Hideki Lee

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus
- Patent number 5,951,772
- Issue date Sep 14, 1999
- Tokyo Electron Limited
- Kimihiro Matsuse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus, vacuum processing method, and method f...
- Patent number 5,785,796
- Issue date Jul 28, 1998
- Tokyo Electron Limited
- Hideki Lee
- B08 - CLEANING
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 5,711,815
- Issue date Jan 27, 1998
- Tokyo Electron Limited
- Hideki Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 5,647,945
- Issue date Jul 15, 1997
- Tokyo Electron Limited
- Kimihiro Matsuse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube and exhaustion piping system in he...
- Patent number 5,637,153
- Issue date Jun 10, 1997
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus, vacuum processing method, and method f...
- Patent number 5,616,208
- Issue date Apr 1, 1997
- Tokyo Electron Limited
- Hideki Lee
- B08 - CLEANING
Information Patent Grant
Film deposition processing device having transparent support and tr...
- Patent number 5,525,160
- Issue date Jun 11, 1996
- Tokyo Electron Kabushiki Kaisha
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube
- Patent number 5,380,370
- Issue date Jan 10, 1995
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the manufacture of boron-containing films by CVD or epit...
- Patent number 5,180,692
- Issue date Jan 19, 1993
- Tokyo Electron Limited
- Shigehito Ibuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Vacuum processing apparatus

Vacuum processing apparatus, vacuum processing method, and method f...

Film forming apparatus and film forming method

Vacuum processing apparatus

Method of cleaning reaction tube and exhaustion piping system in he...

Vacuum processing apparatus, vacuum processing method, and method f...

Film deposition processing device having transparent support and tr...

Method of cleaning reaction tube

Method for the manufacture of boron-containing films by CVD or epit...