1. Field of the Invention
The present invention relates to a substrate processing apparatus for coating a semiconductor wafer with a resist and developing thereof in a fabrication of semiconductor device. In detail, the invention relates to a substrate processing apparatus that controls the atmosphere of the processing environment of the substrate.
2. Description of the Related Art
In a process of photolithography in the semiconductor device fabrication, the surface of a semiconductor wafer (hereinafter referred to as “a wafer”) is coated with a photo-resist, exposing a mask pattern on the resist, then developing thereof, forming a resist pattern on the wafer surface. The resist coating and development are performed in an integrated coating and developing processing apparatus including a thermal processing apparatus such as a heating processing apparatus or a cooling processing apparatus. The coating and developing apparatus is connected to the aligner through an interface portion and the semiconductor device fabrication is actually performed.
In the coating and developing apparatus, when processing of wafer is performed, in order to prevent impurity such as particles from adhering to the wafer, the air cleaned with an air cleaner is supplied to the inside of the coating and developing processing apparatus as a down flow of air current, so that the wafer is processed in the clean condition.
However, these days, laser-beam light source with a short wavelength like, for example, F2 excimer laser (157 nm) is used in an aligner to cope with the miniaturization of the devices, therefore in case that impurities of molecule level, which had not been a problem up to now, such as oxygen, ozone, water and organic matter, adheres on the resist film coated on the wafer in the steps performed before the exposure, absorption and scattering of light caused by the impurities tend to occur. When moisture adheres on the resist film, 2% of the light will be absorbed with film thickness of every 10 Å(1 mm), and when the water molecules exist scattering on the wafer surface, difference arises in amount of exposure between the portion with water molecules and the portion without the water molecules which causes deterioration in the uniformity of line width of the pattern. The down flow of the air described above is not able to remove the impurities of molecule level.
Considering the above-described circumstances, an object of the present invention is to provide a substrate processing method and substrate processing apparatus that improves the uniformity of line width even under a circumstance in which the impurities of molecule level exists.
To accomplish the above-described objects, the substrate processing method of the present invention comprises the steps of (a) coating a resist on the substrate and (b) placing the substrate coated with the resist in an atmosphere including a vapor. According to the aforesaid structure, for example, the vapor, such as water vapor uniformly adheres to the resist on the substrate by deliberately placing the substrate into the vapor before transferring thereof to an aligner that exposes the resist coated on the substrate. Therefore, the substrate could uniformly be exposed in the following exposing step, and the uniformity of the line width can be improved. Here, in order to have the moisture adhere uniformly on the substrate, a saturated vapor is preferably used in this case.
Another embodiment of the present invention further comprises the steps of (c) drying the substrate after the step (b) so that moisture adhered to the substrate remains on the surface of the substrate. In such manner, the moisture once adhered uniformly on the substrate is decreased by performing drying process uniformly so that the moisture adhered onto the surface of the substrate remains thereon. With this method, exposing process can be performed appropriately, thus the amount of exposure reaching the resist can be increased as much as possible while keeping the amount of exposure in the exposing step constant. In this case, in order to perform drying process uniformly on the substrate, heating the substrate is preferable as a drying process and the moisture adhered on the substrate to be evaporated uniformly. Alternatively, drying may be performed with supplying heating air uniformly all over the substrate.
According to another embodiment of the present invention, the step (b) has a step of controlling a pressure of the atmosphere around the substrate. The amount of evaporating moisture adhered on the substrate placed in the vapor can be controlled by controlling the pressure. Especially, another embodiment of the present invention is that the step (d) has the step of controlling the pressure so that the pressure becomes higher than an atmospheric pressure for a predetermined time period beginning from when the substrate is started to be placed in the vapor and the step of controlling the pressure so that the pressure becomes lower than the atmospheric pressure after the predetermined time period. As a result, the amount of moisture evaporate from the substrate can be restrained beginning from when the substrate is started to be placed in the vapor until the predetermined time passes, which causes acceleration in the effect of adhering moisture uniformly on the substrate. In addition, after the predetermined time, the moisture adhered onto the surface of the substrate is evaporated actively, for example, the substrate is subjected to the uniform drying process so that the moisture on the surface of the substrate is decreased to a predetermined amount. With this embodiment, the amount of exposure reaching the resist can be increased as much as possible while keeping the amount of exposure in the exposing step constant.
A substrate processing apparatus of the present invention comprises, a coating processing portion coating a resist on the substrate, a vapor processing portion placing the substrate coated with the resist in an atmosphere including a vapor and a transfer mechanism transferring the substrate at least between the coating processing portion and the vapor processing portion.
According to the aforesaid structure, the substrate is, for example, transferred to the vapor processing portion with the transfer mechanism before delivering thereof to the aligner that exposes the resist coated on the substrate. The vapor such as water vapor uniformly adheres to the resist on the substrate by deliberately placing the substrate therein. Therefore, the substrate could uniformly be exposed in the following exposing process, and the uniformity of the line width and the like can be improved. In order to have moisture uniformly adhere on the substrate, the vapor used in this case is preferred to be a saturated vapor.
Another embodiment of the present invention further comprises a drying processing portion drying the substrate so that the moisture adheres to a surface of the substrate remains thereon. The amount of moisture adhered uniformly on the substrate is decreased so that the moisture adhered on the surface of the substrate remains thereon in the drying processing portion of this kind. With this method, exposing process can be performed appropriately, thus the amount of exposure reaching the resist can be increased as much as possible while keeping the amount of exposure in the exposing step constant. In this case, in order to perform drying process uniformly on the substrate, drying by heating the substrate with a heating plate to have the moisture adhered to the substrate evaporate uniformly is preferable. Alternatively, drying can be performed with supplying heated air uniformly all over the substrate. Furthermore, the drying processing portion may be provided inside the vapor processing portion. Alternatively, the drying processing portion can be provided outside the vapor processing portion, and the substrate may be transferred between the vapor processing portion and the drying processing portion with, for example, the transfer mechanism.
According to another embodiment of the present invention, the vapor processing portion has a pressure controlling portion controlling a pressure of the atmosphere around the substrate. Especially the pressure controlling portion is preferred to control the pressure so that the pressure becomes higher than an atmospheric pressure for a predetermined time period beginning from when the substrate is started to be placed in the vapor and control the pressure so that the pressure becomes lower than the atmospheric pressure after the predetermined time period.
These and other objects, features and advantages of the present invention will become more apparent in light of the following detailed description of a best mode embodiment thereof, as illustrated in the accompanying drawings.
Preferred embodiments of the present invention will be explained below with reference to the drawings.
The coating and developing processing apparatus 1 has a structure in which a cassette station 10 provided for carrying a plurality of, for example, twenty-five semiconductor wafers W as substrates to be processed in a wafer cassette CR, as a unit, to the inside the apparatus 1 and carrying thereof to the outside of the apparatus 1 and also carrying in the substrates from the wafer cassette CR and carrying out the substrates from the cassette CR; a processing station 11 in which various kinds of processing units each for performing predetermined process for the semiconductor wafers W one by one in coating and developing processing steps that are multi-tiered; and an interface portion 12 for delivering and receiving the semiconductor wafer W with an aligner 13 disposed adjacent to the processing station 11, are integrally connected.
In the cassette station 10, as shown in
In the processing station 11, as shown in
As shown in
As shown in
As shown in
By disposing the cooling unit (COL) and the extension unit (EXT), processing units with low processing temperature on the lower tier and disposing the baking unit (PAB) and the post-baking unit (POB), processing units with high processing temperature on the upper tier, thermal interference between the units can be reduced. However, it is also possible to dispose multi-tiered at random.
The interface portion 12 has the same size as the processing station 11 in the depth direction, but smaller in the width direction. A portable pick-up cassette CR and a fixed-type buffer cassette BR are disposed in two tiers at the front of the interface portion 12. A vapor processing unit 30, according to the present invention is disposed at the back. In the center, a wafer transfer mechanism 24 is disposed. The wafer transfer mechanism 24 moves in the X- and the Z-direction to get access to both cassettes CR and BR, and the vapor processing unit 30. The vapor processing unit 30 will be described later. The wafer transfer mechanism 24 is structured so that it can be rotated in θ-direction so as to be accessible to the extension unit (EXT) disposed in a multi-tiered unit portion of the fourth unit group G4 disposed at the processing station 11 side and to a transferring table (not illustrated) adjacent to the aligner 13 side.
As shown in
A plurality of holes 34a, for example three, pierces through the holding table 34. Three Support pins 29 supporting the wafer W from the back side are provided and a lifting cylinder 36 enables the support pins 29 to protrude and sink to the surface of the holding table 34 through the holes 34a. Thereby, the wafer W can be delivered to and received from the wafer transfer mechanism 24.
In addition, around the edge portion of the holding table 34, a plurality of supply ports 34b supplying vapor into the processing chamber R are provided. The vapor, for example, is supplied from a vapor generator 35 through a supply pipe 38 with a pump 28. The vapor generator 35 vaporizes, for example, ultra-pure water 39 by heating thereof with a heater 37. At the supply pipe 38, a regulating valve 27 regulating pressure and flow rate of the vapor is provided.
Inside the lid 32, a sensor 33 measuring humidity inside the processing chamber R is provided. The amount of vapor supplied can be controlled corresponding to, for example, the measuring result of the sensor 33.
A series of processing steps in the coating and developing processing apparatus 1 explained above will be explained with reference to the flow chart shown in FIG. 5.
First, in the cassette station 10, the wafer transfer mechanism 21 gets access to the cassette CR on the cassette mounting table 20, housing unprocessed wafers and takes one wafer W out of the cassette CR and transfers to the alignment unit (ALIM). After the alignment unit (ALIM) aligns the wafer w (step 1), the wafer W is transferred to the adhesion unit (AD) with the main wafer transfer mechanism 22 where hydrophobic process is performed (step 2) then to the cooling unit (COL) where a predetermined cooling process is performed (step 3). Thereafter, the wafer is transferred to the resist coating processing unit (COT) and the resist is spin coated thereon (step 4). Then a predetermined heating process is performed in the pre-baking unit (PAB) (step 5) followed by cooling process in the cooling unit (COL) (step 6). After that, in the interface portion 12, the wafer is transferred to the vapor processing unit 30 with the wafer transfer mechanism 24.
In the vapor processing unit 30, the wafer W is delivered to the supporting pins 29 on the holding table 34, and as the supporting pins 29 lowers, the wafer W is placed on the holding table 34 while the lid 32 is in its upper position. Then the lid 32 is lowered and the processing chamber R is formed (FIG. 4). Next, the vapor is supplied into the processing chamber R from the vapor generator 35 and the vapor is uniformly adhered to the front surface of the resist -film. With this configuration, the wafer can uniformly be exposed in the following exposing process and the uniformity of the line width can be improved (step 7).
In other words, according to the present embodiment, the amount of exposure reaching to the resist decreases as the vapor uniformly adheres on the resist, however, the wafer can uniformly be exposed compared with the prior art where the moisture exists scattered on the wafer. The decrease in the amount of exposure can be prevented with raising the intensity of the exposure. Also, regarding the supply of the vapor, it is preferable to have the processing chamber R saturated with vapor. In other words, the saturation causes the humidity to be approximately 100%, amount of moisture is increased as much as possible, thereby enabling the vapor to adhere more uniformly on the wafer. The second and the following embodiments described below also carry out vapor processing with the saturated vapor. However, it is not always necessary to process in the saturated state.
The wafer transfer mechanism 24 transfers the wafer W to the aligner 13 and the exposing process is performed therein (step 7). After the exposing process, the heating process in the post exposure baking unit (PEB) is performed (step 8). After that, the wafer W is transferred to the developing processing unit (DEV) and the developing process is performed (step 9). Then the predetermined heating process is performed in the post-baking unit (POB) (step 10). Thereafter the wafer W is subjected to a predetermined cooling process in the cooling unit (COL) (step 11), and returned to the cassette CR through the extension unit (EXT).
