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X-ray mask
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Patent number 6,898,267
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Issue date May 24, 2005
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Mitsubishi Denki Kabushiki Kaisha
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Hiroshi Watanabe
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Stress adjustment method of X-ray mask
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Patent number 6,265,113
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Issue date Jul 24, 2001
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Mitsubishi Denki Kabushiki Kaisha
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Hideki Yabe
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Thin film forming apparatus using laser
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Patent number 6,110,291
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Issue date Aug 29, 2000
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Mitsubishi Denki Kabushiki Kaisha
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Kenyu Haruta
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film-forming method for X-ray mask
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Patent number 5,879,840
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Issue date Mar 9, 1999
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Mitsubishi Denki Kabushiki Kaisha
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Hideki Yabe
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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X-ray mask and its fabrication method
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Patent number 5,496,667
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Issue date Mar 5, 1996
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Mitsubishi Denki Kabushiki Kaisha
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Hideki Yabe
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY