Hidehiro Kanazawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multilayer film reflector for soft X-rays and manufacturing method...
- Patent number 7,342,715
- Issue date Mar 11, 2008
- Canon Kabushiki Kaisha
- Kyoko Imai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical thin film and mirror using the same
- Patent number 7,286,637
- Issue date Oct 23, 2007
- Canon Kabushiki Kaisha
- Kyoko Imai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Sputtering apparatus
- Patent number 7,229,532
- Issue date Jun 12, 2007
- Canon Kabushiki Kaisha
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
X-ray multi-layer mirror and x-ray exposure apparatus
- Patent number 7,162,009
- Issue date Jan 9, 2007
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element with antireflection film
- Patent number 7,116,473
- Issue date Oct 3, 2006
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Grant
Method for forming thin films
- Patent number 7,041,391
- Issue date May 9, 2006
- Canon Kabushiki Kaisha
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antireflection film and optical element having the same
- Patent number 7,035,000
- Issue date Apr 25, 2006
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Grant
Antireflection film and optical element having the same
- Patent number 6,947,209
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Grant
Antireflection film, optical element with antireflection film, and...
- Patent number 6,472,087
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Minoru Otani
- G02 - OPTICS
Information Patent Grant
Thin film production process and optical device
- Patent number 6,458,253
- Issue date Oct 1, 2002
- Canon Kabushiki Kaisha
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antireflection film and optical element coated with the antireflect...
- Patent number 6,396,626
- Issue date May 28, 2002
- Canon Kabushiki Kaisha
- Minoru Otani
- G02 - OPTICS
Information Patent Grant
Method for forming thin films
- Patent number 6,383,346
- Issue date May 7, 2002
- Canon Kabushiki Kaisha
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element with substrate containing fluorite as main ingredie...
- Patent number 6,261,696
- Issue date Jul 17, 2001
- Canon Kabushika Kaisha
- Ryuji Biro
- G02 - OPTICS
Information Patent Grant
Process for thin film formation by sputtering
- Patent number 6,217,719
- Issue date Apr 17, 2001
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflection film and optical system using the same
- Patent number 5,885,712
- Issue date Mar 23, 1999
- Canon Kabushiki Kaisha
- Minoru Otani
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER FILM REFLECTOR
- Publication number 20090252977
- Publication date Oct 8, 2009
- Canon Kabushiki Kaisha
- Seiken Matsumoto
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT FOR X-RAY
- Publication number 20090148695
- Publication date Jun 11, 2009
- Canon Kabushiki Kaisha
- Takayuki Miura
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL ELEMENT HAVING MULTILAYER FILM, AND EXPOSURE APPARATUS HAVI...
- Publication number 20070171327
- Publication date Jul 26, 2007
- Seiken Matsumodo
- G02 - OPTICS
Information Patent Application
Optical thin film and mirror using the same
- Publication number 20060221474
- Publication date Oct 5, 2006
- Kyoko Imai
- G02 - OPTICS
Information Patent Application
Optical element with antireflection film
- Publication number 20060109545
- Publication date May 25, 2006
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Application
Antireflection film and optical element having the same
- Publication number 20050219684
- Publication date Oct 6, 2005
- Canon Kabushiki Kaishi
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Application
Multilayer film reflector for soft X-rays and manufacturing method...
- Publication number 20050213199
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Kyoko Imai
- G02 - OPTICS
Information Patent Application
X-ray total reflection mirror and X-ray exposure apparatus
- Publication number 20050117233
- Publication date Jun 2, 2005
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
X-ray multi-layer mirror and x-ray exposure apparatus
- Publication number 20050031071
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
Sputtering apparatus
- Publication number 20040216992
- Publication date Nov 4, 2004
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Antireflection film and optical element having the same
- Publication number 20030218798
- Publication date Nov 27, 2003
- Canon Kabushiki Kaisha
- Hidehiro Kanazawa
- G02 - OPTICS
Information Patent Application
Optical element for use in exposure apparatus and rinsing method th...
- Publication number 20020148981
- Publication date Oct 17, 2002
- Ryuji Biro
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Method for forming thin films
- Publication number 20020139661
- Publication date Oct 3, 2002
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin film production process and optical device
- Publication number 20010031543
- Publication date Oct 18, 2001
- Kenji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THIN FILMS
- Publication number 20010008207
- Publication date Jul 19, 2001
- KENJI ANDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hidehiro Kanazawa

Person

Patents Grantslast 30 patents

Multilayer film reflector for soft X-rays and manufacturing method...

Optical thin film and mirror using the same

Sputtering apparatus

X-ray multi-layer mirror and x-ray exposure apparatus

Optical element with antireflection film

Method for forming thin films

Antireflection film and optical element having the same

Antireflection film and optical element having the same

Antireflection film, optical element with antireflection film, and...

Thin film production process and optical device

Antireflection film and optical element coated with the antireflect...

Method for forming thin films

Optical element with substrate containing fluorite as main ingredie...

Process for thin film formation by sputtering

Anti-reflection film and optical system using the same

Patents Applicationslast 30 patents

MULTILAYER FILM REFLECTOR

OPTICAL ELEMENT FOR X-RAY

OPTICAL ELEMENT HAVING MULTILAYER FILM, AND EXPOSURE APPARATUS HAVI...

Optical thin film and mirror using the same

Optical element with antireflection film

Antireflection film and optical element having the same

Multilayer film reflector for soft X-rays and manufacturing method...

X-ray total reflection mirror and X-ray exposure apparatus

X-ray multi-layer mirror and x-ray exposure apparatus

Sputtering apparatus

Antireflection film and optical element having the same

Optical element for use in exposure apparatus and rinsing method th...

Method for forming thin films

Thin film production process and optical device

METHOD FOR FORMING THIN FILMS