The present disclosure is in the field of electromagnetic radiation. More specifically, embodiments that utilize waveguides and associated control systems to provide radial and/or azimuthal control of plasma in a process chamber are disclosed.
Semiconductor processing often generates plasmas to create ionized and/or energetically excited species for interaction with semiconductor wafers themselves, or other processing related materials (e.g., photoresist). To create and/or maintain a plasma, one or more radio frequency (RF) and/or microwave generators are typically utilized to generate oscillating electric and/or magnetic fields. The same fields, and/or DC fields, may also be utilized to direct the ionized and/or energetically excited species to the semiconductor wafer(s) being processed. The fields may be generated and/or coupled into a chamber where the plasma is generated in a variety of ways. Various known methods are often utilized to match an impedance of a power source (the RF generator) to a load (the plasma) so that power from the RF generator is delivered to the plasma without significant reflection of power back to the RF generator. This is for reasons of energy efficiency as well as to protect electrical components of the RF generator from damage. Particularly when microwave energy is utilized, reflected power is usually directed to a dummy load where it is dissipated as heat, which must then be removed. Thus, reflected power results in a two-fold waste of energy: the energy utilized to generate the power, and the energy utilized to remove the waste heat.
In an embodiment, a system includes a process chamber, a housing that defines a waveguide cavity, and a first conductive plate within the housing. The first conductive plate faces the process chamber across the waveguide cavity. The system also includes one or more adjustment devices that can adjust at least a position of the first conductive plate, and a second conductive plate, coupled with the housing, between the waveguide cavity and the process chamber. Electromagnetic radiation can propagate from the waveguide cavity into the process chamber through apertures in the second conductive plate. The system also includes a dielectric plate that seals off the process chamber from the waveguide cavity such that the waveguide cavity is not evacuated when the process chamber is evacuated. The system further includes one or more electronics sets that transmit the electromagnetic radiation into the waveguide cavity. A plasma forms when at least one process gas is within the chamber, and the electromagnetic radiation propagates into the process chamber from the waveguide cavity.
In an embodiment, a plasma processing system includes a process chamber that is operable to be evacuated, one or more process gas supplies for introducing one or more process gases into the process chamber, a housing that defines a waveguide cavity, and one or more electronics sets that can transmit electromagnetic radiation into the waveguide cavity. Each of the one or more electronics sets matches its driving impedance to an impedance presented by the waveguide cavity to the electromagnetic radiation. A first conductive plate is within the housing and on a distal side of the waveguide cavity from the process chamber. At least three adjustment devices couple with the first conductive plate and the housing. The adjustment devices can adjust at least a position of the first conductive plate within a range of positions, and a tilt of the first conductive plate with respect to the housing. A second conductive plate is coupled with the housing and interposed between the waveguide cavity and the process chamber. The second conductive plate forms a plurality of apertures therein for allowing electromagnetic radiation within the waveguide cavity to propagate, through the apertures, into the process chamber. A dielectric plate seals off the process chamber from the waveguide cavity such that the waveguide cavity is not evacuated when the process chamber is evacuated. The waveguide cavity can support an eigenmode between the first and second conductive plates when the first conductive plate is adjusted to an eigenmode position within the range of positions, and the one or more electronics sets transmit the electromagnetic radiation into the waveguide cavity. The plasma forms when at least one of the process gases is within the chamber, and the electromagnetic radiation propagates into the process chamber from the waveguide cavity.
In an embodiment, a method for generating a plasma for processing a workpiece includes introducing one or more process gases into a process chamber. The process chamber is at least partially sealed with a dielectric plate capable of supporting a pressure differential corresponding to evacuation of the process chamber. The method also includes propagating electromagnetic radiation into a waveguide cavity that is disposed adjacent to the process chamber. The waveguide cavity is at least partially bounded by a first conductive plate that faces the process chamber and is across the waveguide cavity from the process chamber, and a second conductive plate between the waveguide cavity and the dielectric plate. The second conductive plate forms apertures that allow the electromagnetic radiation to propagate through the second conductive plate, through the dielectric plate and into the chamber. The method further includes igniting the plasma from the process gases, and sustaining the plasma with power supplied by the electromagnetic radiation propagated into the process chamber through the apertures of the second conductive plate.
In an embodiment, a method for providing electromagnetic radiation for powering a plasma in a process chamber includes introducing one or more process gases into the process chamber, and propagating electromagnetic radiation from at least two locations P and Q, into a waveguide cavity that is disposed adjacent to the process chamber. The waveguide cavity is separated from the process chamber such that the process chamber can be evacuated without evacuating the waveguide cavity, yet electromagnetic radiation within the waveguide cavity can propagate into the process chamber. The locations P and Q are disposed at respective angles θp and θq about a circumference of the waveguide cavity. The electromagnetic radiation is provided at a microwave frequency ω with a rotation frequency Ω within the waveguide cavity. The method further includes igniting the plasma from the process gases, and sustaining the plasma with power supplied by the electromagnetic radiation propagated from the waveguide cavity into the process chamber.
In an embodiment, a system that generates a plasma includes a process chamber that can be evacuated, and a waveguide cavity disposed adjacent to the process chamber. The waveguide cavity is separated from the process chamber without blocking electromagnetic radiation within the waveguide cavity from propagating into the process chamber. The system also includes one or more process gas supplies for introducing one or more process gases into the process chamber, and a first electronics set and a second electronics set. Each of the first and second electronics sets transmits electromagnetic radiation into the waveguide cavity. The system further includes a controller that provides respective first and second input waveforms to each of the first and second electronics sets. Each of the first and second input waveforms has a microwave frequency co, and the first and second input waveforms have respective amplitudes that, when amplified by the electronics sets, provide the electromagnetic radiation within the waveguide cavity with a rotation frequency Ω. The plasma forms when at least one of the one or more process gases is within the chamber, and the electromagnetic radiation propagates into the process chamber from the waveguide cavity.
In an embodiment, a method for plasma processing in a process chamber includes introducing one or more process gases into the process chamber. The process chamber is disposed adjacent to a waveguide cavity, and the waveguide cavity is separated from the process chamber without blocking electromagnetic radiation within the waveguide cavity from propagating into the process chamber. The method also includes propagating electromagnetic radiation into the waveguide cavity. The electromagnetic radiation is provided at a microwave frequency co. A first portion of power supplied within the waveguide cavity is supplied by a portion of the electromagnetic radiation that resonates in a TE mode within the waveguide cavity. A second portion of power supplied within the waveguide cavity is supplied by a portion of the electromagnetic radiation that resonates in a second TE mode within the waveguide cavity. The method further includes igniting the plasma from the process gases; and sustaining the plasma with power supplied by the electromagnetic radiation propagated from the waveguide cavity into the process chamber.
In an embodiment, a method for processing a workpiece in a process chamber includes placing the workpiece in the process chamber. The process chamber is disposed adjacent to a waveguide cavity. The waveguide cavity is separated from the process chamber without blocking electromagnetic radiation within the waveguide cavity from propagating into the process chamber. The method also includes processing the workpiece with a first plasma, and processing the workpiece with a second plasma. Each of the first and second plasmas are produced by introducing one or more process gases into the process chamber, propagating electromagnetic radiation into the waveguide cavity, igniting the plasma from the process gases, and sustaining the plasma with power supplied by the electromagnetic radiation propagated from the waveguide cavity into the process chamber. At least a portion of power for the first plasma is supplied by the electromagnetic radiation resonating in a first TE mode within the waveguide cavity, and at least a portion of power for the second plasma is supplied by the electromagnetic radiation resonating in a second TE mode within the waveguide cavity. The first TE mode is of a different order than the second TE mode.
Additional embodiments and features are set forth in part in the description that follows, and in part will become apparent to those skilled in the art upon examination of the specification or may be learned by the practice of the invention. The features and advantages of the invention may be realized and attained by means of the instrumentalities, combinations, and methods described in the specification. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will be able to practice not only the specifically described concepts, but will readily recognize alternatives, equivalents, modifications, and intermediate combinations of the disclosed features, all of which are within the scope of the disclosure.
The present disclosure may be understood by reference to the following detailed description taken in conjunction with the drawings briefly described below, wherein like reference numerals are used throughout the several drawings to refer to similar components. It is noted that, for purposes of illustrative clarity, certain elements in the drawings may not be drawn to scale. Specific instances of an item may be referred to by use of a numeral in parentheses (e.g., monitoring antennas 211(1), 211(2)) while numerals without parentheses refer to any such item (e.g., monitoring antennas 211). In instances where multiple instances of an item are shown, only some of the instances may be labeled, for clarity of illustration.
The elements shown as part of system 100 are listed by way of example and are not exhaustive. Many other possible elements, such as: gas and/or vacuum plumbing, pressure and/or flow controllers; electrodes, magnetic cores and/or other electromagnetic apparatus; mechanical, pressure, temperature, chemical, optical and/or electronic sensors; viewing and/or other access ports; and the like may also be included, but are not shown for clarity of illustration. Internal connections and cooperation of the elements shown within system 100 are also not shown for clarity of illustration. In addition to RF generator 165, other utilities such as gas supplies 155, vacuum 160, and/or general purpose electrical power 170 may connect with system 100. Like the elements shown in system 100, the utilities shown as connected with system 100 are intended as illustrative rather than exhaustive; other types of utilities such as heating or cooling fluids, pressurized air, network capabilities, waste disposal systems and the like may also be connected with system 100, but are not shown for clarity of illustration.
The orientation of process chambers, waveguide cavities and the like that is illustrated in
Because the walls and conductive plate 137 of system 200 are equipotential planes, waveguide cavity 167 may support eigenmodes—microwave propagation modes in which, for example, a height d1 of waveguide cavity 167 is a multiple of half axial wavelengths of the microwaves within waveguide cavity 167, such that waveguide cavity 167 is resonant at the corresponding microwave frequency. That is, when d1=m2π/kz, an eigenmode forms at a resonant frequency of waveguide cavity 167. Here, the axial wavenumber kz is defined as
where ω is an angular frequency (ω=2πf), f is the frequency of the microwave, m is a positive integer and c is the speed of light, and K is a radial wavenumber for which a boundary condition on the side-wall of the cavity is satisfied for a radius R of the cavity (i.e., J′m(Y′mn)=0 and κ=y′mn/R, where J′m is a Bessel function of the first kind, of order m, and y′mn is a Bessel function of the second kind, of order m.)
For example, in system 200, when a typical microwave frequency of 2.45 GHz is used, one value of d1 will be about 62 mm, but can vary according to shapes and patterns of slots on conductive plate 137, small variations in materials, the exact geometry of microwave input openings 162, and the like. A value of d1 that causes waveguide cavity 167 to support an eigenmode may be designated as an “eigenmode position” herein. Eigenmodes within waveguide cavity 167 advantageously maximize power delivery from the electronics sets into plasma 60, and minimize power that is reflected back to the electronics sets. (A thickness of dielectric plate 169 and a height of process chamber 130 can also be designed to support eigenmode operation of process chamber 130 at the same microwave frequency, as discussed below.)
It may also be helpful to provide dielectric plate 169 with a thickness and dielectric constant to support a resonance within dielectric plate 169 at the same frequency that supports an eigenmode within waveguide cavity 167. This can be represented as the condition d2=m2π/kdz, where axial wavenumber kdz is defined as
εd is the dielectric constant of dielectric plate 169 (or the effective dielectric constant, if dielectric plate 169 is formed of multiple materials), m is any positive integer, and radial wavenumber K is defined above. The reason that this condition is helpful, is because to ignite plasma 60, it helps to provide high field strength just below dielectric plate 169. Plasma 60 may tend to form and/or be concentrated nearest to dielectric plate 169 within process chamber 130 (where fields coupled through plate 137 are strongest). Additionally, although overall effective height of chamber 130 may not be critical, it can also be chosen to support eigenmode operation of process chamber 130. This condition may be represented as the net “electrical height” being a multiple of the half-wavelength of microwaves to be used, to maximize electromagnetic field strength throughout process chamber 130, that is, d3+d2√{square root over (εd)}≅m(λ/2). And, for the same reasons as noted above with respect to waveguide cavity 167, it may be difficult to ensure the eigenmode condition when conductive plate 137, dielectric plate 169 and process chamber 130 are of fixed construction.
Dimensional variations, material variations and the like of housing 105, an exact configuration of slots 168 within conductive plate 137, distribution of plasma 60 under dielectric plate 169, and/or asymmetric features such as sensors, fasteners, access ports and the like associated with waveguide cavity 167 can shift an effective value of an eigenmode position, either globally or from place to place within waveguide cavity 167. Therefore, while housing 105 and conductive plate 137 may be fabricated with an intent that d1 defines an eigenmode position, an actual value d1 may not be an eigenmode position, as intended. Apparatus and methods for adjusting d1 and other dimensions of cavities and chambers herein are disclosed below in connection with
An optimal thickness of dielectric plate 169 may also be governed by other requirements such as cost, size, weight, mechanical strength and ability to maintain a vacuum seal over process chamber 130. Process chamber 130 may be sized to accommodate workpieces 50 that are up to 300 mm or 450 mm in diameter (e.g., wafers of about 12 inches or about 18 inches nominal diameter). Therefore, dielectric plate 169 may be required to support a vacuum pressure differential across an area of about 0.15 m2 to 0.25 m2, exerting a net force of about 22 to 40 pounds at normal atmospheric pressure. When dielectric plate 169 is formed of a refractory material with a dielectric constant of about 4 or a ceramic with a dielectric constant of about 10, thicknesses less than about 10 mm may be too fragile, while thicknesses greater than about 80 mm may be too costly, large and heavy. Within this exemplary range, exact thicknesses to be used can be optimized according to the wavelength of the microwave radiation to be used and the actual dielectric constant of the material to be used, as discussed above.
Waveguide 210 is thus considered a dual driven waveguide; the dual driven mode of operation provides high microwave energy density derived from two sets of driving electronics rather than a single set operating at double the power. Use of two (or more) sets of driving electronics, each operating at lower power than a single set at high power, may be advantageous. An electronics set operating at higher power may require components having higher voltage, current, or heat dissipation ratings that may be much more expensive or difficult to obtain than components for lower power sets. For example, microwave field effect transistors (FETs) of low cost and high quality have recently become available for use in electronics sets 225 herein, but high voltage, current, and/or power dissipation versions of such FETs may remain costly or difficult to obtain.
Operation of system 300 is best understood as starting with a signal generator 215 that provides two microwave signals 220(1), 220(2) that are at the same frequency, but may have a phase offset with respect to one another, that may correspond to a mechanical offset between the driving locations. For example, if locations P and Q are located 90 degrees away from one another about a circumference of waveguide 210, the nominal phase offset would be π/2. Determining and controlling corrections to phase offset is discussed immediately below. In certain embodiments, signal generator 215 may control frequency and/or amplitude of signals 320, as well as phase thereof. An application of controlling frequency is to tune system 300 so that eigenmode conditions can be established in waveguide 210 and an adjacent process chamber. This can be done to correct electronically for difficult-to-control irregularities in waveguide and chamber dimensions, materials, asymmetric chamber features and the like, although mechanical approaches can also be taken (e.g., see
Microwave signals 220(1), 220(2) drive circuits that are referred to as a first electronics set 225(1) and a second electronics set 225(2). Each electronics set 225(1), 225(2) begins with a solid state amplifier 230 that boosts the power of respective microwave signals 220(1), 220(2) to create amplified microwave signals 235(1), 235(2). Solid state amplifiers 230 may include one or more microwave FETs, as discussed above. Each amplified microwave signal 235(1), 235(2) passes into and through a circulator 240 that serves to protect the respective solid state amplifiers 230 from power reflections from waveguide 210. Circulators 240 thus pass input power from solid state amplifiers 230 into respective tuners 250, while shunting any power that is reflected back into dummy loads 245.
Tuners 250 adjust impedance seen by the amplified microwave signals 235(1), 235(2) so as to match an impedance presented by components such as coaxial-to-waveguide converters 265, waveguide 210 and an adjacent process chamber (e.g., process chamber 130,
As part of the tuning required to achieve acceptable impedance matching, tuners 250 can change the phase of signals passed toward waveguide 210, such that although the signals are supplied at positions that have a mechanical phase offset around the circumference of waveguide 210, the signals themselves may no longer have the same electrical phase offset. For example, if P and Q are mechanically offset by 90 degrees, the tuners may shift the phase offset between microwaves at P and Q to a value other than π/2. Thus, instead of exciting a symmetric, circularly rotating mode in waveguide 210, an asymmetric, ellipsoidally or linearly rotating mode may be excited. This asymmetry in the microwave configuration can lead, in turn, to process aberrations in an adjacent process chamber (e.g., process chamber 130,
One approach to addressing the type of asymmetry noted above is to provide electrical correction to the phase delay between microwave signals 220(1) and 220(2), and thus between amplified microwave signals 235(1) and 235(2). For example, dual phase signal generator 215 may receive a correction signal 313 from a signal controller 312 that provides information for adjustment of signals 220(1), 220(2). For example, correction signal 313 may direct dual phase signal generator 215 to provide a corrected or targeted phase offset between microwave signals 220(1), 220(2). Thus, in system 300 with a mechanical offset of π/2 between points P and Q, microwave signals 220(1), 220(2) may be out of phase with one another by π/2, or by π/2 plus or minus a target phase difference, such that a measured phase difference at points P and Q is as intended, as discussed below. In another example, correction signal 313 may direct dual phase signal generator 215 to boost and/or attenuate one or both of microwave signals 320(1), 320(2), which may advantageously help preserve a circular rotation of the microwave field.
Monitoring antennas 211(1) and 211(2) may be disposed at locations that are 180 degrees across waveguide 210 from points P and Q respectively, and provide analog signals to signal controller 312 through their respective connections 318(1) and 318(2). These measurements, within waveguide 210 itself, will capture any phase and/or amplitude offset introduced by tuners 250. Monitoring antennas 211 may monitor either an electrical field or a magnetic field component of microwaves in waveguide 210. The locations of monitoring antennas 211(1) and 211(2) 180 degrees across waveguide 210 from points P and Q (or at least each antenna 211 being at least 30 degrees away from either of P and Q) may enable the signals returned to signal controller 312 to include effects of waveguide 210 that are not readily monitored by monitoring antennas located at points P and Q. Signal controller 312 may receive signals from monitoring antennas 211(1) and 211(2) through their respective connections 318(1) and 318(2) and may determine amplitude of, and a phase offset between, signals at points P and Q. For example, signal controller 312 may perform in-phase and quadrature-phase demodulation (IQ demodulation) to measure amplitude and phase offset of the signals from monitoring antennas 211(1) and 211(2). Signal controller 312 may then utilize measured phase offset and/or amplitudes to calculate and provide a corresponding digital correction signal 313 to dual phase signal generator 215. Digital correction signal 313 may be chosen to be a desired phase offset (e.g., a value of π/2) or an offset from an assumed, desired phase difference (e.g., a correction factor that is zero when the desired phase difference is attained). Alternatively, digital correction signal may be chosen to adjust amplitude of one or both of microwave signals 320(1), 320(2). Dual phase signal generator 315 may then provide microwave signals 320(1) and 320(2) with a phase offset and/or amplitudes such that when the microwave signals propagate through the system, the phase offset between points P and Q is driven to the desired phase difference, and/or the amplitudes measured at points P and Q are as desired.
Optionally, a user input device 314 may provide one or more target parameters 316 to signal controller 312. User input device 314 may be implemented in a variety of ways, such as by physical switches providing an output that is received directly by signal controller 312, or as a part of system management hardware and software that acquires the target parameters from a user interface (e.g., a keyboard, other buttons, or a graphical user interface (GUI)). Target parameters 316 may include, for example, a desired phase difference as measured at monitoring antennas 211(1) and 211(2), or amplitude adjustments to either or both of microwaves driven into waveguide 210. Target parameters 316 can be utilized by signal controller 312 along with the analog signals from monitoring antennas 211(1) and 211(2), to generate digital correction signal 313. For example, when a target phase difference is utilized, digital correction signal 313 may be generated first based on the signals from monitoring antennas 211(1) and 312(1), after which digital correction signal 313 may be adjusted by adding or subtracting target parameter 316. Once digital correction signal 313 is transmitted, dual phase signal generator 315 may provide signals 320(1) and 320(2) with a corresponding offset until the phase offset between points P and Q is driven according to the target parameter, and digital correction signal 313 is driven to its target value, or zero. In another example, when a target amplitude adjustment is utilized, dual phase signal generator 215 can adjust amplitude of either or both of signals 320(1), 320(2) in response thereto.
Optional user input device 314 may thus provide a useful, independent degree of freedom for optimizing a semiconductor processing system that includes system 300 or other systems with a similar capability, as disclosed herein. For example, a corresponding semiconductor processing system may be optimized by processing (e.g., etching) wafers. Each wafer could be processed with identical processing parameters except for a different target parameter entered into user input device 314. The performance of the system could be evaluated by measurements of the wafers that are indicative of performance of the etch system (e.g., etch rate, selectivity, linewidth change due to etch, and the like) as well as system monitors (e.g., system stabilization times, endpoint detection parameters, etc.) An optimized value of the target parameter could then be selected, based on the wafer measurements, the system monitors and/or a combination thereof.
It will be understood by one skilled in the art that while signal controller 312 cooperates with dual phase signal generator 215 to adjust phase of microwave signals 320(1) and 320(2), tuners 250 also continue to adjust impedance matching to minimize reflected power. Thus, system 300 does not sacrifice impedance matching, but rather provides the additional capability of phase and/or amplitude adjustment for electronics sets 255(1) and 255(2), to optimize plasma symmetry in a process chamber adjacent to waveguide 210. That is, in embodiments, signal generator 315 adjusts the phase offset, and tuners 250 provide the impedance matching, concurrently with one another during the operation of system 300. In other embodiments, signal generator 315 adjusts the amplitude, and tuners 250 provide the impedance matching, concurrently with one another during the operation of system 300.
Embodiments herein recognize that as wafer sizes grow larger and the geometries produced in semiconductor fabrication grow smaller, the need for uniformity control of all aspects of the processing environment around the wafer increases. Therefore, embodiments herein adjust the microwave configuration that generates the plasma, not only to match impedance, but also to adjust phase and/or amplitude after impedance is matched, for improved symmetry of the plasma generated around the wafer. Even when careful attention is paid to symmetry of a process chamber, placement of a wafer in the process chamber, and the like, asymmetries in a plasma can arise from many causes (e.g., mechanically asymmetric ports for gas or plasma input and outlets, sensors, wafer placement, wafer flats, cabling length, material variations in any of the above components, and the like). To correct for these causes, additional degrees of control, in addition to impedance matching, may provide extra and useful tools for improving uniformity in plasma processing. While system 300 provides some control through electronic adjustments of amplitude and phase, further mechanical and electrical adjustments described below are also useful.
System 400 includes one or more adjustment devices 410 that couple with housing 405 and movable conductive plate 420. Movable conductive plate 420 faces process chamber 430 across microwave cavity 467, that is, plate 420 is on a distal side of waveguide cavity 467 from the process chamber 430. Adjustment devices 410 are shown as threaded rods in
Like conductive plate 137 discussed above, conductive plates 437 and 420 may be formed of metal, for example, but can also be formed of other conductive materials, or conductive materials that are partially or completely coated with protective (e.g., not necessarily conductive) materials.
Although adjustment devices of rods and nuts are shown to illustrate the concept of adjustment devices 410, it will be clear to one skilled in the art that any type of mechanical or electromagnetic actuator may be substituted for the rod and nut combination shown. For example, geared devices, spring loaded devices, magnetic actuators, stepper motors, piezoelectric actuators or other electromagnetic devices could be substituted. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will readily recognize alternatives, equivalents, modifications, and intermediate combinations that can be used as adjustment devices or actuators. In some embodiments, a plurality of hollowed regions is formed on a lower surface of dielectric plate 469 to promote plasma ignition, as discussed in connection with dielectric plate 169,
Certain embodiments utilize a single device 410 to adjust d1 across waveguide cavity 467, while other embodiments use three devices 410 to adjust a plane formed by movable conductive plate 420 with respect to plate 437. Connections of devices 410 to movable conductive plate 420 may include flexible materials or joints that allow movable conductive plate 420 to tilt with respect to devices 410. Still other embodiments may use more devices 410 with a deformable conductive plate 420, to provide point to point control over d1 and microwaves in waveguide cavity 467 without regard to planarity of movable conductive plate 420 or underlying plate 437. Optionally, each device 410 is surrounded above movable conductive plate 420 by a conductive bellows 413 that couples mechanically and electrically with ceiling plate 415. Bellows 413 thus ensures that movable conductive plate 420 is at the same electrical potential as housing 405, and can contain any particles that may be shed where devices 410 pass through ceiling plate 415 and engage nuts 411.
In system 400, a small gap may be needed between movable conductive plate 420 and sides of housing 405, to ensure that conductive plate 420 can move freely. This can adversely affect the propagation of microwaves within waveguide cavity 467 by allowing propagation of some microwaves through the gap, which can disturb the eigenmode condition. A region denoted as A in
where ε1 is a dielectric constant of material 444, λ is the wavelength of the microwaves and m is any integer greater than zero.
where ε2 is the dielectric constant of material 445, λ is the wavelength of the microwaves and p is any integer greater than zero. Consideration should be given to the fact that the dielectric will rub against housing 405; soft and/or non-shedding dielectrics such as polytetrafluoroethylene (e.g., Teflon®) or polyetheretherketone (PEEK) may be useful as material 445.
where ε2 is the dielectric constant of material 445, λ is the wavelength of the microwaves and n is any odd integer greater than zero. L3 is chosen so as to prevent the excitation of electromagnetic waves in the dielectric filled gap, thus reducing microwave leakage through the gap.
Certain embodiments herein can address situations such as when the signal generator, amplifying electronics and/or other components (e.g., electronics sets 225,
Electrically, system 470 is a single cavity bounded by housing 405 and movable conductive plate 420 having a thickness dp. However, thickness and dielectric constant of dielectric plate 469, as well as dimension d21 shown, will still have effects on how microwaves propagate within the cavity, including effects on eigenmode conditions. Thus, a mechanism for adjusting height of movable conductive plate 420, here shown again as adjustment devices 410 and nuts 411, remains a useful tool for tuning microwave conditions within cavity 467. Of course, it is clear to one skilled in the art that any type of mechanical or electromagnetic actuator may be substituted for the rod and nut combination shown; all of the discussion about these features in connection with system 400 is equally applicable to system 470. With such height adjustment device in place, d21 can be thought of as a variable with a minimum value of zero to a maximum value of d21 max, where movable conductive plate 420 will abut ceiling plate 415 (a lower surface of movable conductive plate 420 will be the thickness of the movable plate, dp, below ceiling plate 415). In practice the limits of zero and d21 max may be further limited by travel limits of the movable plate mechanism.
System 470 is advantageously adjustable to support at least one eigenmode within a portion of housing 405 designated as cavity 475. This allows fields to be efficiently coupled down to a lower surface of dielectric plate 469, where they will couple into plasma 60. When d21 is at its minimum value, the eigenmode will have a maximum frequency of fmax; when d21 is at its maximum value, the eigenmode will have a minimum frequency of fmin. Advantageously, electronics sets driving microwave inputs 466 support all frequencies from fmin to fmax so that an eigenmode can be supported for any physical setting of movable conductive plate 420. There will typically be one eigenmode position available for movable conductive plate 420, for any frequency available from the electronics sets, although if d21 max is sufficiently large, there may be more than one eigenmode position available.
The design of
Methods now discussed provide a means of mitigating local effects of nonuniformities during processing. Dimensional variations, material nonuniformities, apparatus asymmetries and the like can cause certain regions of a process chamber to have more intense plasma action than other areas. These effects may be localized or generalized within a system; that is, some process nonuniformities may affect individual locations that are difficult to predict in advance, while other nonuniformities may be predictably radial or azimuthal relative to the cylindrical form of waveguide 210. When these effects occur, corresponding areas of a workpiece 50 processed by the plasma may be processed nonuniformly.
In embodiments, the effects of region 588 may be made to rotate about workpiece 50 through purely electrical means, while workpiece 50 itself remains stationary.
A ghost outline of region 588, designated as 588′, can be made to rotate over workpiece 50 in an anticlockwise direction, as shown (and could similarly rotate in a clockwise direction). Rotating region 588′ may be seen as smoothing or smearing out the effects originally present in region 588, so that no part of workpiece 50 is affected to the same extent as the original region 588. In the example shown, region 588′ does not happen to rotate over inner and outer regions of workpiece 50, so these regions remain designated as regions 580′. A small portion of region 588′ rotates over bands 582 near the inner and outer regions of workpiece, while a large portion of region 588′ rotates over a band 584 between bands 582. (It should be understood that workpiece 50 is depicted with bands for illustrative purposes only; the processing effects will fade into one another gradually, instead of making step function changes at edges of bands 582 and/or 584.) Accordingly, the process effects present in original region 588 can be spread over larger areas and will be reduced across bands 582 and 584, as compared to the concentration of such process effects in original region 588.
Choosing Ω such that many field rotations occur during the course of a plasma process allows a corresponding plasma nonuniformity to be rotated, thus smoothing out the effect of “hot” or “cold” processing spots (e.g., like region 588) that are caused by the nonuniformity, on a workpiece. Ω may also be adjusted empirically by the user, according to measured process uniformity results.
The effects of a rotating wave pattern within a waveguide cavity on a plasma generated in an adjacent process chamber can also be different, depending on the speed of the rotation. When Ω is under about 100 Hz, plasma ignition can follow the field rotation closely. Consequently, not only the fields but also the plasma, rotate at the rotational frequency Ω. When is over about 1000 Hz, the plasma cannot follow the field, yet is sensitive to the overall distribution of electrical field strength, producing a radially symmetric, uniform plasma distribution. At intermediate values between about 100 Hz and 1000 Hz, the effect is a blend of the rotating and radially symmetric plasma distributions. There can also be interactions between localized plasma effects due to random causes, and rotational frequency, such that sometimes adjusting rotational frequency Ω increases or decreases local processing nonuniformities. These interactions can be located by characterizing process performance over a variety of rotational frequencies Ω, and choosing a value of Ω that provides the best uniformity. Advantageously, these effects can be implemented purely electronically, for example by having a user simply input a desired value of and having a controller of the process equipment (e.g., signal generator 215) calculate the appropriate microwave signals as per the following discussion. That is, no mechanical equipment modification is necessary.
Now consider the configurations of any of the above-mentioned systems 200, 300, 400, 470, 480, 495, 500, 550 and 560, in the context of the coordinate system shown with system 300,
for the generalized TE and TM mode (e.g., TEmnl/TMmnl) is provided as a means of mitigating local effects of nonuniformities during processing.
Assume microwaves are injected at a carrier frequency ω from microwave inputs P and Q in system 300,
Ap=a cos Ωt[cos(ωt−mθ)+cos(ωt+mθ)] Eq. (1)
where terms depending on the radial (r) and axial (z) coordinates are included in coefficient a, and m is a positive integer.
Eq. (1) may also be written in the complex form:
In the same manner, the TEmnl/TMmnl mode excited by the injection from microwave input Q can be described in the complex form as:
Rewriting Eqs. (2) and (3),
Hence, the resulting wave in the cavity is given by
To provide an anti-clockwise rotation, the following condition must be satisfied:
ej(mθ
ej(−mθ
Or, equivalently,
mθq+φ=2rπ Eq. (9)
−mθq+φ=(2s+1)π Eq. (10)
where r and s are arbitrary integers.
Solving Eqs. (9) and (10) simultaneously, the condition for the anti-clockwise rotation can be represented as
In the same manner, for a clockwise rotation, Eqs. (7) and (8) become
ej(mθ
ej(−mθ
and Eqs. (9) and (10) become
mθq+φ=(2r+1)π Eq. (15)
−mθq+φ=(2s+2)π Eq. (16)
Solving Eqs. (15) and (16) simultaneously, the condition for the clockwise rotation can be represented as
Comparing Eqs. (11) & (12) with (17) & (18), the angle θq of Port Q has the identical form, whereas the temporal phase delays (φant and φclk) are different by π between the anti-clockwise and clockwise rotations.
