive ion etching for semiconductor device feature topography mo...
- Patent number 7,628,897
- Issue date Dec 8, 2009
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery system for semiconductor processing
- Patent number 7,498,268
- Issue date Mar 3, 2009
- Applied Materials, Inc.
- Sudhir Gondhalekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gapfill using deposition-etch sequence
- Patent number 7,329,586
- Issue date Feb 12, 2008
- Applied Materials, Inc.
- Manoj Vellaikal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxygen plasma treatment for enhanced HDP-CVD gapfill
- Patent number 7,229,931
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery system for semiconductor processing
- Patent number 7,141,138
- Issue date Nov 28, 2006
- Applied Materials, Inc.
- Sudhir Gondhalekar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION
- Publication number 20220415695
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Ganesh BALASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DETECTING ANOMALIES IN A SEMICONDUCTOR PROCES...
- Publication number 20220341821
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Ryan T. DOWNEY
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE
- Publication number 20210375701
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING INPUT POWER FOR PROCESS CONTROL...
- Publication number 20210375601
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT ERROR DETECTION BASED ON MEASURING A CURRENT THROUG...
- Publication number 20200388518
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Hemant MUNGEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION
- Publication number 20200194299
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Ganesh BALASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRTUAL SENSOR FOR SPATIALLY RESOLVED WAFER TEMPERATURE CONTROL
- Publication number 20190362991
- Publication date Nov 28, 2019
- Applied Materials, Inc.
- Hemant MUNGEKAR
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING CHAMBER AND METHOD WITH THERMAL CONTROL
- Publication number 20190066984
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Hemant P. MUNGEKAR
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VIRTUAL SENSOR FOR CHAMBER CLEANING ENDPOINT
- Publication number 20180166260
- Publication date Jun 14, 2018
- Applied Materials, Inc.
- Hemant P. MUNGEKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Spatial Atomic Layer Deposition With Recirculation An...
- Publication number 20140127404
- Publication date May 8, 2014
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK AND PROCESS DESIGN FOR BACK PASSIVATED SOLAR CELLS AND L...
- Publication number 20140000686
- Publication date Jan 2, 2014
- Hemant P. MUNGEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE
- Publication number 20130273262
- Publication date Oct 17, 2013
- Applied Materials, Inc.
- Manoj Vellaikal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION FILM STACK FOR SILICON-BASED SOLAR CELLS
- Publication number 20130247972
- Publication date Sep 26, 2013
- Hemant P. MUNGEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS
- Publication number 20130171757
- Publication date Jul 4, 2013
- HARI K. PONNEKANTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REAR-POINT-CONTACT PROCESS OR PHOTOVOLTAIC CELLS
- Publication number 20130109133
- Publication date May 2, 2013
- Michel R. Frei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GAS DISTRIBUTION AND PLASMA APPLICATION IN...
- Publication number 20130059092
- Publication date Mar 7, 2013
- Applied Materials, Inc.
- HEMANT P. MUNGEKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER SiN FOR FUNCTIONAL AND OPTICAL GRADED ARC LAYERS ON CRY...
- Publication number 20110272024
- Publication date Nov 10, 2011
- Applied Materials, Inc.
- Dongwon Choi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
OXIDE NITRIDE STACK FOR BACKSIDE REFLECTOR OF SOLAR CELL
- Publication number 20110272008
- Publication date Nov 10, 2011
- Applied Materials, Inc.
- Hemant P. Mungekar
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF FORMING A NEGATIVELY CHARGED PASSIVATION LAYER OVER A DIF...
- Publication number 20110240114
- Publication date Oct 6, 2011
- Applied Materials, Inc.
- Michael P. Stewart
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Passivation process for solar cell fabrication
- Publication number 20100311203
- Publication date Dec 9, 2010
- Applied Materials, Inc.
- Peter Borden
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
BACK CONTACT SOLAR CELL MODULES
- Publication number 20100051085
- Publication date Mar 4, 2010
- Timothy W. Weidman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
HDP-CVD SION FILMS FOR GAP-FILL
- Publication number 20090215281
- Publication date Aug 27, 2009
- Applied Materials, Inc.
- HEMANT P. MUNGEKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW WET ETCH RATE SILICON NITRIDE FILM
- Publication number 20090163041
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Baffle and Distributor for Semiconductor Processing Chamber
- Publication number 20090093129
- Publication date Apr 9, 2009
- Applied Materials, Inc.
- Soonam Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCTION OF ETCH-RATE DRIFT IN HDP PROCESSES
- Publication number 20090075489
- Publication date Mar 19, 2009
- Applied Materials, Inc.
- Anchuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPURITY CONTROL IN HDP-CVD DEP/ETCH/DEP PROCESSES
- Publication number 20090068853
- Publication date Mar 12, 2009
- Applied Materials, Inc.
- Anchuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL EXTENSION OF HDP-CVD INTEGRATED PROCESS MODULATION SIO2 PRO...
- Publication number 20080299775
- Publication date Dec 4, 2008
- Applied Materials, Inc.
- Anchuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20080121179
- Publication date May 29, 2008
- Applied Materials, Inc.
- SOONAM PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20080124944
- Publication date May 29, 2008
- Applied Materials, Inc.
- Soonam Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-situ process diagnostics of in-film aluminum during plasma depos...
- Publication number 20080029484
- Publication date Feb 7, 2008
- Applied Materials, Inc.
- Soonam Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hemant P. Mungekar

