Membership
Tour
Register
Log in
Hidefumi Matsui
Follow
Person
Nirasaki, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning method and substrate cleaning device
Patent number
9,209,010
Issue date
Dec 8, 2015
Tokyo Electron Limited
Hidefumi Matsui
B08 - CLEANING
Information
Patent Grant
Vacuum exhaust method and a substrate processing apparatus therefor
Patent number
8,945,313
Issue date
Feb 3, 2015
Tokyo Electron Limited
Hidefumi Matsui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate wiring method and semiconductor manufacturing device
Patent number
8,940,638
Issue date
Jan 27, 2015
Tokyo Electron Limited
Satohiko Hoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate cleaning method
Patent number
8,585,831
Issue date
Nov 19, 2013
Tokyo Electron Limited
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method and apparatus
Patent number
8,475,602
Issue date
Jul 2, 2013
Toyko Electron Limited
Hidefumi Matsui
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,401,988
Issue date
Jul 22, 2008
Tokyo Electron Limited
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,208,066
Issue date
Apr 24, 2007
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,875,466
Issue date
Apr 5, 2005
Tokyo Electron Limited
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaluating method of hydrophobic process, forming method of resist...
Patent number
6,617,095
Issue date
Sep 9, 2003
Tokyo Electron Limited
Junichi Kitano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,485,203
Issue date
Nov 26, 2002
Tokyo Electron Limited
Takayuki Katano
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
PARAMETER SELECTION METHOD AND INFORMATION PROCESSING DEVICE
Publication number
20230357931
Publication date
Nov 9, 2023
Tokyo Electron Limited
Hidefumi MATSUI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS ESTIMATION SYSTEM, PROCESS DATA ESTIMATION METHOD, AND RECO...
Publication number
20230115637
Publication date
Apr 13, 2023
Tokyo Electron Limited
Naoshige FUSHIMI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20230085325
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Hirokazu KYOKANE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
Publication number
20230062662
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Ayuta SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAINTENANCE CONTROL METHOD OF CONTROLLING MAINTENANCE OF PROCESSING...
Publication number
20200126829
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Hidefumi MATSUI
G05 - CONTROLLING REGULATING
Information
Patent Application
VACUUM EXHAUST METHOD AND A SUBSTRATE PROCESSING APPARATUS THEREFOR
Publication number
20130092185
Publication date
Apr 18, 2013
TOKYO ELECTRON LIMITED
Hidefumi MATSUI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE CLEANING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20130056024
Publication date
Mar 7, 2013
IWATANI CORPORATION
Satohiko Hoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
Publication number
20130056033
Publication date
Mar 7, 2013
IWATANI CORPORATION
Hidefumi Matsui
B08 - CLEANING
Information
Patent Application
SUBSTRATE WIRING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE
Publication number
20130040459
Publication date
Feb 14, 2013
IWATANI CORPORATION
Satohiko Hoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE CLEANING METHOD
Publication number
20120031434
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD AND APPARATUS
Publication number
20100101608
Publication date
Apr 29, 2010
TOKYO ELECTRON LIMITED
Hidefumi MATSUI
B08 - CLEANING
Information
Patent Application
VACUUM EXHAUST METHOD AND A SUBSTRATE PROCESSING APPARATUS THEREFOR
Publication number
20100104760
Publication date
Apr 29, 2010
TOKYO ELECTRON LIMITED
Hidefumi MATSUI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20070127916
Publication date
Jun 7, 2007
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20050130445
Publication date
Jun 16, 2005
TOKYO ELECTRON LIMITED
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20040050321
Publication date
Mar 18, 2004
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20030094137
Publication date
May 22, 2003
TOKYO ELECTRON LIMITED
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Evaluating method of hydrophobic process, forming method of resist...
Publication number
20020009592
Publication date
Jan 24, 2002
TOKYO ELECTRON LIMITED
Junichi Kitano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20010013161
Publication date
Aug 16, 2001
TOKYO ELECTRON LIMITED
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20010014372
Publication date
Aug 16, 2001
TOKYO ELECTRON LIMITED
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS