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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for specimen fabrication
Patent number
8,796,651
Issue date
Aug 5, 2014
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
8,618,520
Issue date
Dec 31, 2013
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for processing a microsample
Patent number
8,222,618
Issue date
Jul 17, 2012
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Cutting plotter, cutting plotter driving control device, cut target...
Patent number
8,156,852
Issue date
Apr 17, 2012
Graphtec Kabushiki Kaisha
Takeya Shibata
B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information
Patent Grant
Method and apparatus for specimen fabrication
Patent number
7,897,936
Issue date
Mar 1, 2011
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,888,639
Issue date
Feb 15, 2011
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,550,750
Issue date
Jun 23, 2009
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,470,918
Issue date
Dec 30, 2008
Hitachi Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,465,945
Issue date
Dec 16, 2008
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Probe driving method, and probe apparatus
Patent number
7,301,146
Issue date
Nov 27, 2007
Hitachi, Ltd.
Satoshi Tomimatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for specimen fabrication
Patent number
7,268,356
Issue date
Sep 11, 2007
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,205,560
Issue date
Apr 17, 2007
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
7,205,554
Issue date
Apr 17, 2007
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Micro manipulator
Patent number
7,146,872
Issue date
Dec 12, 2006
Hitachi, Ltd.
Kazuhiro Morita
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus for inspecting defects of devices and method of inspectin...
Patent number
6,970,004
Issue date
Nov 29, 2005
Hitachi, Ltd.
Tohru Ishitani
G01 - MEASURING TESTING
Information
Patent Grant
Probe driving method, and probe apparatus
Patent number
6,960,765
Issue date
Nov 1, 2005
Hitachi, Ltd.
Satoshi Tomimatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
6,927,391
Issue date
Aug 9, 2005
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method and apparatus for specimen fabrication
Patent number
6,794,663
Issue date
Sep 21, 2004
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for processing a micro sample
Patent number
6,781,125
Issue date
Aug 24, 2004
Hitachi, Ltd.
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Apparatus for detecting defect in device and method of detecting de...
Patent number
6,734,687
Issue date
May 11, 2004
Hitachi, Ltd.
Tohru Ishitani
G01 - MEASURING TESTING
Information
Patent Grant
Beam as well as method and equipment for specimen fabrication
Patent number
6,717,156
Issue date
Apr 6, 2004
Hitachi, Ltd.
Masakazu Sugaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for specimen fabrication
Patent number
6,664,552
Issue date
Dec 16, 2003
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for observing sample using electron beam
Patent number
6,627,889
Issue date
Sep 30, 2003
Hitachi, Ltd.
Isao Ochiai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection of circuit patterns for defects and analysis of defects...
Patent number
6,566,654
Issue date
May 20, 2003
Hitachi, Ltd.
Ryuichi Funatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for observing or processing and analyzing usin...
Patent number
6,476,387
Issue date
Nov 5, 2002
Hitachi, Ltd.
Norimasa Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method using charged particle beam process and char...
Patent number
6,344,115
Issue date
Feb 5, 2002
Hitachi, Ltd.
Junzou Azuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and its apparatus for detecting a secondary electron beam im...
Patent number
6,303,932
Issue date
Oct 16, 2001
Hitachi, Ltd.
Yuichi Hamamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method using charged particle beam process and char...
Patent number
5,976,328
Issue date
Nov 2, 1999
Hitachi, Ltd.
Junzou Azuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sample evaluation/process observation system and method
Patent number
5,783,830
Issue date
Jul 21, 1998
Hitachi, Ltd.
Hiroshi Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus with variable width slits providing an i...
Patent number
5,216,253
Issue date
Jun 1, 1993
Hitachi, Ltd.
Hidemi Koike
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING A MICROSAMPLE
Publication number
20120273692
Publication date
Nov 1, 2012
Hitachi, Ltd
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING A MICROSAMPLE
Publication number
20110174974
Publication date
Jul 21, 2011
Hitachi, Ltd
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and apparatus for specimen fabrication
Publication number
20110114476
Publication date
May 19, 2011
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for specimen fabrication
Publication number
20080191151
Publication date
Aug 14, 2008
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20080067385
Publication date
Mar 20, 2008
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20070181831
Publication date
Aug 9, 2007
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20070158564
Publication date
Jul 12, 2007
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20070158591
Publication date
Jul 12, 2007
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Probe driving method, and probe apparatus
Publication number
20050269511
Publication date
Dec 8, 2005
Satoshi Tomimatsu
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20050211927
Publication date
Sep 29, 2005
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20050199828
Publication date
Sep 15, 2005
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Cutting plotter, cutting plotter driving control device, cut target...
Publication number
20050186010
Publication date
Aug 25, 2005
GRAPHTEC KABUSHIKI KAISHA
Takeya Shibata
B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information
Patent Application
Method and apparatus for specimen fabrication
Publication number
20050006600
Publication date
Jan 13, 2005
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20050001164
Publication date
Jan 6, 2005
Mitsuo Tokuda
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Apparatus for inspecting defects of devices and method of inspectin...
Publication number
20040178811
Publication date
Sep 16, 2004
Tohru Ishitani
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for specimen fabrication
Publication number
20040089821
Publication date
May 13, 2004
Hitachi, Ltd.
Hiroyasu Shichi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Probe driving method, and probe apparatus
Publication number
20030184332
Publication date
Oct 2, 2003
Satoshi Tomimatsu
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for observing sample using electron beam
Publication number
20030089852
Publication date
May 15, 2003
Isao Ochiai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micro manipulator
Publication number
20030056364
Publication date
Mar 27, 2003
Kazuhiro Morita
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Beam as well as method and equipment for specimen fabrication
Publication number
20020166976
Publication date
Nov 14, 2002
Masakazu Sugaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for specimen fabrication
Publication number
20020079463
Publication date
Jun 27, 2002
Hiroyasu Shichi
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for processing a micro sample
Publication number
20020050565
Publication date
May 2, 2002
Hitachi, Ltd
Mitsuo Tokuda
G01 - MEASURING TESTING