Hidehiko Ozaki

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 7,650,776
- Issue date Jan 26, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Hidehiko Ozaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080210261
- Publication date Sep 4, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070231928
- Publication date Oct 4, 2007
- Hidehiko OZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050274401
- Publication date Dec 15, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040060505
- Publication date Apr 1, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS