Number | Date | Country | Kind |
---|---|---|---|
7-279194 | Oct 1995 | JPX | |
8-154322 | Jun 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4873162 | Yoshioka et al. | Oct 1989 | |
5132186 | Takeuchi et al. | Jul 1992 | |
5464711 | Mogab et al. | Nov 1995 | |
5496667 | Yabe et al. | Mar 1996 | |
5677090 | Marumoto et al. | Oct 1997 |
Number | Date | Country |
---|---|---|
7135157 | May 1995 | JPX |
Entry |
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Kenji Marumoto, et. al., "Total Evaluation of W-Ti Abosorber X-ray Mask", SPIE vol.2194, pp. 221-230 (Feb. 1994). |
T. Shoki, et. al., "Amorphous Structured Ta.sub.4 B Absorber on SiC Membrane for X-ray Mask", Digest of Papers Photomask, Japan '95, pp. 18-19 (Apr. 1995). |
* Abstract and Summary Only. |
Kenji Marumoto, et. al., "A Strategy For Highly Accurate X-ray Masks", Digest of Papers XEL'95, pp. M 6-2-1/2(Apr. 1995). |