Explicitly, Eqs. (11)&(12), (17) &(18) can be solved as
First case: r=1, s=0
Second case: r=2, s=0
Going back to the case of the anticlockwise rotation, the resultant field of Eq. (6) may be represented in the complex form as
As=aej(Ωt-mθ)[ejωt+e−jωt]=2ej(Ωt-mθ)cos(ωt) Eq. (21)
and in the real form, as
As=2a cos(ωt−mθ)cos(ωt) Eq. (22)
which imply that the resulting wave slowly rotates in the anti-clockwise direction with an angular frequency of
Eqs. (4) and (5) can be represented under the anticlockwise rotation,
Ap=2aejΩt cos(mθ)cos(ωt)
Aq=−2jaejΩt sin(mθ)cos(ωt) Eq. (23)
In the real forms
Ap=2a cos(Ωt)cos(mθp)cos(ωt)
Aq=2a sin(Ωt)sin(mθq)cos(ωt) Eq. (24)
To derive the input wave forms in Ports P and Q, the coordinates of P and Q must be substituted into θ as
Ap(θ=θp)=2a cos(Ωt)cos(mθp)cos(ωt)
Aq(θ=θq)=2a sin(Ωt)sin(mθq)cos(ωt) Eq. (25-1)
Equations (25-1) provide the general form of the input wave forms at Ports P and Q in the case of
In the case of Eqs. (20), i.e. θp=0 and
Eq. (25-1) becomes
Ap(θ=θp)=2a cos(Ωt)cos(ωt)
Aq(θ=θq)=−2a sin(Ωt)cos(ωt) Eq. (25-2)
Equations (25-2) provide the input wave forms at Ports P and Q in the case of
The equations for the clockwise rotation corresponding to Eqs. (21) to (25-2) are represented, respectively, by
As=aej(Ωt+mθ)[ejωt+e−jωt]=2ej(Ωt+mθ)cos(ωt) Eq. (26)
As=2a cos(Ωt+mθ)cos(ωt) Eq. (27)
Ap=2aejΩt cos(mθ)cos(ωt)
Aq=2jaejΩt sin(mθ)cos(ωt) Eq. (28)
Ap=2a cos(Ωt)cos(mθ)cos(ωt)
Aq=−2a sin(Ωt)sin(mθ)cos(ωt) Eq. (29)
Ap(θ=θp)=2a cos(Ωt)cos(mθp)cos(ωt)
Aq(θ=θq)=−2a sin(Ωt)sin(mθq)cos(ωt) Eq. (30-1)
Equations (30-1) provide the general form of the input wave forms at Ports P and Q in the case of
In the case of Eqs. (20), i.e. θp=0 and
A
p(θ=θp)=2a cos(Ωt)cos(ωt)
Aq(θ=θq)=2a sin(Ωt)cos(ωt) Eq. (30-2)
Equations (30-2) provide the input wave forms at Ports P and Q in the case of
The derivations above can be used as a basis for providing input to electronics sets, so that a given wave pattern within a microwave cavity can be rotated over time. For example, it may be desired to transmit microwaves of frequency co, and rotate a resulting wave pattern with an angular frequency of Ω. Referring to
Certain uniformity issues may also be addressed by exciting different radial eigenmodes within a microwave cavity, as opposed to the vertical eigenmodes discussed above, in order to alter radial plasma characteristics. For example, suppose that characterization shows that a region like region 588,
A new proposal to remove the nonuniformity is to generate plasma 60 using an electric field 590 as illustrated in
while for the same cavity, the resonant frequency of
Therefore, over time, the shape of the resultant field 590 (
Different order TE modes can also be supplied with slow rotation as discussed above. For example, input power for the TE111 mode 591 may be injected at points P and Q (
Ap=2a cos [Ω(t)t] cos ω111t
Aq=2a sin [Ω(t)t] cos ω111t Eq. (31)
producing anticlockwise rotation. The time dependent slow rotational angular frequency Ω can be assigned to alleviate the nonuniformity. However, power injection for the TE011 mode 593 has a degree of freedom, because TE011 mode 593 is azimuthally symmetrical. One representative form of providing input power for the TE011 mode 593 is to use the forms,
Bp=2b cos ω011t
Bq=2b cos ω011t. Eq. (32)
Time dependent assignment of Ω can be implemented by signal generator 215. In general, frequency differences between different order modes such as TE11X and TE01X, where x=1 or 2, span about 30 to 140 MHz, depending on the size of a chamber being powered. Capable computer processing hardware such as microprocessors or FPGAs can be implemented within signal generator 215, to determine and reset the temporal phases of such modes relative to one another.
The strategy discussed immediately above is also applicable in situations where equipment capabilities or other process constraints cause simple radial processing nonuniformity. For example,
Chamber geometry and/or configuration can also make implementation of slow rotation and/or multiple order TE modes challenging, especially when the same frequency must resonate in two different cavities (e.g., as in systems 500, 550 and 560,
Method 600 may be varied so as to use any of the equipment variations disclosed herein, where they are compatible with steps 602 through 608 as listed. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will be able to practice not only method 600 as specifically listed, but will readily recognize alternatives, equivalents, modifications, extensions, and intermediate combinations of the disclosed steps based on the concepts and equipment capabilities disclosed herein.
Method 610 may be varied so as to use any of the equipment variations disclosed herein, where they are compatible with steps 612 through 618 as listed. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will be able to practice not only method 610 as specifically listed, but will readily recognize alternatives, equivalents, modifications, extensions, and intermediate combinations of the disclosed steps based on the concepts and equipment capabilities disclosed herein.
Method 620 may be varied so as to use any of the equipment variations disclosed herein, where they are compatible with steps 622 through 628 as listed. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will be able to practice not only method 620 as specifically listed, but will readily recognize alternatives, equivalents, modifications, extensions, and intermediate combinations of the disclosed steps based on the concepts and equipment capabilities disclosed herein.
Method 630 may be varied so as to use any of the equipment variations disclosed herein, where they are compatible with steps 632 through 636 as listed. One of ordinary skill in the art, upon reading and comprehending the present disclosure, will be able to practice not only method 630 as specifically listed, but will readily recognize alternatives, equivalents, modifications, extensions, and intermediate combinations of the disclosed steps based on the concepts and equipment capabilities disclosed herein.
Having described several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the invention. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.
Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.
As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a process” includes a plurality of such processes and reference to “the electrode” includes reference to one or more electrodes and equivalents thereof known to those skilled in the art, and so forth. Also, the words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, acts, or groups.
Number | Name | Date | Kind |
---|---|---|---|
2369620 | Sullivan et al. | Feb 1945 | A |
3401302 | Thorpe | Sep 1968 | A |
3451840 | Hough | Jun 1969 | A |
3537474 | Rohrer | Nov 1970 | A |
3756511 | Shinroku | Sep 1973 | A |
3937857 | Brummett et al. | Feb 1976 | A |
3969077 | Hill | Jul 1976 | A |
4006047 | Brummett et al. | Feb 1977 | A |
4190488 | Winters | Feb 1980 | A |
4209357 | Gorin et al. | Jun 1980 | A |
4214946 | Forget et al. | Jul 1980 | A |
4232060 | Mallory, Jr. | Nov 1980 | A |
4234628 | DuRose | Nov 1980 | A |
4265943 | Goldstein et al. | May 1981 | A |
4340462 | Koch | Jul 1982 | A |
4341592 | Shortes et al. | Jul 1982 | A |
4361418 | Tscheppe | Nov 1982 | A |
4361441 | Tylko | Nov 1982 | A |
4364803 | Nidola et al. | Dec 1982 | A |
4368223 | Kobayashi et al. | Jan 1983 | A |
4374698 | Sanders et al. | Feb 1983 | A |
4397812 | Mallory, Jr. | Aug 1983 | A |
4468413 | Bachmann | Aug 1984 | A |
4565601 | Kakehi et al. | Jan 1986 | A |
4579618 | Celestino et al. | Apr 1986 | A |
4585920 | Hoog et al. | Apr 1986 | A |
4600464 | Desilets et al. | Jul 1986 | A |
4610775 | Phifer | Sep 1986 | A |
4625678 | Shloya et al. | Dec 1986 | A |
4632857 | Mallory, Jr. | Dec 1986 | A |
4656052 | Satou et al. | Apr 1987 | A |
4656076 | Vetanen et al. | Apr 1987 | A |
4668335 | Mockler | May 1987 | A |
4690746 | McInerney et al. | Sep 1987 | A |
4715937 | Moslehi et al. | Dec 1987 | A |
4749440 | Blackwood et al. | Jun 1988 | A |
4753898 | Parrillo et al. | Jun 1988 | A |
4786360 | Cote et al. | Nov 1988 | A |
4792378 | Rose et al. | Dec 1988 | A |
4793897 | Dunfield et al. | Dec 1988 | A |
4807016 | Douglas | Feb 1989 | A |
4810520 | Wu | Mar 1989 | A |
4816638 | Ukai et al. | Mar 1989 | A |
4820377 | Davis et al. | Apr 1989 | A |
4828649 | Davis | May 1989 | A |
4857140 | Loewenstein | Aug 1989 | A |
4867841 | Loewenstein et al. | Sep 1989 | A |
4904621 | Lowenstein et al. | Feb 1990 | A |
4913929 | Moslehi et al. | Apr 1990 | A |
4919750 | Bausmith et al. | Apr 1990 | A |
4946903 | Gardella et al. | Aug 1990 | A |
4951601 | Maydan et al. | Aug 1990 | A |
4960488 | Law et al. | Oct 1990 | A |
4980018 | Mu et al. | Dec 1990 | A |
4981551 | Palmour | Jan 1991 | A |
4985372 | Narita et al. | Jan 1991 | A |
4991542 | Kohmura et al. | Feb 1991 | A |
4992136 | Tachi et al. | Feb 1991 | A |
4993358 | Mahawili | Feb 1991 | A |
4994404 | Sheng et al. | Feb 1991 | A |
5000113 | Wang et al. | Mar 1991 | A |
5006192 | Deguchi | Apr 1991 | A |
5010842 | Oda et al. | Apr 1991 | A |
5013691 | Lory et al. | May 1991 | A |
5028565 | Chang | Jul 1991 | A |
5030319 | Nishino et al. | Jul 1991 | A |
5038713 | Kawakami et al. | Aug 1991 | A |
5045244 | Marlett | Sep 1991 | A |
5061838 | Lane et al. | Oct 1991 | A |
5069938 | Lorimer et al. | Dec 1991 | A |
5083030 | Stavov | Jan 1992 | A |
5089441 | Moslehi | Feb 1992 | A |
5089442 | Olmer | Feb 1992 | A |
5147692 | Bengston | Sep 1992 | A |
5156881 | Okano et al. | Oct 1992 | A |
5180435 | Markunas et al. | Jan 1993 | A |
5186718 | Tepman et al. | Feb 1993 | A |
5188706 | Hori et al. | Feb 1993 | A |
5198034 | deBoer et al. | Mar 1993 | A |
5200016 | Namose | Apr 1993 | A |
5203911 | Sricharoenchalkit et al. | Apr 1993 | A |
5215787 | Homma | Jun 1993 | A |
5221427 | Koinuma et al. | Jun 1993 | A |
5228501 | Tepman et al. | Jul 1993 | A |
5231690 | Soma et al. | Jul 1993 | A |
5235139 | Bengston et al. | Aug 1993 | A |
5238499 | van de Ven et al. | Aug 1993 | A |
5240497 | Shacham et al. | Aug 1993 | A |
5248371 | Maher et al. | Sep 1993 | A |
5248527 | Uchida et al. | Sep 1993 | A |
5252178 | Moslehi | Oct 1993 | A |
5266157 | Kadomura | Nov 1993 | A |
5269881 | Sekiya | Dec 1993 | A |
5270125 | America et al. | Dec 1993 | A |
5271972 | Kwok et al. | Dec 1993 | A |
5275977 | Otsubo et al. | Jan 1994 | A |
5277750 | Wolgang | Jan 1994 | A |
5279669 | Lee | Jan 1994 | A |
5279865 | Chebi et al. | Jan 1994 | A |
5288518 | Homma | Feb 1994 | A |
5290382 | Zarowin et al. | Mar 1994 | A |
5290383 | Koshimizu | Mar 1994 | A |
5292370 | Tsai et al. | Mar 1994 | A |
5292682 | Stevens et al. | Mar 1994 | A |
5300463 | Cathey et al. | Apr 1994 | A |
5302233 | Kim et al. | Apr 1994 | A |
5304250 | Sameshima et al. | Apr 1994 | A |
5306530 | Strongin et al. | Apr 1994 | A |
5314724 | Tsukune et al. | May 1994 | A |
5319247 | Matsuura | Jun 1994 | A |
5326427 | Jerbic | Jul 1994 | A |
5328558 | Kawamura et al. | Jul 1994 | A |
5328810 | Lowrey et al. | Jul 1994 | A |
5330578 | Sakama | Jul 1994 | A |
5334552 | Homma | Aug 1994 | A |
5345999 | Hosokawa | Sep 1994 | A |
5352636 | Beinglass | Oct 1994 | A |
5356478 | Chen et al. | Oct 1994 | A |
5362526 | Wang et al. | Nov 1994 | A |
5366585 | Robertson et al. | Nov 1994 | A |
5368897 | Kurihara et al. | Nov 1994 | A |
5378316 | Franke et al. | Jan 1995 | A |
5380560 | Kaja et al. | Jan 1995 | A |
5382311 | Ishikawa et al. | Jan 1995 | A |
5384284 | Doan et al. | Jan 1995 | A |
5385763 | Okano et al. | Jan 1995 | A |
5399237 | Keswick et al. | Mar 1995 | A |
5399529 | Homma | Mar 1995 | A |
5403434 | Moslehi | Apr 1995 | A |
5413670 | Langan et al. | May 1995 | A |
5413967 | Matsuda et al. | May 1995 | A |
5415890 | Kloiber et al. | May 1995 | A |
5416048 | Blalock et al. | May 1995 | A |
5420075 | Homma et al. | May 1995 | A |
5429995 | Nishiyama et al. | Jul 1995 | A |
5439553 | Grant et al. | Aug 1995 | A |
5451259 | Krogh | Sep 1995 | A |
5464499 | Moslehi | Nov 1995 | A |
5468342 | Nulty et al. | Nov 1995 | A |
5474589 | Ohga et al. | Dec 1995 | A |
5478403 | Shinigawa et al. | Dec 1995 | A |
5478462 | Walsh | Dec 1995 | A |
5483920 | Pryor | Jan 1996 | A |
5494494 | Mizuno et al. | Feb 1996 | A |
5500249 | Telford et al. | Mar 1996 | A |
5505816 | Barnes et al. | Apr 1996 | A |
5510216 | Calabrese et al. | Apr 1996 | A |
5516367 | Lei et al. | May 1996 | A |
5518962 | Murao | May 1996 | A |
5531835 | Fodor et al. | Jul 1996 | A |
5534070 | Okamura et al. | Jul 1996 | A |
5536360 | Nguyen et al. | Jul 1996 | A |
5549780 | Koinuma et al. | Aug 1996 | A |
5558717 | Zhao et al. | Sep 1996 | A |
5560779 | Knowles et al. | Oct 1996 | A |
5563105 | Dobuzinsky et al. | Oct 1996 | A |
5567243 | Foster et al. | Oct 1996 | A |
5571576 | Qian et al. | Nov 1996 | A |
5575853 | Arami et al. | Nov 1996 | A |
5578130 | Hayashi et al. | Nov 1996 | A |
5578161 | Auda | Nov 1996 | A |
5580421 | Hiatt et al. | Dec 1996 | A |
5591269 | Arami et al. | Jan 1997 | A |
5592358 | Shamouilian | Jan 1997 | A |
5597439 | Salzman | Jan 1997 | A |
5599740 | Jang et al. | Feb 1997 | A |
5614055 | Fairbairn et al. | Mar 1997 | A |
5616518 | Foo et al. | Apr 1997 | A |
5624582 | Cain | Apr 1997 | A |
5626922 | Miyanaga et al. | May 1997 | A |
5628829 | Foster et al. | May 1997 | A |
5635086 | Warren, Jr. | Jun 1997 | A |
5645645 | Zhang et al. | Jul 1997 | A |
5648125 | Cane | Jul 1997 | A |
5648175 | Russell et al. | Jul 1997 | A |
5656093 | Burkhart et al. | Aug 1997 | A |
5660957 | Chou et al. | Aug 1997 | A |
5661093 | Ravi et al. | Aug 1997 | A |
5670066 | Barnes et al. | Sep 1997 | A |
5674787 | Zhao et al. | Oct 1997 | A |
5676758 | Hasgawa et al. | Oct 1997 | A |
5679606 | Wang et al. | Oct 1997 | A |
5685946 | Fathauer et al. | Nov 1997 | A |
5688331 | Aruga et al. | Nov 1997 | A |
5695810 | Dubin et al. | Dec 1997 | A |
5712185 | Tsai et al. | Jan 1998 | A |
5716500 | Bardos et al. | Feb 1998 | A |
5716506 | Maclay et al. | Feb 1998 | A |
5719085 | Moon et al. | Feb 1998 | A |
5733816 | Iyer et al. | Mar 1998 | A |
5747373 | Yu | May 1998 | A |
5753886 | Iwamura et al. | May 1998 | A |
5755859 | Brusic et al. | May 1998 | A |
5756400 | Ye et al. | May 1998 | A |
5756402 | Jimbo et al. | May 1998 | A |
5772770 | Suda et al. | Jun 1998 | A |
5781693 | Ballance et al. | Jul 1998 | A |
5786276 | Brooks et al. | Jul 1998 | A |
5788825 | Park et al. | Aug 1998 | A |
5789300 | Fulford | Aug 1998 | A |
5792376 | Kanai et al. | Aug 1998 | A |
5800686 | Littau et al. | Sep 1998 | A |
5804259 | Robles | Sep 1998 | A |
5812403 | Fong et al. | Sep 1998 | A |
5814238 | Ashby et al. | Sep 1998 | A |
5814365 | Mahawill | Sep 1998 | A |
5820723 | Benjamin et al. | Oct 1998 | A |
5824599 | Schacham-Diamand et al. | Oct 1998 | A |
5830805 | Schacham-Diamand et al. | Nov 1998 | A |
5835334 | McMillin et al. | Nov 1998 | A |
5843538 | Ehrsam et al. | Dec 1998 | A |
5843847 | Pu et al. | Dec 1998 | A |
5844195 | Fairbairn et al. | Dec 1998 | A |
5846332 | Zhao et al. | Dec 1998 | A |
5846373 | Pirkle et al. | Dec 1998 | A |
5846375 | Gilchrist et al. | Dec 1998 | A |
5846598 | Semkow et al. | Dec 1998 | A |
5849639 | Molloy et al. | Dec 1998 | A |
5850105 | Dawson et al. | Dec 1998 | A |
5855681 | Maydan et al. | Jan 1999 | A |
5855685 | Tobe et al. | Jan 1999 | A |
5856240 | Sinha et al. | Jan 1999 | A |
5858876 | Chew | Jan 1999 | A |
5863376 | Wicker | Jan 1999 | A |
5865896 | Nowak | Feb 1999 | A |
5866483 | Shiau et al. | Feb 1999 | A |
5868897 | Ohkawa | Feb 1999 | A |
5872052 | Iyer | Feb 1999 | A |
5872058 | Van Cleemput et al. | Feb 1999 | A |
5882424 | Taylor et al. | Mar 1999 | A |
5882786 | Nassau et al. | Mar 1999 | A |
5883012 | Chiou | Mar 1999 | A |
5885404 | Kim et al. | Mar 1999 | A |
5885749 | Huggins et al. | Mar 1999 | A |
5888906 | Sandhu et al. | Mar 1999 | A |
5891349 | Tobe et al. | Apr 1999 | A |
5891513 | Dubin et al. | Apr 1999 | A |
5897751 | Makowiecki | Apr 1999 | A |
5899752 | Hey et al. | May 1999 | A |
5900163 | Yi et al. | May 1999 | A |
5904827 | Reynolds | May 1999 | A |
5907790 | Kellam | May 1999 | A |
5910340 | Uchida et al. | Jun 1999 | A |
5913147 | Dubin et al. | Jun 1999 | A |
5913978 | Kato et al. | Jun 1999 | A |
5915190 | Pirkle | Jun 1999 | A |
5918116 | Chittipeddi | Jun 1999 | A |
5919332 | Koshiishi et al. | Jul 1999 | A |
5920792 | Lin | Jul 1999 | A |
5926737 | Ameen et al. | Jul 1999 | A |
5928528 | Kubota et al. | Jul 1999 | A |
5932077 | Reynolds | Aug 1999 | A |
5933757 | Yoshikawa et al. | Aug 1999 | A |
5935334 | Fong et al. | Aug 1999 | A |
5935340 | Xia et al. | Aug 1999 | A |
5937323 | Orczyk et al. | Aug 1999 | A |
5939831 | Fong et al. | Aug 1999 | A |
5942075 | Nagahata et al. | Aug 1999 | A |
5944049 | Beyer et al. | Aug 1999 | A |
5944902 | Redeker et al. | Aug 1999 | A |
5948702 | Rotondaro | Sep 1999 | A |
5951601 | Lesinski et al. | Sep 1999 | A |
5951776 | Selyutin et al. | Sep 1999 | A |
5951896 | Mahawill | Sep 1999 | A |
5953591 | Ishihara et al. | Sep 1999 | A |
5953635 | Andideh | Sep 1999 | A |
5963840 | Xia et al. | Oct 1999 | A |
5968379 | Zhao et al. | Oct 1999 | A |
5968587 | Frankel et al. | Oct 1999 | A |
5968610 | Liu et al. | Oct 1999 | A |
5969422 | Ting et al. | Oct 1999 | A |
5976327 | Tanaka | Nov 1999 | A |
5990000 | Hong et al. | Nov 1999 | A |
5990013 | Berenguer et al. | Nov 1999 | A |
5993916 | Zhao et al. | Nov 1999 | A |
5994209 | Yieh et al. | Nov 1999 | A |
5997649 | Hillman | Dec 1999 | A |
5997962 | Ogasawara et al. | Dec 1999 | A |
6004884 | Abraham | Dec 1999 | A |
6007635 | Mahawill | Dec 1999 | A |
6007785 | Liou | Dec 1999 | A |
6010962 | Liu et al. | Jan 2000 | A |
6013191 | Nasser-Faili et al. | Jan 2000 | A |
6013584 | M'Saad | Jan 2000 | A |
6015724 | Yamazaki et al. | Jan 2000 | A |
6015747 | Lopatin et al. | Jan 2000 | A |
6017414 | Koemtzopoulos et al. | Jan 2000 | A |
6019848 | Kiyama et al. | Feb 2000 | A |
6020271 | Yanagida | Feb 2000 | A |
6030666 | Lam et al. | Feb 2000 | A |
6030881 | Papasouliotis et al. | Feb 2000 | A |
6035101 | Sajoto et al. | Mar 2000 | A |
6036878 | Collins et al. | Mar 2000 | A |
6037018 | Jang et al. | Mar 2000 | A |
6037266 | Tao et al. | Mar 2000 | A |
6039834 | Tanaka et al. | Mar 2000 | A |
6039851 | Iyer | Mar 2000 | A |
6053982 | Halpin et al. | Apr 2000 | A |
6059643 | Hu et al. | May 2000 | A |
6063683 | Wu et al. | May 2000 | A |
6063712 | Gilton et al. | May 2000 | A |
6065424 | Shacham-Diamand et al. | May 2000 | A |
6065425 | Takaki et al. | May 2000 | A |
6072147 | Koshiishi | Jun 2000 | A |
6072227 | Yau et al. | Jun 2000 | A |
6074512 | Collins et al. | Jun 2000 | A |
6074514 | Bjorkman et al. | Jun 2000 | A |
6077384 | Collins et al. | Jun 2000 | A |
6077780 | Dubin | Jun 2000 | A |
6079356 | Umotoy et al. | Jun 2000 | A |
6080529 | Ye et al. | Jun 2000 | A |
6081414 | Flanigan et al. | Jun 2000 | A |
6083344 | Hanawa et al. | Jul 2000 | A |
6083844 | Bui-Le et al. | Jul 2000 | A |
6086677 | Umotoy et al. | Jul 2000 | A |
6087278 | Kim et al. | Jul 2000 | A |
6090212 | Mahawill | Jul 2000 | A |
6093457 | Okumura | Jul 2000 | A |
6093594 | Yeap et al. | Jul 2000 | A |
6099697 | Hausmann | Aug 2000 | A |
6107199 | Allen et al. | Aug 2000 | A |
6110530 | Chen et al. | Aug 2000 | A |
6110832 | Morgan et al. | Aug 2000 | A |
6110836 | Cohen et al. | Aug 2000 | A |
6110838 | Loewenstein | Aug 2000 | A |
6113771 | Landau et al. | Sep 2000 | A |
6114216 | Yieh et al. | Sep 2000 | A |
6117245 | Mandrekar et al. | Sep 2000 | A |
6120640 | Shih et al. | Sep 2000 | A |
6132512 | Horie et al. | Oct 2000 | A |
6136163 | Cheung et al. | Oct 2000 | A |
6136165 | Moslehi et al. | Oct 2000 | A |
6136685 | Narwankar et al. | Oct 2000 | A |
6136693 | Chan et al. | Oct 2000 | A |
6140234 | Uzoh et al. | Oct 2000 | A |
6144099 | Lopatin et al. | Nov 2000 | A |
6147009 | Grill et al. | Nov 2000 | A |
6148761 | Majewski et al. | Nov 2000 | A |
6149828 | Vaartstra | Nov 2000 | A |
6150628 | Smith et al. | Nov 2000 | A |
6153935 | Edelstein et al. | Nov 2000 | A |
6161500 | Kopacz et al. | Dec 2000 | A |
6161576 | Maher et al. | Dec 2000 | A |
6162302 | Raghavan et al. | Dec 2000 | A |
6162370 | Hackett et al. | Dec 2000 | A |
6165912 | McConnell et al. | Dec 2000 | A |
6167834 | Wang et al. | Jan 2001 | B1 |
6169021 | Akram et al. | Jan 2001 | B1 |
6170428 | Redeker et al. | Jan 2001 | B1 |
6171661 | Zheng et al. | Jan 2001 | B1 |
6174450 | Patrick et al. | Jan 2001 | B1 |
6174810 | Patrick et al. | Jan 2001 | B1 |
6174812 | Hsuing et al. | Jan 2001 | B1 |
6176198 | Kao et al. | Jan 2001 | B1 |
6176667 | Fairbairn | Jan 2001 | B1 |
6177245 | Ward et al. | Jan 2001 | B1 |
6179924 | Zhao et al. | Jan 2001 | B1 |
6180523 | Lee et al. | Jan 2001 | B1 |
6182602 | Redeker et al. | Feb 2001 | B1 |
6182603 | Shang et al. | Feb 2001 | B1 |
6184121 | Buchwalter et al. | Feb 2001 | B1 |
6184489 | Ito et al. | Feb 2001 | B1 |
6186091 | Chu et al. | Feb 2001 | B1 |
6189483 | Ishikawa et al. | Feb 2001 | B1 |
6190233 | Hong et al. | Feb 2001 | B1 |
6194038 | Rossman | Feb 2001 | B1 |
6197181 | Chen | Mar 2001 | B1 |
6197364 | Paunovic et al. | Mar 2001 | B1 |
6197680 | Lin et al. | Mar 2001 | B1 |
6197688 | Simpson | Mar 2001 | B1 |
6197705 | Vassiliev | Mar 2001 | B1 |
6198616 | Dahimene et al. | Mar 2001 | B1 |
6203863 | Liu et al. | Mar 2001 | B1 |
6204200 | Shieh et al. | Mar 2001 | B1 |
6210486 | Mizukami et al. | Apr 2001 | B1 |
6217658 | Orczyk et al. | Apr 2001 | B1 |
6220201 | Nowak | Apr 2001 | B1 |
6225745 | Srivastava | May 2001 | B1 |
6228233 | Lakshmikanthan et al. | May 2001 | B1 |
6228751 | Yamazaki et al. | May 2001 | B1 |
6228758 | Pellerin et al. | May 2001 | B1 |
6233582 | Williams et al. | May 2001 | B1 |
6235643 | Mui et al. | May 2001 | B1 |
6237527 | Kellerman et al. | May 2001 | B1 |
6238513 | Arnold et al. | May 2001 | B1 |
6197151 | Kaji et al. | Jun 2001 | B1 |
6241845 | Gadgil et al. | Jun 2001 | B1 |
6242349 | Nogami et al. | Jun 2001 | B1 |
6242360 | Fischer et al. | Jun 2001 | B1 |
6244211 | Nishikawa et al. | Jun 2001 | B1 |
6245396 | Nogami | Jun 2001 | B1 |
6245670 | Cheung et al. | Jun 2001 | B1 |
6251236 | Stevens | Jun 2001 | B1 |
6251802 | Moore et al. | Jun 2001 | B1 |
6258170 | Somekh et al. | Jul 2001 | B1 |
6258220 | Dordi et al. | Jul 2001 | B1 |
6258223 | Cheung et al. | Jul 2001 | B1 |
6258270 | Hilgendorff et al. | Jul 2001 | B1 |
6261637 | Oberle | Jul 2001 | B1 |
6277733 | Smith | Aug 2001 | B1 |
6277752 | Chen | Aug 2001 | B1 |
6277763 | Kugimiya et al. | Aug 2001 | B1 |
6281072 | Li et al. | Aug 2001 | B1 |
6281135 | Han et al. | Aug 2001 | B1 |
6284146 | Kim et al. | Sep 2001 | B1 |
6291282 | Wilk et al. | Sep 2001 | B1 |
6291348 | Lopatin et al. | Sep 2001 | B1 |
6302964 | Umotoy et al. | Oct 2001 | B1 |
6303044 | Koemtzopoulos | Oct 2001 | B1 |
6303418 | Cha et al. | Oct 2001 | B1 |
6306772 | Lin | Oct 2001 | B1 |
6308654 | Schneider et al. | Oct 2001 | B1 |
6308776 | Sloan | Oct 2001 | B1 |
6310755 | Busato et al. | Oct 2001 | B1 |
6312554 | Ye | Nov 2001 | B1 |
6312995 | Yu | Nov 2001 | B1 |
6319387 | Krishnamoorthy et al. | Nov 2001 | B1 |
6321587 | Laush | Nov 2001 | B1 |
6322716 | Qiao et al. | Nov 2001 | B1 |
6323128 | Sambucetti et al. | Nov 2001 | B1 |
6335288 | Kwan et al. | Jan 2002 | B1 |
6340435 | Bjorkman et al. | Jan 2002 | B1 |
6342733 | Hu et al. | Jan 2002 | B1 |
RE37546 | Mahawill | Feb 2002 | E |
6344410 | Lopatin et al. | Feb 2002 | B1 |
6348407 | Gupta et al. | Feb 2002 | B1 |
6350320 | Sherstinsky et al. | Feb 2002 | B1 |
6350697 | Richardson | Feb 2002 | B1 |
6351013 | Luning et al. | Feb 2002 | B1 |
6352081 | Lu et al. | Mar 2002 | B1 |
6355573 | Okumura | Mar 2002 | B1 |
6358827 | Chen et al. | Mar 2002 | B1 |
6364949 | Or et al. | Apr 2002 | B1 |
6364954 | Umotoy et al. | Apr 2002 | B2 |
6364957 | Schneider et al. | Apr 2002 | B1 |
6375748 | Yudovsky et al. | Apr 2002 | B1 |
6376386 | Oshima | Apr 2002 | B1 |
6379575 | Yin et al. | Apr 2002 | B1 |
6383896 | Kirimura et al. | May 2002 | B1 |
6383951 | Li | May 2002 | B1 |
6387207 | Janakiraman et al. | May 2002 | B1 |
6391753 | Yu | May 2002 | B1 |
6395150 | Van Cleemput et al. | May 2002 | B1 |
6403491 | Liu et al. | Jun 2002 | B1 |
6415736 | Hao et al. | Jul 2002 | B1 |
6416647 | Dordi et al. | Jul 2002 | B1 |
6418874 | Cox et al. | Jul 2002 | B1 |
6423284 | Arno | Jul 2002 | B1 |
6427623 | Ko | Aug 2002 | B2 |
6429465 | Yagi et al. | Aug 2002 | B1 |
6432819 | Pavate et al. | Aug 2002 | B1 |
6432831 | Dhindsa et al. | Aug 2002 | B2 |
6436193 | Kasai et al. | Aug 2002 | B1 |
6436816 | Lee et al. | Aug 2002 | B1 |
6440863 | Tsai et al. | Aug 2002 | B1 |
6441492 | Cunningham | Aug 2002 | B1 |
6446572 | Brcka | Sep 2002 | B1 |
6448537 | Nering | Sep 2002 | B1 |
6458718 | Todd | Oct 2002 | B1 |
6461974 | Ni et al. | Oct 2002 | B1 |
6462371 | Weimer et al. | Oct 2002 | B1 |
6462372 | Xia et al. | Oct 2002 | B1 |
6465051 | Sahin et al. | Oct 2002 | B1 |
6465350 | Taylor et al. | Oct 2002 | B1 |
6465366 | Nemani et al. | Oct 2002 | B1 |
6477980 | White et al. | Nov 2002 | B1 |
6479373 | Dreybrodt et al. | Nov 2002 | B2 |
6488984 | Wada et al. | Dec 2002 | B1 |
6494959 | Samoilov et al. | Dec 2002 | B1 |
6499425 | Sandhu et al. | Dec 2002 | B1 |
6500728 | Wang | Dec 2002 | B1 |
6503843 | Xia et al. | Jan 2003 | B1 |
6506291 | Tsai et al. | Jan 2003 | B2 |
6509283 | Thomas | Jan 2003 | B1 |
6509623 | Zhao | Jan 2003 | B2 |
6516815 | Stevens et al. | Feb 2003 | B1 |
6518548 | Sugaya et al. | Feb 2003 | B2 |
6527968 | Wang et al. | Mar 2003 | B1 |
6528409 | Lopatin et al. | Mar 2003 | B1 |
6528751 | Hoffman et al. | Mar 2003 | B1 |
6537707 | Lee | Mar 2003 | B1 |
6537733 | Campana et al. | Mar 2003 | B2 |
6541397 | Bencher | Apr 2003 | B1 |
6541671 | Martinez et al. | Apr 2003 | B1 |
6544340 | Yudovsky | Apr 2003 | B2 |
6547977 | Yan et al. | Apr 2003 | B1 |
6551924 | Dalton et al. | Apr 2003 | B1 |
6558564 | Loewenhardt | May 2003 | B1 |
6565661 | Nguyen | May 2003 | B1 |
6565729 | Chen et al. | May 2003 | B2 |
6569773 | Gellrich et al. | May 2003 | B1 |
6572937 | Hakovirta et al. | Jun 2003 | B2 |
6573030 | Fairbairn et al. | Jun 2003 | B1 |
6573606 | Sambucetti et al. | Jun 2003 | B2 |
6585851 | Ohmi et al. | Jul 2003 | B1 |
6586163 | Okabe et al. | Jul 2003 | B1 |
6596599 | Guo | Jul 2003 | B1 |
6596654 | Bayman et al. | Jul 2003 | B1 |
6602434 | Hung et al. | Aug 2003 | B1 |
6602806 | Xia et al. | Aug 2003 | B1 |
6603269 | Vo et al. | Aug 2003 | B1 |
6605874 | Leu et al. | Aug 2003 | B2 |
6616967 | Test | Sep 2003 | B1 |
6627532 | Gaillard et al. | Sep 2003 | B1 |
6635575 | Xia et al. | Oct 2003 | B1 |
6635578 | Xu et al. | Oct 2003 | B1 |
6638810 | Bakli et al. | Oct 2003 | B2 |
6645301 | Sainty et al. | Nov 2003 | B2 |
6645550 | Cheung et al. | Nov 2003 | B1 |
6656831 | Lee et al. | Dec 2003 | B1 |
6656837 | Xu et al. | Dec 2003 | B2 |
6656848 | Scanlan et al. | Dec 2003 | B1 |
6663715 | Yuda et al. | Dec 2003 | B1 |
6677242 | Liu et al. | Jan 2004 | B1 |
6679981 | Pan et al. | Jan 2004 | B1 |
6688375 | Turner | Feb 2004 | B1 |
6713356 | Skotnicki et al. | Mar 2004 | B1 |
6713835 | Horak et al. | Mar 2004 | B1 |
6717189 | Inoue et al. | Apr 2004 | B2 |
6720213 | Gambino et al. | Apr 2004 | B1 |
6736147 | Satoh et al. | May 2004 | B2 |
6736987 | Cho | May 2004 | B1 |
6740247 | Han et al. | May 2004 | B1 |
6740585 | Yoon et al. | May 2004 | B2 |
6740977 | Ahn et al. | May 2004 | B2 |
6743473 | Parkhe et al. | Jun 2004 | B1 |
6743732 | Lin et al. | Jun 2004 | B1 |
6756235 | Liu et al. | Jun 2004 | B1 |
6759261 | Shimokohbe et al. | Jul 2004 | B2 |
6762127 | Boiteux et al. | Jul 2004 | B2 |
6762435 | Towle | Jul 2004 | B2 |
6764958 | Nemani et al. | Jul 2004 | B1 |
6765273 | Chau et al. | Jul 2004 | B1 |
6767834 | Chung et al. | Jul 2004 | B2 |
6768079 | Kosakai | Jul 2004 | B2 |
6770166 | Fischer | Aug 2004 | B1 |
6772827 | Keller et al. | Aug 2004 | B2 |
6792889 | Nakano et al. | Sep 2004 | B2 |
6794290 | Papasouliotis et al. | Sep 2004 | B1 |
6794311 | Huang et al. | Sep 2004 | B2 |
6796314 | Graff et al. | Sep 2004 | B1 |
6797189 | Hung et al. | Sep 2004 | B2 |
6800336 | Fornsel et al. | Oct 2004 | B1 |
6800830 | Mahawili | Oct 2004 | B2 |
6802944 | Ahmad et al. | Oct 2004 | B2 |
6808564 | Dietze | Oct 2004 | B2 |
6808747 | Shih et al. | Oct 2004 | B1 |
6808748 | Kapoor et al. | Oct 2004 | B2 |
6815633 | Chen et al. | Nov 2004 | B1 |
6821571 | Huang | Nov 2004 | B2 |
6823589 | White et al. | Nov 2004 | B2 |
6828241 | Kholodenko et al. | Dec 2004 | B2 |
6830624 | Janakiraman et al. | Dec 2004 | B2 |
6835995 | Li | Dec 2004 | B2 |
6846745 | Papasouliotis et al. | Jan 2005 | B1 |
6849854 | Sainty | Feb 2005 | B2 |
6852550 | Tuttle et al. | Feb 2005 | B2 |
6852584 | Chen et al. | Feb 2005 | B1 |
6853533 | Parkhe et al. | Feb 2005 | B2 |
6858153 | Bjorkman et al. | Feb 2005 | B2 |
6861097 | Goosey et al. | Mar 2005 | B1 |
6861332 | Park et al. | Mar 2005 | B2 |
6869880 | Krishnaraj et al. | Mar 2005 | B2 |
6875280 | Ikeda et al. | Apr 2005 | B2 |
6878206 | Tzu et al. | Apr 2005 | B2 |
6879981 | Rothschild et al. | Apr 2005 | B2 |
6886491 | Kim et al. | May 2005 | B2 |
6892669 | Xu et al. | May 2005 | B2 |
6893967 | Wright et al. | May 2005 | B1 |
6897532 | Schwarz et al. | May 2005 | B1 |
6900596 | Yang et al. | May 2005 | B2 |
6903511 | Chistyakov | Jun 2005 | B2 |
6908862 | Li et al. | Jun 2005 | B2 |
6911112 | An | Jun 2005 | B2 |
6911401 | Khandan et al. | Jun 2005 | B2 |
6916399 | Rozenzon et al. | Jul 2005 | B1 |
6921556 | Shimizu et al. | Jul 2005 | B2 |
6924191 | Liu et al. | Aug 2005 | B2 |
6930047 | Yamazaki | Aug 2005 | B2 |
6935269 | Lee et al. | Aug 2005 | B2 |
6942753 | Choi et al. | Sep 2005 | B2 |
6946033 | Tsuel et al. | Sep 2005 | B2 |
6951821 | Hamelin et al. | Oct 2005 | B2 |
6958175 | Sakamoto et al. | Oct 2005 | B2 |
6958286 | Chen et al. | Oct 2005 | B2 |
6969619 | Winniczek | Nov 2005 | B1 |
6995073 | Liou | Feb 2006 | B2 |
7017269 | White et al. | Mar 2006 | B2 |
7018941 | Cui et al. | Mar 2006 | B2 |
7030034 | Fucsko et al. | Apr 2006 | B2 |
7049200 | Arghavani et al. | May 2006 | B2 |
7052553 | Shih et al. | May 2006 | B1 |
7071532 | Geffken et al. | Jul 2006 | B2 |
7084070 | Lee et al. | Aug 2006 | B1 |
7115525 | Abatchev et al. | Oct 2006 | B2 |
7122949 | Strikovski | Oct 2006 | B2 |
7138767 | Chen et al. | Nov 2006 | B2 |
7145725 | Hasel et al. | Dec 2006 | B2 |
7148155 | Tarafdar et al. | Dec 2006 | B1 |
7166233 | Johnson et al. | Jan 2007 | B2 |
7183214 | Nam et al. | Feb 2007 | B2 |
7196342 | Ershov et al. | Mar 2007 | B2 |
7226805 | Hallin et al. | Jun 2007 | B2 |
7235137 | Kitayama et al. | Jun 2007 | B2 |
7244474 | Hanawa et al. | Jul 2007 | B2 |
7252011 | Traverso | Aug 2007 | B2 |
7252716 | Kim et al. | Aug 2007 | B2 |
7253123 | Arghavani et al. | Aug 2007 | B2 |
7256370 | Guiver | Aug 2007 | B2 |
7274004 | Benjamin et al. | Sep 2007 | B2 |
7288482 | Panda et al. | Oct 2007 | B2 |
7291360 | Hanawa et al. | Nov 2007 | B2 |
7316761 | Doan et al. | Jan 2008 | B2 |
7329608 | Babayan et al. | Feb 2008 | B2 |
7341633 | Lubomirsky et al. | Mar 2008 | B2 |
7344912 | Okoroanyanwu | Mar 2008 | B1 |
7358192 | Merry et al. | Apr 2008 | B2 |
7361865 | Maki et al. | Apr 2008 | B2 |
7364956 | Saito | Apr 2008 | B2 |
7365016 | Ouellet et al. | Apr 2008 | B2 |
7396480 | Kao et al. | Jul 2008 | B2 |
7396773 | Blosse et al. | Jul 2008 | B1 |
7416989 | Liu et al. | Aug 2008 | B1 |
7465358 | Weidman et al. | Dec 2008 | B2 |
7468319 | Lee | Dec 2008 | B2 |
7479303 | Byun et al. | Jan 2009 | B2 |
7484473 | Keller et al. | Feb 2009 | B2 |
7488688 | Chung et al. | Feb 2009 | B2 |
7494545 | Lam et al. | Feb 2009 | B2 |
7500445 | Zhao et al. | Mar 2009 | B2 |
7504040 | Lijima et al. | Mar 2009 | B2 |
7513214 | Okumura et al. | Apr 2009 | B2 |
7520957 | Kao et al. | Apr 2009 | B2 |
7553756 | Hayashi et al. | Jun 2009 | B2 |
7575007 | Tang et al. | Aug 2009 | B2 |
7581511 | Mardian et al. | Sep 2009 | B2 |
7604708 | Wood et al. | Oct 2009 | B2 |
7611980 | Wells | Nov 2009 | B2 |
7628897 | Mungekar et al. | Dec 2009 | B2 |
7658799 | Ishikawa et al. | Feb 2010 | B2 |
7682518 | Chandrachood et al. | Mar 2010 | B2 |
7695590 | Hanawa et al. | Apr 2010 | B2 |
7708859 | Huang et al. | May 2010 | B2 |
7722925 | White et al. | May 2010 | B2 |
7723221 | Hayashi | May 2010 | B2 |
7749326 | Kim et al. | Jul 2010 | B2 |
7780790 | Nogami | Aug 2010 | B2 |
7785672 | Choi et al. | Aug 2010 | B2 |
7790634 | Munro et al. | Sep 2010 | B2 |
7806077 | Lee et al. | Oct 2010 | B2 |
7806078 | Yoshida | Oct 2010 | B2 |
7807578 | Bencher et al. | Oct 2010 | B2 |
7825038 | Ingle et al. | Nov 2010 | B2 |
7837828 | Ikeda et al. | Nov 2010 | B2 |
7845309 | Condrashoff et al. | Dec 2010 | B2 |
7867926 | Satoh et al. | Jan 2011 | B2 |
7906818 | Pekny | Mar 2011 | B2 |
7915139 | Lang et al. | Mar 2011 | B1 |
7922863 | Ripley | Apr 2011 | B2 |
7932181 | Singh et al. | Apr 2011 | B2 |
7939422 | Ingle et al. | May 2011 | B2 |
7968441 | Xu | Jun 2011 | B2 |
7976631 | Burrows | Jul 2011 | B2 |
7977249 | Liu | Jul 2011 | B1 |
7981806 | Jung | Jul 2011 | B2 |
7989365 | Park et al. | Aug 2011 | B2 |
8008166 | Sanchez et al. | Aug 2011 | B2 |
8048811 | Feustel et al. | Nov 2011 | B2 |
8058179 | Draeger et al. | Nov 2011 | B1 |
8071482 | Kawada | Dec 2011 | B2 |
8074599 | Choi et al. | Dec 2011 | B2 |
8076198 | Lee et al. | Dec 2011 | B2 |
8083853 | Choi et al. | Dec 2011 | B2 |
8114245 | Ohmi et al. | Feb 2012 | B2 |
8119530 | Hori et al. | Feb 2012 | B2 |
8133349 | Panagopoulos | Mar 2012 | B1 |
8173228 | Choi et al. | May 2012 | B2 |
8183134 | Wu | May 2012 | B2 |
8187486 | Liu et al. | May 2012 | B1 |
8211808 | Sapre et al. | Jul 2012 | B2 |
8216486 | Dhindsa | Jul 2012 | B2 |
8222128 | Sasaki et al. | Jul 2012 | B2 |
8252194 | Kiehlbauch et al. | Aug 2012 | B2 |
8272346 | Bettencourt et al. | Sep 2012 | B2 |
8295089 | Jeong et al. | Oct 2012 | B2 |
8298627 | Minami et al. | Oct 2012 | B2 |
8298959 | Cheshire | Oct 2012 | B2 |
8309440 | Sanchez et al. | Nov 2012 | B2 |
8312839 | Baek | Nov 2012 | B2 |
8313610 | Dhindsa | Nov 2012 | B2 |
8328939 | Choi et al. | Dec 2012 | B2 |
8329262 | Miller et al. | Dec 2012 | B2 |
8336188 | Monteen | Dec 2012 | B2 |
8343306 | Tanaka et al. | Jan 2013 | B2 |
8357435 | Lubomirsky | Jan 2013 | B2 |
8361892 | Tam et al. | Jan 2013 | B2 |
8368308 | Banna et al. | Feb 2013 | B2 |
8390980 | Sansoni et al. | Mar 2013 | B2 |
8427067 | Espiau et al. | Apr 2013 | B2 |
8435902 | Tang et al. | May 2013 | B2 |
8466073 | Wang et al. | Jun 2013 | B2 |
8475674 | Thadani et al. | Jul 2013 | B2 |
8480850 | Tyler et al. | Jul 2013 | B2 |
8491805 | Kushibiki et al. | Jul 2013 | B2 |
8501629 | Tang et al. | Aug 2013 | B2 |
8506713 | Takagi | Aug 2013 | B2 |
8512509 | Bera et al. | Aug 2013 | B2 |
8528889 | Sansoni et al. | Sep 2013 | B2 |
8540844 | Hudson et al. | Sep 2013 | B2 |
8551891 | Liang | Oct 2013 | B2 |
8573152 | De La Llera | Nov 2013 | B2 |
8622021 | Taylor et al. | Jan 2014 | B2 |
8623471 | Tyler et al. | Jan 2014 | B2 |
8633423 | Lin et al. | Jan 2014 | B2 |
8642481 | Wang et al. | Feb 2014 | B2 |
8652298 | Dhindsa et al. | Feb 2014 | B2 |
8668836 | Mizukami et al. | Mar 2014 | B2 |
8679982 | Wang et al. | Mar 2014 | B2 |
8679983 | Wang et al. | Mar 2014 | B2 |
8691023 | Bao et al. | Apr 2014 | B2 |
8702902 | Blom et al. | Apr 2014 | B2 |
8741778 | Yang et al. | Jun 2014 | B2 |
8747680 | Deshpande | Jun 2014 | B1 |
8748322 | Fung et al. | Jun 2014 | B1 |
8765574 | Zhang et al. | Jul 2014 | B2 |
8771536 | Zhang et al. | Jul 2014 | B2 |
8771539 | Zhang et al. | Jul 2014 | B2 |
8772888 | Jung et al. | Jul 2014 | B2 |
8778079 | Begarney et al. | Jul 2014 | B2 |
8801952 | Wang et al. | Aug 2014 | B1 |
8802572 | Nemani et al. | Aug 2014 | B2 |
8808563 | Wang et al. | Aug 2014 | B2 |
8815720 | Godet et al. | Aug 2014 | B2 |
8835316 | Yin et al. | Sep 2014 | B2 |
8846163 | Kao et al. | Sep 2014 | B2 |
8869742 | Dhindsa | Oct 2014 | B2 |
8871651 | Choi et al. | Oct 2014 | B1 |
8888087 | Okabe et al. | Nov 2014 | B2 |
8894767 | Goradia et al. | Nov 2014 | B2 |
8895449 | Zhu et al. | Nov 2014 | B1 |
8900364 | Wright | Dec 2014 | B2 |
8921234 | Liu et al. | Dec 2014 | B2 |
8927390 | Sapre et al. | Jan 2015 | B2 |
8932947 | Han et al. | Jan 2015 | B1 |
8937017 | Cheshire et al. | Jan 2015 | B2 |
8945414 | Su et al. | Feb 2015 | B1 |
8946665 | Shim et al. | Feb 2015 | B2 |
8946828 | Sun et al. | Feb 2015 | B2 |
8951429 | Liu et al. | Feb 2015 | B1 |
8956980 | Chen et al. | Feb 2015 | B1 |
8969212 | Ren et al. | Mar 2015 | B2 |
8970114 | Busche et al. | Mar 2015 | B2 |
8980005 | Carlson et al. | Mar 2015 | B2 |
8980758 | Ling et al. | Mar 2015 | B1 |
8980763 | Wang et al. | Mar 2015 | B2 |
