Hideki Koitabashi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Alignment method, exposure method, and exposure apparatus
- Patent number 6,141,082
- Issue date Oct 31, 2000
- Nikon Corporation
- Kei Nara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus, method for correcting positional dis...
- Patent number 5,999,244
- Issue date Dec 7, 1999
- Nikon Corporation
- Masamitsu Yanagihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method utilizing plurality of marks, discriminable from e...
- Patent number 5,849,441
- Issue date Dec 15, 1998
- Nikon Corporation
- Kei Nara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method
- Patent number 5,640,243
- Issue date Jun 17, 1997
- Nikon Corporation
- Hideki Koitabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting positions
- Patent number 5,500,736
- Issue date Mar 19, 1996
- Nikon Corporation
- Hideki Koitabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY