Herbert H. Sawin

Person

Chestnut Hill, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for micro-jet enabled, low energy ion generati...
- Patent number 7,037,846
- Issue date May 2, 2006
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Patent number 6,761,796
- Issue date Jul 13, 2004
- Axcelis Technologies, Inc.
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HF vapor phase wafer cleaning and oxide etching
- Patent number 6,740,247
- Issue date May 25, 2004
- Massachusetts Institute of Technology
- Yong-Pil Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV/halogen metals removal process
- Patent number 6,183,566
- Issue date Feb 6, 2001
- FSI International, Inc.
- Andrew Scott Lawing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition of fluorocarbon polymer thin films
- Patent number 6,156,435
- Issue date Dec 5, 2000
- Massachusetts Institute of Technology
- Karen K. Gleason
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of fluorocarbon polymer thin films
- Patent number 6,153,269
- Issue date Nov 28, 2000
- Massachusetts Institute of Technology
- Karen K. Gleason
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitor of plasma processes with multivariate statistical analysis...
- Patent number 6,153,115
- Issue date Nov 28, 2000
- Massachusetts Institute of Technology
- Minh Le
- G01 - MEASURING TESTING
Information Patent Grant
Vapor phase cleaning of alkali and alkaline earth metals
- Patent number 6,107,166
- Issue date Aug 22, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metals removal process
- Patent number 6,083,413
- Issue date Jul 4, 2000
- Massachusetts Institute of Technology
- Herbert H. Sawin
- B08 - CLEANING
Information Patent Grant
UV/halogen metals removal process
- Patent number 5,954,884
- Issue date Sep 21, 1999
- FSI International Inc.
- Andrew Scott Lawing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition of fluorocarbon polymer thin films
- Patent number 5,888,591
- Issue date Mar 30, 1999
- Massachusetts Institute of Technology
- Karen K. Gleason
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for real-time measurement of thin film layer t...
- Patent number 5,450,205
- Issue date Sep 12, 1995
- Massachusetts Institute of Technology
- Herbert H. Sawin
- G01 - MEASURING TESTING
Information Patent Grant
Toroidal electron cyclotron resonance reactor
- Patent number 5,061,838
- Issue date Oct 29, 1991
- Massachusetts Institute of Technology
- Barton G. Lane
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for removing surface deposits and passivating interior surfa...
- Publication number 20090047447
- Publication date Feb 19, 2009
- Herbert H. Sawin
- B08 - CLEANING
Information Patent Application
Method for removing surface deposits in the interior of a chemical...
- Publication number 20080087642
- Publication date Apr 17, 2008
- Herbert H. Sawin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of using NF3 for removing surface deposits from the interior...
- Publication number 20070107750
- Publication date May 17, 2007
- Herbert H. Sawin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of using NF3 for removing surface deposits
- Publication number 20070028944
- Publication date Feb 8, 2007
- Herbert H. Sawin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of using sulfur fluoride for removing surface deposits
- Publication number 20070028943
- Publication date Feb 8, 2007
- Herbert H. Sawin
- B08 - CLEANING
Information Patent Application
Remote chamber methods for removing surface deposits
- Publication number 20060144819
- Publication date Jul 6, 2006
- Herbert H. Sawin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote chamber methods for removing surface deposits
- Publication number 20060144820
- Publication date Jul 6, 2006
- Herbert H. Sawin
- B08 - CLEANING
Information Patent Application
Remote chamber methods for removing surface deposits
- Publication number 20050258137
- Publication date Nov 24, 2005
- Herbert H. Sawin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HF vapor phase cleaning and oxide etching
- Publication number 20050003669
- Publication date Jan 6, 2005
- Massachusetts Institute of Technology
- Yong-Pil Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Publication number 20040140053
- Publication date Jul 22, 2004
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for micro-jet enabled, low-energy ion generati...
- Publication number 20020144785
- Publication date Oct 10, 2002
- Aseem Kumar Srivastava
- H01 - BASIC ELECTRIC ELEMENTS

Herbert H. Sawin

Person

Patents Grantslast 30 patents

Method and apparatus for micro-jet enabled, low energy ion generati...

Method and apparatus for micro-jet enabled, low-energy ion generati...

HF vapor phase wafer cleaning and oxide etching

UV/halogen metals removal process

Chemical vapor deposition of fluorocarbon polymer thin films

Chemical vapor deposition of fluorocarbon polymer thin films

Monitor of plasma processes with multivariate statistical analysis...

Vapor phase cleaning of alkali and alkaline earth metals

Metals removal process

UV/halogen metals removal process

Chemical vapor deposition of fluorocarbon polymer thin films

Apparatus and method for real-time measurement of thin film layer t...

Toroidal electron cyclotron resonance reactor

Patents Applicationslast 30 patents

Method for removing surface deposits and passivating interior surfa...

Method for removing surface deposits in the interior of a chemical...

Method of using NF3 for removing surface deposits from the interior...

Method of using NF3 for removing surface deposits

Method of using sulfur fluoride for removing surface deposits

Remote chamber methods for removing surface deposits

Remote chamber methods for removing surface deposits

Remote chamber methods for removing surface deposits

HF vapor phase cleaning and oxide etching

Method and apparatus for micro-jet enabled, low-energy ion generati...

Method and apparatus for micro-jet enabled, low-energy ion generati...