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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature adjustment device and substrate processing apparatus
Patent number
10,903,057
Issue date
Jan 26, 2021
Tokyo Electron Limited
Hideki Wakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control system, semiconductor manufacturing device, and...
Patent number
10,553,463
Issue date
Feb 4, 2020
Tokyo Electron Limited
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control system, semiconductor manufacturing device, and...
Patent number
9,984,908
Issue date
May 29, 2018
Tokyo Electron Limited
Atsushi Kobayashi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Heat treatment apparatus for preventing an initial temperature drop...
Patent number
6,780,795
Issue date
Aug 24, 2004
Tokyo Electron Limited
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
Publication number
20180269090
Publication date
Sep 20, 2018
TOKYO ELECTRON LIMITED
Atsushi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170092471
Publication date
Mar 30, 2017
TOKYO ELECTRON LIMITED
Hideki WAKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
Publication number
20140262199
Publication date
Sep 18, 2014
TOKYO ELECTRON LIMITED
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL SYSTEM, TEMPERATURE CONTROL METHOD, PLASMA PROC...
Publication number
20110220288
Publication date
Sep 15, 2011
TOKYO ELECTRON LIMITED
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment apparatus for preventing an initial temperature drop...
Publication number
20030180970
Publication date
Sep 25, 2003
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS