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Hideo Sugai
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Kasugai, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cylindrical cavity with impedance shifting by irises in a power-sup...
Patent number
11,972,930
Issue date
Apr 30, 2024
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for dynamical control of radial uniformity in...
Patent number
11,355,317
Issue date
Jun 7, 2022
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Generalized cylindrical cavity system for microwave rotation and im...
Patent number
11,195,699
Issue date
Dec 7, 2021
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for radial and azimuthal control of plasma unif...
Patent number
10,903,052
Issue date
Jan 26, 2021
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor having digital control over rotation frequency of a...
Patent number
10,453,655
Issue date
Oct 22, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for radial and azimuthal control of plasma unif...
Patent number
10,431,429
Issue date
Oct 1, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Generalized cylindrical cavity system for microwave rotation and im...
Patent number
10,340,124
Issue date
Jul 2, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor having digital control over rotation frequency of a...
Patent number
10,153,133
Issue date
Dec 11, 2018
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radial waveguide systems and methods for post-match control of micr...
Patent number
9,837,249
Issue date
Dec 5, 2017
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radial waveguide systems and methods for post-match control of micr...
Patent number
9,564,296
Issue date
Feb 7, 2017
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radial waveguide systems and methods for post-match control of micr...
Patent number
9,299,537
Issue date
Mar 29, 2016
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma density information measuring method, probe used for measuri...
Patent number
6,744,211
Issue date
Jun 1, 2004
Nissin Inc.
Hideo Sugai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma density information measuring method, probe used for measuri...
Patent number
6,339,297
Issue date
Jan 15, 2002
Nissin Inc.
Hideo Sugai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling plasma-generating high frequency power, and...
Patent number
6,184,623
Issue date
Feb 6, 2001
Nissin Inc.
Hideo Sugai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CYLINDRICAL CAVITY WITH IMPEDANCE SHIFTING BY IRISES IN A POWER-SUP...
Publication number
20240222084
Publication date
Jul 4, 2024
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CYLINDRICAL CAVITY WITH IMPEDANCE SHIFTING BY IRISES IN A POWER-SUP...
Publication number
20220093364
Publication date
Mar 24, 2022
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIF...
Publication number
20190362944
Publication date
Nov 28, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IM...
Publication number
20190326099
Publication date
Oct 24, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR DYNAMICAL CONTROL OF RADIAL UNIFORMITY IN...
Publication number
20190189399
Publication date
Jun 20, 2019
Applied Materials, Inc.
SATORU KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR HAVING DIGITAL CONTROL OVER ROTATION FREQUENCY OF A...
Publication number
20190108981
Publication date
Apr 11, 2019
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIF...
Publication number
20180226230
Publication date
Aug 9, 2018
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IM...
Publication number
20170125219
Publication date
May 4, 2017
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICR...
Publication number
20170110290
Publication date
Apr 20, 2017
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR HAVING DIGITAL CONTROL OVER ROTATION FREQUENCY OF A...
Publication number
20160284519
Publication date
Sep 29, 2016
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICR...
Publication number
20160189933
Publication date
Jun 30, 2016
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICR...
Publication number
20150270105
Publication date
Sep 24, 2015
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma density information measuring method, probe used for measuri...
Publication number
20020047543
Publication date
Apr 25, 2002
NISSIN INC.
Hideo Sugai
H01 - BASIC ELECTRIC ELEMENTS