Henri A. Khoury

Person

Yorktown Heights, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam nano-metrology system
- Patent number 5,585,629
- Issue date Dec 17, 1996
- International Business Machines Corporation
- Samuel K. Doran
- G01 - MEASURING TESTING
Information Patent Grant
Integrated tip strain sensor for use in combination with a single a...
- Patent number 5,345,816
- Issue date Sep 13, 1994
- International Business Machine Corp.
- Joachim Clabes
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Integrated tip strain sensor for use in combination with a single a...
- Patent number 5,321,977
- Issue date Jun 21, 1994
- International Business Machines Corporation
- Joachim Clabes
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Combined scanning force microscope and optical metrology tool
- Patent number 5,298,975
- Issue date Mar 29, 1994
- International Business Machines Corporation
- Henri A. Khoury
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical inspection system for semiconductor wafers
- Patent number 4,659,220
- Issue date Apr 21, 1987
- International Business Machines Corporation
- Joseph J. Bronte
- G01 - MEASURING TESTING
Information Patent Grant
Chip registration mechanism
- Patent number 4,600,936
- Issue date Jul 15, 1986
- International Business Machines Corporation
- Henri A. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical emission spectroscopy end point detection in plasma etching
- Patent number 4,493,745
- Issue date Jan 15, 1985
- International Business Machines Corporation
- Lee Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Henri A. Khoury

Person

Patents Grantslast 30 patents

Electron beam nano-metrology system

Integrated tip strain sensor for use in combination with a single a...

Integrated tip strain sensor for use in combination with a single a...

Combined scanning force microscope and optical metrology tool

Optical inspection system for semiconductor wafers

Chip registration mechanism

Optical emission spectroscopy end point detection in plasma etching