8992723 | Sorensen et al. | Mar 2015 | B2 |
8999656 | Jirstrom et al. | Apr 2015 | B2 |
8999839 | Su et al. | Apr 2015 | B2 |
8999856 | Zhang et al. | Apr 2015 | B2 |
9012302 | Sapre et al. | Apr 2015 | B2 |
9017481 | Pettinger et al. | Apr 2015 | B1 |
9023732 | Wang et al. | May 2015 | B2 |
9023734 | Chen et al. | May 2015 | B2 |
9034770 | Park et al. | May 2015 | B2 |
9040422 | Wang et al. | May 2015 | B2 |
9064815 | Zhang et al. | Jun 2015 | B2 |
9064816 | Kim et al. | Jun 2015 | B2 |
9072158 | Ikeda | Jun 2015 | B2 |
9093371 | Wang et al. | Jul 2015 | B2 |
9093389 | Nemani | Jul 2015 | B2 |
9093390 | Wang et al. | Jul 2015 | B2 |
9111877 | Chen et al. | Aug 2015 | B2 |
9111907 | Kamineni | Aug 2015 | B2 |
9114438 | Hoinkis et al. | Aug 2015 | B2 |
9117855 | Cho et al. | Aug 2015 | B2 |
9132436 | Liang et al. | Sep 2015 | B2 |
9136273 | Purayath et al. | Sep 2015 | B1 |
9144147 | Yang et al. | Sep 2015 | B2 |
9153442 | Wang et al. | Oct 2015 | B2 |
9159606 | Purayath et al. | Oct 2015 | B1 |
9165783 | Nemani et al. | Oct 2015 | B2 |
9165786 | Purayath et al. | Oct 2015 | B1 |
9184055 | Wang et al. | Nov 2015 | B2 |
9190290 | Xue et al. | Nov 2015 | B2 |
9190293 | Wang et al. | Nov 2015 | B2 |
9190302 | Ni | Nov 2015 | B2 |
9202708 | Chen et al. | Dec 2015 | B1 |
9209012 | Chen et al. | Dec 2015 | B2 |
9236265 | Korolik et al. | Jan 2016 | B2 |
9236266 | Zhang et al. | Jan 2016 | B2 |
9240315 | Hsieh et al. | Jan 2016 | B1 |
9245762 | Zhang et al. | Jan 2016 | B2 |
9263278 | Purayath et al. | Feb 2016 | B2 |
9269590 | Luere et al. | Feb 2016 | B2 |
9275834 | Park et al. | Mar 2016 | B1 |
9281384 | Takeguchi | Mar 2016 | B2 |
9287095 | Nguyen et al. | Mar 2016 | B2 |
9287134 | Wang et al. | Mar 2016 | B2 |
9293568 | Ko | Mar 2016 | B2 |
9299537 | Kobayashi et al. | Mar 2016 | B2 |
9299538 | Kobayashi et al. | Mar 2016 | B2 |
9299575 | Park et al. | Mar 2016 | B2 |
9299582 | Ingle et al. | Mar 2016 | B2 |
9299583 | Wang et al. | Mar 2016 | B1 |
9309598 | Wang et al. | Apr 2016 | B2 |
9324576 | Zhang et al. | Apr 2016 | B2 |
9343272 | Pandit et al. | May 2016 | B1 |
9343327 | Zhange et al. | May 2016 | B2 |
9349605 | Xu et al. | May 2016 | B1 |
9355856 | Wang et al. | May 2016 | B2 |
9355862 | Pandit et al. | May 2016 | B2 |
9355863 | Chen et al. | May 2016 | B2 |
9355922 | Park et al. | May 2016 | B2 |
9362130 | Ingle et al. | Jun 2016 | B2 |
9362163 | Danek et al. | Jun 2016 | B2 |
9368364 | Park et al. | Jun 2016 | B2 |
9373517 | Yang et al. | Jun 2016 | B2 |
9373522 | Wang et al. | Jun 2016 | B1 |
9378969 | Hsu et al. | Jun 2016 | B2 |
9378978 | Purayath et al. | Jun 2016 | B2 |
9384997 | Ren et al. | Jul 2016 | B2 |
9385028 | Nemani et al. | Jul 2016 | B2 |
9390937 | Chen et al. | Jul 2016 | B2 |
9396961 | Arghavani et al. | Jul 2016 | B2 |
9396989 | Purayath et al. | Jul 2016 | B2 |
9406523 | Chen et al. | Aug 2016 | B2 |
9412608 | Wang et al. | Aug 2016 | B2 |
9412752 | Yeh et al. | Aug 2016 | B1 |
9418858 | Wang et al. | Aug 2016 | B2 |
9425041 | Berry et al. | Aug 2016 | B2 |
9425058 | Kim et al. | Aug 2016 | B2 |
9431268 | Lill et al. | Aug 2016 | B2 |
9431414 | Jang et al. | Aug 2016 | B2 |
9343358 | Montgomery | Sep 2016 | B1 |
9437451 | Chen et al. | Sep 2016 | B2 |
9443749 | Smith | Sep 2016 | B2 |
9449845 | Liu et al. | Sep 2016 | B2 |
9449846 | Liu et al. | Sep 2016 | B2 |
9449850 | Wang et al. | Sep 2016 | B2 |
9460959 | Xie et al. | Oct 2016 | B1 |
9466469 | Khaja | Oct 2016 | B2 |
9472412 | Zhang et al. | Oct 2016 | B2 |
9472417 | Ingle et al. | Oct 2016 | B2 |
9478432 | Chen et al. | Oct 2016 | B2 |
9478433 | Zhou et al. | Oct 2016 | B1 |
9478434 | Wang et al. | Oct 2016 | B2 |
9493879 | Hoinkis et al. | Nov 2016 | B2 |
9496167 | Purayath et al. | Nov 2016 | B2 |
9499898 | Nguyen et al. | Nov 2016 | B2 |
9502258 | Xue et al. | Nov 2016 | B2 |
9508529 | Valcore et al. | Nov 2016 | B2 |
9520303 | Wang et al. | Dec 2016 | B2 |
9543163 | Ling et al. | Jan 2017 | B2 |
9564296 | Kobayashi et al. | Feb 2017 | B2 |
9564338 | Zhang et al. | Feb 2017 | B1 |
9576788 | Liu et al. | Feb 2017 | B2 |
9576809 | Korolik et al. | Feb 2017 | B2 |
9607856 | Wang et al. | Mar 2017 | B2 |
9613822 | Chen et al. | Apr 2017 | B2 |
9659753 | Cho et al. | May 2017 | B2 |
9659791 | Wang et al. | May 2017 | B2 |
9659792 | Wang et al. | May 2017 | B2 |
9666449 | Koval et al. | May 2017 | B2 |
9691645 | Ayers | Jun 2017 | B2 |
9704723 | Wang et al. | Jul 2017 | B2 |
9711366 | Ingle et al. | Jul 2017 | B2 |
9721789 | Yang et al. | Aug 2017 | B1 |
9728437 | Tran et al. | Aug 2017 | B2 |
9741593 | Benjaminson et al. | Aug 2017 | B2 |
9754800 | Zhang et al. | Sep 2017 | B2 |
9768034 | Xu et al. | Sep 2017 | B1 |
9773648 | Cho et al. | Sep 2017 | B2 |
9773695 | Purayath et al. | Sep 2017 | B2 |
9779956 | Zhang et al. | Oct 2017 | B1 |
9812462 | Pang et al. | Nov 2017 | B1 |
9822009 | Kagaya et al. | Nov 2017 | B2 |
9831097 | Ingle et al. | Nov 2017 | B2 |
9837249 | Kobayashi et al. | Dec 2017 | B2 |
9837284 | Chen et al. | Dec 2017 | B2 |
9837286 | Yang et al. | Dec 2017 | B2 |
9842744 | Zhang et al. | Dec 2017 | B2 |
9865484 | Citla et al. | Jan 2018 | B1 |
9881805 | Li et al. | Jan 2018 | B2 |
9885117 | Lubomirsky et al. | Feb 2018 | B2 |
9887096 | Park et al. | Feb 2018 | B2 |
9903020 | Kim et al. | Feb 2018 | B2 |
9934942 | Lubomirsky | Apr 2018 | B1 |
9947549 | Park et al. | Apr 2018 | B1 |
9960045 | Purayath et al. | May 2018 | B1 |
9966240 | Park et al. | May 2018 | B2 |
9978564 | Liang et al. | May 2018 | B2 |
9991134 | Wang et al. | Jun 2018 | B2 |
10026621 | Ko et al. | Jul 2018 | B2 |
10032606 | Yang et al. | Jul 2018 | B2 |
10043674 | Korolik et al. | Aug 2018 | B1 |
10043684 | Arnepalli et al. | Aug 2018 | B1 |
10049891 | Wang et al. | Aug 2018 | B1 |
10062578 | Zhang et al. | Aug 2018 | B2 |
10062579 | Chen et al. | Aug 2018 | B2 |
10062585 | Lubomirsky | Aug 2018 | B2 |
10062587 | Chen et al. | Aug 2018 | B2 |
10147736 | Linuma | Dec 2018 | B2 |
20010006093 | Tabuchi | Jul 2001 | A1 |
20010008803 | Takamatsu et al. | Jul 2001 | A1 |
20010015175 | Masuda et al. | Aug 2001 | A1 |
20010015261 | Kobayashi et al. | Aug 2001 | A1 |
20010028093 | Yamazaki et al. | Oct 2001 | A1 |
20010028922 | Sandhu | Oct 2001 | A1 |
20010029891 | Oh et al. | Oct 2001 | A1 |
20010030366 | Nakano et al. | Oct 2001 | A1 |
20010034106 | Moise et al. | Oct 2001 | A1 |
20010034121 | Fu et al. | Oct 2001 | A1 |
20010035124 | Okayama et al. | Nov 2001 | A1 |
20010036706 | Kitamura | Nov 2001 | A1 |
20010037856 | Park | Nov 2001 | A1 |
20010037941 | Thompson | Nov 2001 | A1 |
20010039921 | Rolfson et al. | Nov 2001 | A1 |
20010042512 | Xu et al. | Nov 2001 | A1 |
20010047760 | Moslehi | Dec 2001 | A1 |
20010053585 | Kikuchi et al. | Dec 2001 | A1 |
20010053610 | Athavale | Dec 2001 | A1 |
20010054381 | Umotoy et al. | Dec 2001 | A1 |
20010054387 | Frankel et al. | Dec 2001 | A1 |
20020000202 | Yuda et al. | Jan 2002 | A1 |
20020001778 | Latchford et al. | Jan 2002 | A1 |
20020009560 | Ozono | Jan 2002 | A1 |
20020009885 | Brankner et al. | Jan 2002 | A1 |
20020011210 | Satoh et al. | Jan 2002 | A1 |
20020011214 | Kamarehi et al. | Jan 2002 | A1 |
20020016080 | Khan et al. | Feb 2002 | A1 |
20020016085 | Huang et al. | Feb 2002 | A1 |
20020023899 | Khater et al. | Feb 2002 | A1 |
20020028582 | Nallan et al. | Mar 2002 | A1 |
20020028585 | Chung et al. | Mar 2002 | A1 |
20020029747 | Powell et al. | Mar 2002 | A1 |
20020033233 | Savas | Mar 2002 | A1 |
20020036143 | Segawa et al. | Mar 2002 | A1 |
20020040764 | Kwan et al. | Apr 2002 | A1 |
20020040766 | Takahashi | Apr 2002 | A1 |
20020043690 | Doyle et al. | Apr 2002 | A1 |
20020045966 | Lee et al. | Apr 2002 | A1 |
20020046991 | Smith et al. | Apr 2002 | A1 |
20020054962 | Huang | May 2002 | A1 |
20020062954 | Getchel et al. | May 2002 | A1 |
20020069820 | Yudovsky | Jun 2002 | A1 |
20020070414 | Drescher et al. | Jun 2002 | A1 |
20020073925 | Noble et al. | Jun 2002 | A1 |
20020074573 | Takeuchi et al. | Jun 2002 | A1 |
20020086501 | O'Donnell et al. | Jul 2002 | A1 |
20020090781 | Skotnicki et al. | Jul 2002 | A1 |
20020090835 | Chakravarti et al. | Jul 2002 | A1 |
20020094378 | O-Donnell | Jul 2002 | A1 |
20020094591 | Sill et al. | Jul 2002 | A1 |
20020096493 | Hattori | Jul 2002 | A1 |
20020098681 | Hu et al. | Jul 2002 | A1 |
20020106845 | Chao et al. | Aug 2002 | A1 |
20020112819 | Kamarehi et al. | Aug 2002 | A1 |
20020124867 | Kim et al. | Sep 2002 | A1 |
20020129769 | Kim et al. | Sep 2002 | A1 |
20020129902 | Babayan et al. | Sep 2002 | A1 |
20020144657 | Chiang et al. | Oct 2002 | A1 |
20020153808 | Skotnicki et al. | Oct 2002 | A1 |
20020164885 | Lill et al. | Nov 2002 | A1 |
20020170678 | Hayashi et al. | Nov 2002 | A1 |
20020177322 | Li et al. | Nov 2002 | A1 |
20020179248 | Kabansky et al. | Dec 2002 | A1 |
20020182878 | Hirose et al. | Dec 2002 | A1 |
20020187280 | Johnson et al. | Dec 2002 | A1 |
20020187655 | Tan et al. | Dec 2002 | A1 |
20020197823 | Yoo et al. | Dec 2002 | A1 |
20030000647 | Yudovsky et al. | Jan 2003 | A1 |
20030003757 | Naltan et al. | Jan 2003 | A1 |
20030007910 | Lazarovich et al. | Jan 2003 | A1 |
20030010645 | Ting et al. | Jan 2003 | A1 |
20030019428 | Ku et al. | Jan 2003 | A1 |
20030019580 | Strang | Jan 2003 | A1 |
20030026060 | Hiramatsu et al. | Feb 2003 | A1 |
20030029566 | Roth | Feb 2003 | A1 |
20030029567 | Dhindsa et al. | Feb 2003 | A1 |
20030029715 | Yu et al. | Feb 2003 | A1 |
20030031905 | Saito et al. | Feb 2003 | A1 |
20030032284 | Enomoto et al. | Feb 2003 | A1 |
20030038127 | Liu et al. | Feb 2003 | A1 |
20030038305 | Wasshuber | Feb 2003 | A1 |
20030054608 | Tseng et al. | Mar 2003 | A1 |
20030066482 | Pokharna et al. | Apr 2003 | A1 |
20030071035 | Brailove | Apr 2003 | A1 |
20030072639 | White et al. | Apr 2003 | A1 |
20030075808 | Inoue et al. | Apr 2003 | A1 |
20030077857 | Xia et al. | Apr 2003 | A1 |
20030077909 | Jiwari | Apr 2003 | A1 |
20030079686 | Chen et al. | May 2003 | A1 |
20030087488 | Fink | May 2003 | A1 |
20030087531 | Kang et al. | May 2003 | A1 |
20030091938 | Fairbairn et al. | May 2003 | A1 |
20030094134 | Minami et al. | May 2003 | A1 |
20030098125 | An | May 2003 | A1 |
20030109143 | Hsieh et al. | Jun 2003 | A1 |
20030116087 | Nguyen et al. | Jun 2003 | A1 |
20030116439 | Seo et al. | Jun 2003 | A1 |
20030121608 | Chen et al. | Jul 2003 | A1 |
20030121609 | Ohmi et al. | Jul 2003 | A1 |
20030124465 | Lee et al. | Jul 2003 | A1 |
20030124842 | Hytros et al. | Jul 2003 | A1 |
20030127049 | Han et al. | Jul 2003 | A1 |
20030127740 | Hsu et al. | Jul 2003 | A1 |
20030129106 | Sorensen et al. | Jul 2003 | A1 |
20030129827 | Lee et al. | Jul 2003 | A1 |
20030132319 | Hytros et al. | Jul 2003 | A1 |
20030136520 | Yudovsky et al. | Jul 2003 | A1 |
20030140844 | Maa et al. | Jul 2003 | A1 |
20030143328 | Chen et al. | Jul 2003 | A1 |
20030148035 | Lingampalli | Aug 2003 | A1 |
20030150530 | Lin et al. | Aug 2003 | A1 |
20030152691 | Baude | Aug 2003 | A1 |
20030159307 | Sago et al. | Aug 2003 | A1 |
20030164226 | Kanno et al. | Sep 2003 | A1 |
20030168439 | Kanno et al. | Sep 2003 | A1 |
20030170945 | Igeta et al. | Sep 2003 | A1 |
20030173333 | Wang et al. | Sep 2003 | A1 |
20030173347 | Guiver | Sep 2003 | A1 |
20030173675 | Watanabe | Sep 2003 | A1 |
20030181040 | Ivanov et al. | Sep 2003 | A1 |
20030183244 | Rossman | Oct 2003 | A1 |
20030190426 | Padhi et al. | Oct 2003 | A1 |
20030196760 | Tyler et al. | Oct 2003 | A1 |
20030199170 | Li | Oct 2003 | A1 |
20030200929 | Otsuki | Oct 2003 | A1 |
20030205329 | Gujer et al. | Nov 2003 | A1 |
20030205479 | Lin et al. | Nov 2003 | A1 |
20030209323 | Yokogaki et al. | Nov 2003 | A1 |
20030215570 | Seutter et al. | Nov 2003 | A1 |
20030215963 | AmRhein et al. | Nov 2003 | A1 |
20030216044 | Lin et al. | Nov 2003 | A1 |
20030221780 | Lei et al. | Dec 2003 | A1 |
20030224217 | Byun et al. | Dec 2003 | A1 |
20030224617 | Baek et al. | Dec 2003 | A1 |
20030230385 | Bach et al. | Dec 2003 | A1 |
20040003828 | Jackson | Jan 2004 | A1 |
20040005726 | Huang | Jan 2004 | A1 |
20040018304 | Chung et al. | Jan 2004 | A1 |
20040020801 | Solling | Feb 2004 | A1 |
20040026371 | Nguyen et al. | Feb 2004 | A1 |
20040033678 | Arghavani et al. | Feb 2004 | A1 |
20040033684 | Li | Feb 2004 | A1 |
