Henning Backhauss

Person

Wetzlar, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting incomplete edge bead removal from a disk-like o...
- Patent number 7,477,370
- Issue date Jan 13, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Method for optically inspecting a wafer by sequentially illuminatin...
- Patent number 7,460,219
- Issue date Dec 2, 2008
- Vistec Semiconductor Systems GmbH
- Paul-Gottfried Jung
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection of a wafer
- Patent number 7,327,450
- Issue date Feb 5, 2008
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspection of a wafer
- Patent number 7,307,713
- Issue date Dec 11, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspection of a wafer
- Patent number 7,292,328
- Issue date Nov 6, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
System for the detection of macrodefects
- Patent number 7,265,823
- Issue date Sep 4, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for inspection of a wafer
- Patent number 7,248,354
- Issue date Jul 24, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus, method, and computer program for wafer inspection
- Patent number 7,224,446
- Issue date May 29, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for wafer inspection
- Patent number 7,180,585
- Issue date Feb 20, 2007
- Leica Microsystems Semiconductor GmbH
- Albert Kreh
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Application
Method of detecting incomplete edge bead removal from a disk-like o...
- Publication number 20070076194
- Publication date Apr 5, 2007
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method and device for inspecting a wafer
- Publication number 20070064224
- Publication date Mar 22, 2007
- Albert Kreh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus for Inspecting a Wafer
- Publication number 20070013902
- Publication date Jan 18, 2007
- Vistec Semiconductor Systems GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspecting a wafer
- Publication number 20060262295
- Publication date Nov 23, 2006
- Vistec Semiconductor Systems GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Method and system for inspecting a wafer
- Publication number 20050280807
- Publication date Dec 22, 2005
- Leica Microsystems Semiconductor GmbH
- Henning Backhauss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for inspecting a wafer
- Publication number 20050280808
- Publication date Dec 22, 2005
- Leica Microsystems Semiconductor GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting a wafer
- Publication number 20050168729
- Publication date Aug 4, 2005
- Leica Microsystems Semiconductor GmbH
- Paul Jung
- G01 - MEASURING TESTING
Information Patent Application
Method for inspection of a wafer
- Publication number 20050134839
- Publication date Jun 23, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspection of a wafer
- Publication number 20050134846
- Publication date Jun 23, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20050122509
- Publication date Jun 9, 2005
- Leica Microsystems Semiconductor GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
System for the detection of macrodefects
- Publication number 20050101036
- Publication date May 12, 2005
- LEICA MICROSYSTEMS
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for inspection of a wafer
- Publication number 20050002023
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus, method, and computer program for wafer inspection
- Publication number 20050002021
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection of a wafer
- Publication number 20050001900
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20040239920
- Publication date Dec 2, 2004
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING

Henning Backhauss

Person

Patents Grantslast 30 patents

Apparatus for the optical inspection of wafers

Method of detecting incomplete edge bead removal from a disk-like o...

Method for optically inspecting a wafer by sequentially illuminatin...

Apparatus for inspection of a wafer

Apparatus and method for inspection of a wafer

Method for inspection of a wafer

System for the detection of macrodefects

Apparatus for inspection of a wafer

Apparatus, method, and computer program for wafer inspection

Apparatus for wafer inspection

Patents Applicationslast 30 patents

Apparatus for the Optical Inspection of Wafers

Method of detecting incomplete edge bead removal from a disk-like o...

Method and device for inspecting a wafer

Apparatus for Inspecting a Wafer

Apparatus and method for inspecting a wafer

Method and system for inspecting a wafer

Method and system for inspecting a wafer

Method for inspecting a wafer

Method for inspection of a wafer

Apparatus and method for inspection of a wafer

Apparatus for wafer inspection

System for the detection of macrodefects

Apparatus for inspection of a wafer

Apparatus, method, and computer program for wafer inspection

Apparatus for inspection of a wafer

Apparatus for wafer inspection