Person

Patents Grantslast 30 patents

Wafer de-chucking detection and arcing prevention

Wafer de-chucking detection and arcing prevention

Methods and systems for monitoring input power for process control...

Virtual sensor for spatially resolved wafer temperature control

Wafer placement error detection based on measuring a current throug...

Virtual sensor for chamber cleaning endpoint

Processing chamber and method with thermal control

Passivation process for solar cell fabrication

Reduction of etch-rate drift in HDP processes

Gas baffle and distributor for semiconductor processing chamber

Impurity control in HDP-CVD DEP/ETCH/DEP processes

Gas baffle and distributor for semiconductor processing chamber

HDP-CVD SiON films for gap-fill

Low wet etch rate silicon nitride film

Reactive ion etching for semiconductor device feature topography mo...

Gas delivery system for semiconductor processing

Gapfill using deposition-etch sequence

Oxygen plasma treatment for enhanced HDP-CVD gapfill

Gas delivery system for semiconductor processing

Patents Applicationslast 30 patents

WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION

METHOD AND SYSTEM FOR DETECTING ANOMALIES IN A SEMICONDUCTOR PROCES...

METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE

METHODS AND SYSTEMS FOR MONITORING INPUT POWER FOR PROCESS CONTROL...

WAFER PLACEMENT ERROR DETECTION BASED ON MEASURING A CURRENT THROUG...

WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION

VIRTUAL SENSOR FOR SPATIALLY RESOLVED WAFER TEMPERATURE CONTROL

PROCESSING CHAMBER AND METHOD WITH THERMAL CONTROL

VIRTUAL SENSOR FOR CHAMBER CLEANING ENDPOINT

Apparatus For Spatial Atomic Layer Deposition With Recirculation An...

FILM STACK AND PROCESS DESIGN FOR BACK PASSIVATED SOLAR CELLS AND L...

STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE

PASSIVATION FILM STACK FOR SILICON-BASED SOLAR CELLS

ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS

REAR-POINT-CONTACT PROCESS OR PHOTOVOLTAIC CELLS

METHOD AND APPARATUS FOR GAS DISTRIBUTION AND PLASMA APPLICATION IN...

MULTI-LAYER SiN FOR FUNCTIONAL AND OPTICAL GRADED ARC LAYERS ON CRY...

OXIDE NITRIDE STACK FOR BACKSIDE REFLECTOR OF SOLAR CELL

METHOD OF FORMING A NEGATIVELY CHARGED PASSIVATION LAYER OVER A DIF...

Passivation process for solar cell fabrication

BACK CONTACT SOLAR CELL MODULES

HDP-CVD SION FILMS FOR GAP-FILL

LOW WET ETCH RATE SILICON NITRIDE FILM

Gas Baffle and Distributor for Semiconductor Processing Chamber

REDUCTION OF ETCH-RATE DRIFT IN HDP PROCESSES

IMPURITY CONTROL IN HDP-CVD DEP/ETCH/DEP PROCESSES

GAPFILL EXTENSION OF HDP-CVD INTEGRATED PROCESS MODULATION SIO2 PRO...

GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

In-situ process diagnostics of in-film aluminum during plasma depos...