20040050328 | Kumagai et al. | Mar 2004 | A1 |
20040058070 | Takeuchi et al. | Mar 2004 | A1 |
20040058293 | Nguyen et al. | Mar 2004 | A1 |
20040060514 | Janakiraman et al. | Apr 2004 | A1 |
20040061447 | Saigusa et al. | Apr 2004 | A1 |
20040069225 | Fairbairn et al. | Apr 2004 | A1 |
20040070346 | Choi | Apr 2004 | A1 |
20040072446 | Liu et al. | Apr 2004 | A1 |
20040076529 | Gnauck et al. | Apr 2004 | A1 |
20040083967 | Yuda et al. | May 2004 | A1 |
20040087139 | Yeh et al. | May 2004 | A1 |
20040092063 | Okumura | May 2004 | A1 |
20040099285 | Wange et al. | May 2004 | A1 |
20040099378 | Kim et al. | May 2004 | A1 |
20040101667 | O'Loughlin et al. | May 2004 | A1 |
20040103844 | Chou et al. | Jun 2004 | A1 |
20040107908 | Collins et al. | Jun 2004 | A1 |
20040108067 | Fischione et al. | Jun 2004 | A1 |
20040108068 | Senzaki et al. | Jun 2004 | A1 |
20040115876 | Goundar et al. | Jun 2004 | A1 |
20040115947 | Fink et al. | Jun 2004 | A1 |
20040124280 | Shih et al. | Jul 2004 | A1 |
20040129671 | Ji et al. | Jul 2004 | A1 |
20040137161 | Segawa et al. | Jul 2004 | A1 |
20040140053 | Srivastava et al. | Jul 2004 | A1 |
20040144490 | Zhao et al. | Jul 2004 | A1 |
20040147126 | Yamashita et al. | Jul 2004 | A1 |
20040149223 | Collison et al. | Aug 2004 | A1 |
20040149394 | Doan et al. | Aug 2004 | A1 |
20040152342 | Li | Aug 2004 | A1 |
20040154535 | Chen et al. | Aug 2004 | A1 |
20040157444 | Chiu | Aug 2004 | A1 |
20040161921 | Ryu | Aug 2004 | A1 |
20040175913 | Johnson et al. | Sep 2004 | A1 |
20040175929 | Schmitt et al. | Sep 2004 | A1 |
20040182315 | Laflamme et al. | Sep 2004 | A1 |
20040187787 | Dawson | Sep 2004 | A1 |
20040192032 | Ohmori et al. | Sep 2004 | A1 |
20040194799 | Kim et al. | Oct 2004 | A1 |
20040195208 | Pavel et al. | Oct 2004 | A1 |
20040195216 | Strang | Oct 2004 | A1 |
20040200499 | Harvey | Oct 2004 | A1 |
20040211357 | Gadgil et al. | Oct 2004 | A1 |
20040219723 | Peng et al. | Nov 2004 | A1 |
20040219737 | Quon | Nov 2004 | A1 |
20040219789 | Wood et al. | Nov 2004 | A1 |
20040221809 | Ohmi et al. | Nov 2004 | A1 |
20040231706 | Bhatnagar et al. | Nov 2004 | A1 |
20040237897 | Hanawa et al. | Dec 2004 | A1 |
20040238123 | Becknell et al. | Dec 2004 | A1 |
20040259367 | Constantine et al. | Dec 2004 | A1 |
20040263827 | Xu | Dec 2004 | A1 |
20050000432 | Keller et al. | Jan 2005 | A1 |
20050001276 | Gao et al. | Jan 2005 | A1 |
20050003676 | Ho et al. | Jan 2005 | A1 |
20050009340 | Saijo et al. | Jan 2005 | A1 |
20050009358 | Choi et al. | Jan 2005 | A1 |
20050026430 | Kim et al. | Feb 2005 | A1 |
20050026431 | Kazumi et al. | Feb 2005 | A1 |
20050035455 | Hu et al. | Feb 2005 | A1 |
20050039679 | Kleshock | Feb 2005 | A1 |
20050051094 | Schaepkens et al. | Mar 2005 | A1 |
20050054167 | Choi et al. | Mar 2005 | A1 |
20050056218 | Sun et al. | Mar 2005 | A1 |
20050073051 | Yamamoto et al. | Apr 2005 | A1 |
20050079706 | Kumar et al. | Apr 2005 | A1 |
20050087517 | Ott et al. | Apr 2005 | A1 |
20050090078 | Ishihara | Apr 2005 | A1 |
20050090120 | Hasegawa et al. | Apr 2005 | A1 |
20050098111 | Shimizu et al. | May 2005 | A1 |
20050103267 | Hur et al. | May 2005 | A1 |
20050105991 | Hofmeister et al. | May 2005 | A1 |
20050109279 | Suzuki | May 2005 | A1 |
20050112876 | Wu | May 2005 | A1 |
20050112901 | Ji et al. | May 2005 | A1 |
20050123690 | Derderian et al. | Jun 2005 | A1 |
20050133849 | Jeon et al. | Jun 2005 | A1 |
20050136188 | Chang | Jun 2005 | A1 |
20050145341 | Suzuki | Jul 2005 | A1 |
20050164479 | Perng et al. | Jul 2005 | A1 |
20050167394 | Liu et al. | Aug 2005 | A1 |
20050176258 | Hirose et al. | Aug 2005 | A1 |
20050178746 | Gorin | Aug 2005 | A1 |
20050181588 | Kim | Aug 2005 | A1 |
20050183666 | Tsuji et al. | Aug 2005 | A1 |
20050194094 | Yasaka | Sep 2005 | A1 |
20050196967 | Savas et al. | Sep 2005 | A1 |
20050199489 | Stevens et al. | Sep 2005 | A1 |
20050205110 | Kao et al. | Sep 2005 | A1 |
20050205862 | Koemtzopoulos et al. | Sep 2005 | A1 |
20050208215 | Eguchi et al. | Sep 2005 | A1 |
20050208217 | Shinriki et al. | Sep 2005 | A1 |
20050214477 | Hanawa et al. | Sep 2005 | A1 |
20050217582 | Kim et al. | Oct 2005 | A1 |
20050218507 | Kao et al. | Oct 2005 | A1 |
20050219786 | Brown et al. | Oct 2005 | A1 |
20050221552 | Kao et al. | Oct 2005 | A1 |
20050224181 | Merry et al. | Oct 2005 | A1 |
20050229848 | Shinriki et al. | Oct 2005 | A1 |
20050230350 | Kao et al. | Oct 2005 | A1 |
20050236694 | Wu et al. | Oct 2005 | A1 |
20050238807 | Lin et al. | Oct 2005 | A1 |
20050239282 | Chen et al. | Oct 2005 | A1 |
20050251990 | Choi et al. | Nov 2005 | A1 |
20050266622 | Arghavani et al. | Dec 2005 | A1 |
20050266650 | Ahn et al. | Dec 2005 | A1 |
20050266691 | Gu et al. | Dec 2005 | A1 |
20050269030 | Kent et al. | Dec 2005 | A1 |
20050274324 | Takahashi et al. | Dec 2005 | A1 |
20050279454 | Snijders | Dec 2005 | A1 |
20050283321 | Yue et al. | Dec 2005 | A1 |
20050287688 | Won et al. | Dec 2005 | A1 |
20050287755 | Bachmann | Dec 2005 | A1 |
20050287771 | Seamons et al. | Dec 2005 | A1 |
20060000802 | Kumar et al. | Jan 2006 | A1 |
20060000805 | Todorow et al. | Jan 2006 | A1 |
20060005856 | Sun et al. | Jan 2006 | A1 |
20060005930 | Ikeda et al. | Jan 2006 | A1 |
20060006057 | Laermer | Jan 2006 | A1 |
20060008676 | Ebata et al. | Jan 2006 | A1 |
20060011298 | Lim et al. | Jan 2006 | A1 |
20060011299 | Condrashoff et al. | Jan 2006 | A1 |
20060016783 | Wu et al. | Jan 2006 | A1 |
20060019456 | Bu et al. | Jan 2006 | A1 |
20060019477 | Hanawa et al. | Jan 2006 | A1 |
20060019486 | Yu et al. | Jan 2006 | A1 |
20060021574 | Armour et al. | Feb 2006 | A1 |
20060021701 | Tobe et al. | Feb 2006 | A1 |
20060021703 | Umotoy et al. | Feb 2006 | A1 |
20060024954 | Wu et al. | Feb 2006 | A1 |
20060024956 | Zhijian et al. | Feb 2006 | A1 |
20060033678 | Lubomirsky et al. | Feb 2006 | A1 |
20060040055 | Nguyen et al. | Feb 2006 | A1 |
20060043066 | Kamp | Mar 2006 | A1 |
20060046412 | Nguyen et al. | Mar 2006 | A1 |
20060046419 | Sandhu et al. | Mar 2006 | A1 |
20060046470 | Becknell | Mar 2006 | A1 |
20060051966 | Or et al. | Mar 2006 | A1 |
20060051968 | Joshi et al. | Mar 2006 | A1 |
20060054184 | Mozetic et al. | Mar 2006 | A1 |
20060057828 | Omura et al. | Mar 2006 | A1 |
20060060942 | Minixhofer et al. | Mar 2006 | A1 |
20060065629 | Chen et al. | Mar 2006 | A1 |
20060073349 | Aihara et al. | Apr 2006 | A1 |
20060076108 | Holland et al. | Apr 2006 | A1 |
20060087644 | McMillin et al. | Apr 2006 | A1 |
20060090700 | Satoh et al. | May 2006 | A1 |
20060093756 | Rajagopalan et al. | May 2006 | A1 |
20060097397 | Russell et al. | May 2006 | A1 |
20060102076 | Smith et al. | May 2006 | A1 |
20060102587 | Kimura | May 2006 | A1 |
20060113038 | Gondhalekar et al. | Jun 2006 | A1 |
20060118178 | Desbiolles et al. | Jun 2006 | A1 |
20060118240 | Holber et al. | Jun 2006 | A1 |
20060121724 | Yue et al. | Jun 2006 | A1 |
20060124151 | Yamasaki et al. | Jun 2006 | A1 |
20060124242 | Kanarik et al. | Jun 2006 | A1 |
20060130971 | Chang et al. | Jun 2006 | A1 |
20060151115 | Kim et al. | Jul 2006 | A1 |
20060157449 | Takahashi et al. | Jul 2006 | A1 |
20060162661 | Jung et al. | Jul 2006 | A1 |
20060166107 | Chen et al. | Jul 2006 | A1 |
20060166515 | Karim et al. | Jul 2006 | A1 |
20060169327 | Shajii et al. | Aug 2006 | A1 |
20060169410 | Maeda et al. | Aug 2006 | A1 |
20060178008 | Yeh et al. | Aug 2006 | A1 |
20060183270 | Humpston | Aug 2006 | A1 |
20060185592 | Matsuura | Aug 2006 | A1 |
20060191479 | Mizukami et al. | Aug 2006 | A1 |
20060191637 | Zajac et al. | Aug 2006 | A1 |
20060207504 | Hasebe et al. | Sep 2006 | A1 |
20060207595 | Ohmi et al. | Sep 2006 | A1 |
20060207971 | Moriya et al. | Sep 2006 | A1 |
20060210713 | Brcka | Sep 2006 | A1 |
20060210723 | Ishizaka | Sep 2006 | A1 |
20060215347 | Wakabayashi et al. | Sep 2006 | A1 |
20060216878 | Lee | Sep 2006 | A1 |
20060219360 | Iwasaki | Oct 2006 | A1 |
20060222481 | Foree | Oct 2006 | A1 |
20060226121 | Aoi | Oct 2006 | A1 |
20060228889 | Edelberg et al. | Oct 2006 | A1 |
20060240661 | Annapragada et al. | Oct 2006 | A1 |
20060244107 | Sugihara | Nov 2006 | A1 |
20060245852 | Iwabuchi | Nov 2006 | A1 |
20060246217 | Weidman et al. | Nov 2006 | A1 |
20060251800 | Weidman et al. | Nov 2006 | A1 |
20060251801 | Weidman et al. | Nov 2006 | A1 |
20060252252 | Zhu et al. | Nov 2006 | A1 |
20060252265 | Jin et al. | Nov 2006 | A1 |
20060254716 | Mosden et al. | Nov 2006 | A1 |
20060260750 | Rueger | Nov 2006 | A1 |
20060261490 | Su et al. | Nov 2006 | A1 |
20060264043 | Stewart et al. | Nov 2006 | A1 |
20060266288 | Choi | Nov 2006 | A1 |
20060286774 | Singh et al. | Dec 2006 | A1 |
20060289384 | Pavel et al. | Dec 2006 | A1 |
20060292846 | Pinto et al. | Dec 2006 | A1 |
20070022952 | Ritchie et al. | Feb 2007 | A1 |
20070025907 | Rezeq | Feb 2007 | A1 |
20070039548 | Johnson | Feb 2007 | A1 |
20070048977 | Lee et al. | Mar 2007 | A1 |
20070051471 | Kawaguchi et al. | Mar 2007 | A1 |
20070056925 | Liu et al. | Mar 2007 | A1 |
20070062453 | Ishikawa | Mar 2007 | A1 |
20070066084 | Wajda et al. | Mar 2007 | A1 |
20070071888 | Shanmugasundram et al. | Mar 2007 | A1 |
20070072408 | Enomoto et al. | Mar 2007 | A1 |
20070077737 | Kobayashi | Apr 2007 | A1 |
20070079758 | Holland et al. | Apr 2007 | A1 |
20070090325 | Hwang et al. | Apr 2007 | A1 |
20070099428 | Shamiryan et al. | May 2007 | A1 |
20070099431 | Li | May 2007 | A1 |
20070099438 | Ye et al. | May 2007 | A1 |
20070107750 | Sawin et al. | May 2007 | A1 |
20070108404 | Stewart et al. | May 2007 | A1 |
20070111519 | Lubomirsky et al. | May 2007 | A1 |
20070117396 | Wu et al. | May 2007 | A1 |
20070119370 | Ma et al. | May 2007 | A1 |
20070119371 | Ma et al. | May 2007 | A1 |
20070123051 | Arghavani et al. | May 2007 | A1 |
20070128864 | Ma | Jun 2007 | A1 |
20070131274 | Stollwerck et al. | Jun 2007 | A1 |
20070145023 | Holber et al. | Jun 2007 | A1 |
20070154838 | Lee | Jul 2007 | A1 |
20070163440 | Kim et al. | Jul 2007 | A1 |
20070175861 | Hwang et al. | Aug 2007 | A1 |
20070181057 | Lam et al. | Aug 2007 | A1 |
20070193515 | Jeon et al. | Aug 2007 | A1 |
20070197028 | Byun et al. | Aug 2007 | A1 |
20070207275 | Nowak et al. | Sep 2007 | A1 |
20070212288 | Holst | Sep 2007 | A1 |
20070221620 | Sakthivel et al. | Sep 2007 | A1 |
20070227554 | Satoh et al. | Oct 2007 | A1 |
20070231109 | Pak et al. | Oct 2007 | A1 |
20070232071 | Balseanu et al. | Oct 2007 | A1 |
20070235134 | Limuro | Oct 2007 | A1 |
20070238199 | Yamashita | Oct 2007 | A1 |
20070238321 | Futase et al. | Oct 2007 | A1 |
20070243685 | Jiang et al. | Oct 2007 | A1 |
20070243714 | Shin et al. | Oct 2007 | A1 |
20070258186 | Matyushkin et al. | Nov 2007 | A1 |
20070259467 | Tweet et al. | Nov 2007 | A1 |
20070264820 | Liu | Nov 2007 | A1 |
20070266946 | Choi | Nov 2007 | A1 |
20070277734 | Lubomirsky et al. | Dec 2007 | A1 |
20070280816 | Kurita et al. | Dec 2007 | A1 |
20070281106 | Lubomirsky et al. | Dec 2007 | A1 |
20070287292 | Li et al. | Dec 2007 | A1 |
20070296967 | Gupta et al. | Dec 2007 | A1 |
20080003836 | Nishimura et al. | Jan 2008 | A1 |
20080017104 | Matyushkin et al. | Jan 2008 | A1 |
20080020570 | Naik | Jan 2008 | A1 |
20080035608 | Thomas et al. | Feb 2008 | A1 |
20080044593 | Seo et al. | Feb 2008 | A1 |
20080044990 | Lee | Feb 2008 | A1 |
20080050538 | Hirata | Feb 2008 | A1 |
20080063810 | Park et al. | Mar 2008 | A1 |
20080075668 | Goldstein | Mar 2008 | A1 |
20080081483 | Wu | Apr 2008 | A1 |
20080085604 | Hoshino et al. | Apr 2008 | A1 |
20080099147 | Myo et al. | May 2008 | A1 |
20080099431 | Kumar et al. | May 2008 | A1 |
20080099876 | Seto | May 2008 | A1 |
20080100222 | Lewington et al. | May 2008 | A1 |
20080102570 | Fisher et al. | May 2008 | A1 |
20080102640 | Hassan et al. | May 2008 | A1 |
20080102646 | Kawaguchi et al. | May 2008 | A1 |
20080104782 | Hughes | May 2008 | A1 |
20080105555 | Iwazaki et al. | May 2008 | A1 |
20080115726 | Ingle et al. | May 2008 | A1 |
20080121970 | Aritome | May 2008 | A1 |
20080124937 | Xu et al. | May 2008 | A1 |
20080142831 | Su | Jun 2008 | A1 |
20080153306 | Cho et al. | Jun 2008 | A1 |
20080156631 | Fair et al. | Jul 2008 | A1 |
20080156771 | Jeon et al. | Jul 2008 | A1 |
20080157225 | Datta et al. | Jul 2008 | A1 |
20080160210 | Yang et al. | Jul 2008 | A1 |
