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Coating apparatus and coating method
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Patent number 12,151,255
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Issue date Nov 26, 2024
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Tokyo Electron Limited
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Hideki Kajiwara
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B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Coating apparatus and coating method
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Patent number 11,752,515
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Issue date Sep 12, 2023
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Tokyo Electron Limited
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Hideki Kajiwara
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B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Substrate holding device
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Patent number 8,720,873
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Issue date May 13, 2014
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Tokyo Electron Limited
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Shinichi Hayashi
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer holding member
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Patent number D674761
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Issue date Jan 22, 2013
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Tokyo Electron Limited
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Naruaki Iida
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D13 - Equipment for production, distribution, or transformation of energy