With regard to the processing steps of the vapor processing unit 40, first of all, the wafer W is placed on the heating plate 43 and the lid 32 is lowered to form the processing chamber R. Then, the vapor is supplied into the processing chamber R from the vapor generator 35 and adhered uniformly onto the front surface of the resist film. With this structure, the wafer can uniformly be exposed in the following exposing process and the uniformity of the line width and the like can be improved.
Next, the wafer W is heated with the heating plate 43 at a predetermined temperature for a predetermined time period. With this method, the moisture adhered on the wafer W can be evaporated so that the moisture remains on the surface of the wafer W. In such manner, the moisture adhered uniformly on the substrate is decreased by heating the wafer W uniformly so that the moisture adhered to the surface thereof remains thereon, in other words, the drying process is being performed to the wafer W. This enables the exposing process to be performed appropriately, thus the amount of exposure reaching the resist can be increased as much as possible while keeping the amount of exposure in the exposing step constant.
With regard to the processing steps of the vapor processing unit 50, first of all, when the wafer W is placed on the holding table 34 with the holding pins 29, the lid 32 lowers to form the processing chamber R. Then, the vapor is supplied into the processing chamber R from the vapor generator 35 and uniformly adheres on the surface of the resist film on the wafer. In such manner, the wafer can uniformly be exposed in the following exposing process and the uniformity of the line width and the like can be improved.
Next, as shown in
Furthermore, although not illustrated, similar to each of the aforesaid embodiments, the vapor is supplied from the supply port 34b of the holding table 34 in this embodiment.
According to the present embodiment, first of all, the vapor is supplied and the vapor uniformly adheres to the front surface of the resist film coated on the wafer W. Next, the drying process is performed blowing heating air onto the surface of the wafer W, causing the moisture adhered on the wafer W to evaporate so that the moisture remains on the surface of the wafer W.
With such processing method, similar to each of the aforesaid embodiments, the amount of exposure reaching the resist can be increased as much as possible while keeping the amount of exposure in the exposing step constant.
The present invention is not limited to an embodiment as described above, however, various kinds of modification is possible.
For example, as shown in
The holding table 34 as shown in
Furthermore, a semi-conductor wafer is used as a substrate in each of the embodiments described above, however, the present invention can also be applied to a substrate such as a glass substrate used for a liquid crystal display and the like.
A vapor processing unit 70 has an increasing and reducing pressure apparatus 72. A pipe 75 is connected between the increasing and reducing pressure apparatus 72 and an air introduction and exit port 73 provided on the lid 32 and the increasing and reducing pressure apparatus 72 controls the pressure inside the processing chamber R under control of a controller 71. As the increasing and reducing pressure apparatus 72, a vacuum pump and the like which introduces air into and sucks out the air out of the processing chamber R can be used.
A pressure measuring sensor 74 is attached, for example, to the inside of the lid 32. The pressure measuring sensor 74 detects the pressure inside the processing chamber R and the controller 71 controls the increasing and reducing pressure apparatus 72 corresponding to the detected results of the pressure measuring sensor 74.
In the vapor processing unit 70 structured as above, the pressure inside the processing chamber R is controlled, therefore, the amount of water adhered to the wafer W as a result of the vapor processing can be adjusted. Thus, dryness of the wafer can freely be controlled.
One example of an operation of the vapor processing unit 70 structured in such manner will be described fully. First, after the wafer W is placed on the holding table 34 and the lid 32 is lowered and become hermetically sealed, the vapor is supplied into the processing chamber R with the vapor generator 35. Then, the increasing and reducing pressure apparatus 72 is activated, for example, while the vapor flowing into the processing chamber R or after the inflow of the vapor is stopped, so that the pressure inside the processing chamber R becomes bigger, for example, than the atmospheric pressure. In such manner, the vapor evaporated from the substrate can be restrained for a predetermined time period starting from the exposure of the substrate to the vapor, and the effect of adhering the vapor uniformly on the substrate is encouraged. The predetermined time period may be, for example, several seconds to several minutes, the same can be applied to the examples hereafter.
On the other hand, after the predetermined time period is passed, the pressure inside the processing chamber R is adjusted to be smaller than the atmospheric pressure. As a result, after the predetermined time period is passed, the moisture adhered on the surface of the wafer W is actively vaporized and the drying process can be performed uniformly, for example, up to a point where the predetermined amount of moisture remains on the surface of the wafer W. In other words, drying process under reduced pressure may be performed. With this method, the amount of exposure reaching the resist can be increased as much as possible, while keeping the uniformity in the amount of exposure in the exposing step constant.
In a vapor processing unit 80, a moisture film thickness measuring apparatus 81 is attached inside the lid 32. The moisture film thickness measuring apparatus 81 measures the film thickness of the vapor adhered to the surface of the wafer W, after the wafer W is exposed to the vapor. As the moisture film thickness measuring apparatus 81, for example, an apparatus using a principle of measuring the film thickness with light interference can be used.
A controller 82 controls switching of the pump 28 corresponding to the measurement result of the moisture film thickness measuring apparatus 81, therefore, the amount of vapor supplied into the processing chamber R can be controlled.
One example of an operation of the vapor processing unit 80 structured in such manner will be described concretely. First, after the wafer W is placed on the holding table 34, the lid 32 is lowered to become hermetically sealed, the vapor is supplied into the processing chamber R with the vapor generator 35. Then, for example, while the vapor is flowing into the processing chamber R, the moisture film thickness measuring apparatus 81 measures the film thickness of the moisture adhered on the surface of the wafer W. A controller 82 controls switching of the pump 28 corresponding to the measurement result, therefore, the amount of vapor supplied into the processing chamber R is controlled. One example of an operation of the vapor processing unit 70 structured in such manner will be described concretely. First, after the wafer W is placed on the holding table 34, the lid 32 is lowered to become hermetically sealed, the vapor is supplied into the processing chamber R with the vapor generator 35. Then, for example, while the vapor is flowing into the processing chamber R, the moisture film thickness measuring apparatus 81 measures the film thickness of the moisture adhered on the surface of the wafer W. After that, for example when the moisture film thickness reaches to a predetermined value, the supply of the vapor is stopped. With this configuration, an appropriate amount of vapor can uniformly be adhered onto the surface of the wafer W. As a result, a minimum amount of moisture can be adhered onto the wafer W by supplying minimum amount of vapor, therefore, excessive supply of vapor can be prevented. In the same time, the drying process described in the above mentioned second and third embodiments and the like can be omitted, which causes the processing time to be shortened.
Incidentally, according to the sixth embodiment, the measurement of the moisture film thickness measuring apparatus 81 may not be included in the above-mentioned processing unit 80, but may be included in a separate measuring unit. In that case, the vapor processed wafer may be transferred to the separate measuring unit after the completion of the vapor process in the vapor processing unit, and the measurement with the moisture film thickness measuring apparatus 81 may be performed.
Moreover, instead of using the moisture film thickness measuring apparatus 81, for example, wetting condition on the surface of the wafer W may be picked up as an image using an image pick-up apparatus like a CCD camera.
As described above, according to the present invention, by placing a substrate coated with resist in vapor, moisture adheres uniformly on the resist of the substrate, therefore, the uniform exposure can be realized in an exposing step, and uniformity of the line width and the like can be improved.
The disclosure of Japanese Patent Application No. 2001-358183 filed Nov. 22, 2001 including specification, drawings and claims are herein incorporated by reference in its entirety.
Although the present invention has been shown and described with respect to a best mode embodiment thereof, it should be understood by those skilled in the art that the foregoing and various other changes, omissions, and additions in the form and detail thereof may be made therein without departing from the spirit and scope of the present invention.
Number | Date | Country | Kind |
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2001-358183 | Nov 2001 | JP | national |
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Number | Date | Country | |
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20030094137 A1 | May 2003 | US |