20080169588 | Shih et al. | Jul 2008 | A1 |
20080171407 | Nakabayashi et al. | Jul 2008 | A1 |
20080173906 | Zhu | Jul 2008 | A1 |
20080176412 | Komeda | Jul 2008 | A1 |
20080178797 | Fodor et al. | Jul 2008 | A1 |
20080178805 | Paterson et al. | Jul 2008 | A1 |
20080182381 | Kiyotoshi | Jul 2008 | A1 |
20080182382 | Ingle et al. | Jul 2008 | A1 |
20080182383 | Lee et al. | Jul 2008 | A1 |
20080196666 | Toshima | Aug 2008 | A1 |
20080202688 | Wu et al. | Aug 2008 | A1 |
20080202892 | Smith et al. | Aug 2008 | A1 |
20080213496 | Sun et al. | Sep 2008 | A1 |
20080216901 | Chamberlain et al. | Sep 2008 | A1 |
20080216958 | Goto et al. | Sep 2008 | A1 |
20080230519 | Takahashi | Sep 2008 | A1 |
20080233709 | Conti et al. | Sep 2008 | A1 |
20080236751 | Aramaki et al. | Oct 2008 | A1 |
20080254635 | Benzel et al. | Oct 2008 | A1 |
20080261404 | Kozuka et al. | Oct 2008 | A1 |
20080264337 | Sano et al. | Oct 2008 | A1 |
20080268645 | Kao et al. | Oct 2008 | A1 |
20080292798 | Huh et al. | Nov 2008 | A1 |
20080293248 | Park et al. | Nov 2008 | A1 |
20080317965 | Son et al. | Dec 2008 | A1 |
20090000743 | Iizuka | Jan 2009 | A1 |
20090001480 | Cheng | Jan 2009 | A1 |
20090004849 | Eun | Jan 2009 | A1 |
20090004873 | Yang | Jan 2009 | A1 |
20090014127 | Shah et al. | Jan 2009 | A1 |
20090014323 | Yendler et al. | Jan 2009 | A1 |
20090014324 | Kawaguchi et al. | Jan 2009 | A1 |
20090017227 | Fu et al. | Jan 2009 | A1 |
20090036292 | Sun et al. | Feb 2009 | A1 |
20090045167 | Maruyama | Feb 2009 | A1 |
20090072401 | Arnold et al. | Mar 2009 | A1 |
20090081878 | Dhindsa | Mar 2009 | A1 |
20090084317 | Wu et al. | Apr 2009 | A1 |
20090087960 | Cho et al. | Apr 2009 | A1 |
20090087979 | Raghuram | Apr 2009 | A1 |
20090095221 | Tam et al. | Apr 2009 | A1 |
20090095222 | Tam et al. | Apr 2009 | A1 |
20090095621 | Kao et al. | Apr 2009 | A1 |
20090098276 | Burrows | Apr 2009 | A1 |
20090098706 | Kim et al. | Apr 2009 | A1 |
20090104738 | Ring et al. | Apr 2009 | A1 |
20090104782 | Lu et al. | Apr 2009 | A1 |
20090111280 | Kao et al. | Apr 2009 | A1 |
20090117270 | Yamasaki et al. | May 2009 | A1 |
20090120464 | Rasheed et al. | May 2009 | A1 |
20090162647 | Sun et al. | Jun 2009 | A1 |
20090170221 | Jacques et al. | Jul 2009 | A1 |
20090170331 | Cheng et al. | Jul 2009 | A1 |
20090179300 | Arai | Jul 2009 | A1 |
20090189246 | Wu et al. | Jul 2009 | A1 |
20090189287 | Yang et al. | Jul 2009 | A1 |
20090191711 | Rui et al. | Jul 2009 | A1 |
20090194233 | Tamura | Aug 2009 | A1 |
20090194810 | Kiyotoshi et al. | Aug 2009 | A1 |
20090197418 | Sago | Aug 2009 | A1 |
20090202721 | Nogami et al. | Aug 2009 | A1 |
20090214825 | Sun et al. | Aug 2009 | A1 |
20090223928 | Colpo | Sep 2009 | A1 |
20090236314 | Chen | Sep 2009 | A1 |
20090255902 | Satoh et al. | Oct 2009 | A1 |
20090258162 | Furuta et al. | Oct 2009 | A1 |
20090269934 | Kao et al. | Oct 2009 | A1 |
20090274590 | Willwerth et al. | Nov 2009 | A1 |
20090275146 | Takano et al. | Nov 2009 | A1 |
20090275205 | Kiehlbauch et al. | Nov 2009 | A1 |
20090275206 | Katz et al. | Nov 2009 | A1 |
20090277587 | Lubomirsky et al. | Nov 2009 | A1 |
20090277874 | Rui et al. | Nov 2009 | A1 |
20090280650 | Lubomirsky et al. | Nov 2009 | A1 |
20090286400 | Heo et al. | Nov 2009 | A1 |
20090286405 | Okesaku et al. | Nov 2009 | A1 |
20090317978 | Higashi | Nov 2009 | A1 |
20090293809 | Cho et al. | Dec 2009 | A1 |
20090294898 | Feustel et al. | Dec 2009 | A1 |
20090320756 | Tanaka | Dec 2009 | A1 |
20100000683 | Kadkhodayan et al. | Jan 2010 | A1 |
20100003824 | Kadkhodayan et al. | Jan 2010 | A1 |
20100006543 | Sawada et al. | Jan 2010 | A1 |
20100022030 | Ditizio | Jan 2010 | A1 |
20100025370 | Dieguez-Campo et al. | Feb 2010 | A1 |
20100039747 | Sansoni | Feb 2010 | A1 |
20100047080 | Bruce | Feb 2010 | A1 |
20100048027 | Cheng et al. | Feb 2010 | A1 |
20100055408 | Lee et al. | Mar 2010 | A1 |
20100055917 | Kim | Mar 2010 | A1 |
20100059889 | Gosset et al. | Mar 2010 | A1 |
20100062603 | Ganguly et al. | Mar 2010 | A1 |
20100072172 | Ui et al. | Mar 2010 | A1 |
20100075503 | Bencher | Mar 2010 | A1 |
20100081285 | Chen et al. | Apr 2010 | A1 |
20100093151 | Arghavani et al. | Apr 2010 | A1 |
20100093168 | Naik | Apr 2010 | A1 |
20100096367 | Jeon et al. | Apr 2010 | A1 |
20100099236 | Kwon et al. | Apr 2010 | A1 |
20100099263 | Kao et al. | Apr 2010 | A1 |
20100101727 | Ji | Apr 2010 | A1 |
20100105209 | Winniczek et al. | Apr 2010 | A1 |
20100116788 | Singh et al. | May 2010 | A1 |
20100119843 | Sun et al. | May 2010 | A1 |
20100129974 | Futase et al. | May 2010 | A1 |
20100130001 | Noguchi | May 2010 | A1 |
20100139889 | Kurita et al. | Jun 2010 | A1 |
20100144140 | Chandrashekar et al. | Jun 2010 | A1 |
20100147219 | Hsieh et al. | Jun 2010 | A1 |
20100151149 | Ovshinsky | Jun 2010 | A1 |
20100164422 | Shu et al. | Jul 2010 | A1 |
20100173499 | Tao et al. | Jul 2010 | A1 |
20100178748 | Subramanian | Jul 2010 | A1 |
20100178755 | Lee et al. | Jul 2010 | A1 |
20100180819 | Hatanaka et al. | Jul 2010 | A1 |
20100183825 | Becker et al. | Jul 2010 | A1 |
20100187534 | Nishi et al. | Jul 2010 | A1 |
20100187588 | Kim et al. | Jul 2010 | A1 |
20100187694 | Yu et al. | Jul 2010 | A1 |
20100190352 | Jaiswal | Jul 2010 | A1 |
20100197143 | Nishimura | Aug 2010 | A1 |
20100203739 | Becker et al. | Aug 2010 | A1 |
20100207195 | Fukuzumi et al. | Aug 2010 | A1 |
20100207205 | Grebs et al. | Aug 2010 | A1 |
20100213172 | Wilson | Aug 2010 | A1 |
20100224324 | Kasai | Sep 2010 | A1 |
20100240205 | Son | Sep 2010 | A1 |
20100243165 | Um | Sep 2010 | A1 |
20100243606 | Koshimizu | Sep 2010 | A1 |
20100244204 | Matsuoka et al. | Sep 2010 | A1 |
20100248488 | Agarwal et al. | Sep 2010 | A1 |
20100252068 | Kannan et al. | Oct 2010 | A1 |
20100258913 | Lue | Oct 2010 | A1 |
20100267224 | Choi et al. | Oct 2010 | A1 |
20100267248 | Ma et al. | Oct 2010 | A1 |
20100273290 | Kryliouk | Oct 2010 | A1 |
20100273291 | Kryliouk et al. | Oct 2010 | A1 |
20100288369 | Chang et al. | Nov 2010 | A1 |
20100294199 | Tran et al. | Nov 2010 | A1 |
20100310785 | Sasakawa et al. | Dec 2010 | A1 |
20100314005 | Saito et al. | Dec 2010 | A1 |
20100330814 | Yokota et al. | Dec 2010 | A1 |
20110005607 | Desbiolles et al. | Jan 2011 | A1 |
20110005684 | Hayami | Jan 2011 | A1 |
20110008950 | Xu | Jan 2011 | A1 |
20110011338 | Chuc et al. | Jan 2011 | A1 |
20110034035 | Liang et al. | Feb 2011 | A1 |
20110039407 | Nishizuka | Feb 2011 | A1 |
20110042799 | Kang et al. | Feb 2011 | A1 |
20110045676 | Park | Feb 2011 | A1 |
20110048325 | Choie et al. | Mar 2011 | A1 |
20110053380 | Sapre et al. | Mar 2011 | A1 |
20110058303 | Migita | Mar 2011 | A1 |
20110061810 | Ganguly et al. | Mar 2011 | A1 |
20110061812 | Ganguly et al. | Mar 2011 | A1 |
20110065276 | Ganguly et al. | Mar 2011 | A1 |
20110076401 | Chao et al. | Mar 2011 | A1 |
20110081782 | Liang et al. | Apr 2011 | A1 |
20110100489 | Orito | May 2011 | A1 |
20110104393 | Hilkene et al. | May 2011 | A1 |
20110111596 | Kanakasabapathy | May 2011 | A1 |
20110114601 | Lubomirsky et al. | May 2011 | A1 |
20110115378 | Lubomirsky et al. | May 2011 | A1 |
20110124144 | Schlemm et al. | May 2011 | A1 |
20110127156 | Foad et al. | Jun 2011 | A1 |
20110133650 | Kim | Jun 2011 | A1 |
20110139748 | Donnelly et al. | Jun 2011 | A1 |
20110140229 | Rachmady et al. | Jun 2011 | A1 |
20110143542 | Feurprier et al. | Jun 2011 | A1 |
20110146909 | Shi et al. | Jun 2011 | A1 |
20110147363 | Yap et al. | Jun 2011 | A1 |
20110151674 | Tang et al. | Jun 2011 | A1 |
20110151677 | Wang et al. | Jun 2011 | A1 |
20110151678 | Ashtiani et al. | Jun 2011 | A1 |
20110155181 | Inatomi | Jun 2011 | A1 |
20110159690 | Chandrashekar et al. | Jun 2011 | A1 |
20110165057 | Honda et al. | Jul 2011 | A1 |
20110165347 | Miller et al. | Jul 2011 | A1 |
20110165771 | Ring et al. | Jul 2011 | A1 |
20110174778 | Sawada et al. | Jul 2011 | A1 |
20110180847 | Ikeda et al. | Jul 2011 | A1 |
20110195575 | Wang | Aug 2011 | A1 |
20110198034 | Sun et al. | Aug 2011 | A1 |
20110204025 | Tahara | Aug 2011 | A1 |
20110207332 | Liu et al. | Aug 2011 | A1 |
20110217851 | Liang et al. | Sep 2011 | A1 |
20110226734 | Sumiya et al. | Sep 2011 | A1 |
20110227028 | Sekar et al. | Sep 2011 | A1 |
20110230008 | Lakshmanan et al. | Sep 2011 | A1 |
20110230052 | Tang et al. | Sep 2011 | A1 |
20110232737 | Ruletzki et al. | Sep 2011 | A1 |
20110232845 | Riker et al. | Sep 2011 | A1 |
20110244686 | Aso et al. | Oct 2011 | A1 |
20110244693 | Tamura et al. | Oct 2011 | A1 |
20110256421 | Bose et al. | Oct 2011 | A1 |
20110265884 | Xu et al. | Nov 2011 | A1 |
20110265887 | Lee et al. | Nov 2011 | A1 |
20110265951 | Xu | Nov 2011 | A1 |
20110266252 | Thadani et al. | Nov 2011 | A1 |
20110266256 | Cruse et al. | Nov 2011 | A1 |
20110266682 | Edelstein et al. | Nov 2011 | A1 |
20110278260 | Lai et al. | Nov 2011 | A1 |
20110287633 | Lee et al. | Nov 2011 | A1 |
20110294300 | Zhang et al. | Dec 2011 | A1 |
20110298061 | Siddiqui et al. | Dec 2011 | A1 |
20110304078 | Lee et al. | Dec 2011 | A1 |
20120003782 | Byun et al. | Jan 2012 | A1 |
20120009796 | Cui et al. | Jan 2012 | A1 |
20120025289 | Liang et al. | Feb 2012 | A1 |
20120031559 | Dhindsa et al. | Feb 2012 | A1 |
20120034786 | Dhindsa et al. | Feb 2012 | A1 |
20120035766 | Shajii et al. | Feb 2012 | A1 |
20120037596 | Eto et al. | Feb 2012 | A1 |
20120040492 | Ovshinsky et al. | Feb 2012 | A1 |
20120052683 | Kim et al. | Mar 2012 | A1 |
20120055402 | Moriya et al. | Mar 2012 | A1 |
20120068242 | Shin et al. | Mar 2012 | A1 |
20120070982 | Yu et al. | Mar 2012 | A1 |
20120070996 | Hao et al. | Mar 2012 | A1 |
20120091108 | Lin et al. | Apr 2012 | A1 |
20120097330 | Iyengar et al. | Apr 2012 | A1 |
20120100720 | Winniczek et al. | Apr 2012 | A1 |
20120103518 | Kakimoto | May 2012 | A1 |
20120104564 | Won et al. | May 2012 | A1 |
20120119225 | Shiomi et al. | May 2012 | A1 |
20120122319 | Shimizu | May 2012 | A1 |
20120129354 | Luong | May 2012 | A1 |
20120135576 | Lee et al. | May 2012 | A1 |
20120148369 | Michalski et al. | Jun 2012 | A1 |
20120149200 | Culp et al. | Jun 2012 | A1 |
20120161405 | Mohn et al. | Jun 2012 | A1 |
20120164839 | Nishimura | Jun 2012 | A1 |
20120171852 | Yuan et al. | Jul 2012 | A1 |
20120180954 | Yang et al. | Jul 2012 | A1 |
20120181599 | Lung | Jul 2012 | A1 |
20120182808 | Lue et al. | Jul 2012 | A1 |
20120187844 | Hoffman et al. | Jul 2012 | A1 |
20120196447 | Yang et al. | Aug 2012 | A1 |
20120196451 | Mallick | Aug 2012 | A1 |
20120202408 | Shajii et al. | Aug 2012 | A1 |
20120208361 | Ha | Aug 2012 | A1 |
20120211462 | Zhang et al. | Aug 2012 | A1 |
20120211722 | Kellam et al. | Aug 2012 | A1 |
20120222616 | Han et al. | Sep 2012 | A1 |
20120222815 | Sabri et al. | Sep 2012 | A1 |
20120223048 | Paranjpe et al. | Sep 2012 | A1 |
20120223418 | Stowers et al. | Sep 2012 | A1 |
20120225557 | Serry et al. | Sep 2012 | A1 |
20120228642 | Aube et al. | Sep 2012 | A1 |
20120234945 | Olgado | Sep 2012 | A1 |
20120238102 | Zhang et al. | Sep 2012 | A1 |
20120238103 | Zhang et al. | Sep 2012 | A1 |
20120238108 | Chen et al. | Sep 2012 | A1 |
20120241411 | Darling et al. | Sep 2012 | A1 |
20120247390 | Sawada et al. | Oct 2012 | A1 |
20120247670 | Dobashi et al. | Oct 2012 | A1 |
20120247671 | Sugawara | Oct 2012 | A1 |
20120247677 | Himori et al. | Oct 2012 | A1 |
20120258600 | Godet et al. | Oct 2012 | A1 |
20120258607 | Holland et al. | Oct 2012 | A1 |
20120267346 | Kao et al. | Oct 2012 | A1 |
20120269968 | Rayner | Oct 2012 | A1 |
20120282779 | Arnold et al. | Nov 2012 | A1 |
20120285619 | Matyushkin et al. | Nov 2012 | A1 |
20120285621 | Tan | Nov 2012 | A1 |
20120291696 | Clarke | Nov 2012 | A1 |
20120292664 | Kanike | Nov 2012 | A1 |
20120304933 | Mai et al. | Dec 2012 | A1 |
20120309204 | Kang et al. | Dec 2012 | A1 |
20120309205 | Wang et al. | Dec 2012 | A1 |
20120322015 | Kim | Dec 2012 | A1 |
20130001899 | Hwang et al. | Jan 2013 | A1 |
20130005103 | Liu et al. | Jan 2013 | A1 |
20130005140 | Jeng et al. | Jan 2013 | A1 |
20130012030 | Lakshmanan et al. | Jan 2013 | A1 |
20130012032 | Liu et al. | Jan 2013 | A1 |
20130023062 | Masuda et al. | Jan 2013 | A1 |
20130023124 | Nemani et al. | Jan 2013 | A1 |
20130026135 | Kim | Jan 2013 | A1 |
20130032574 | Liu et al. | Feb 2013 | A1 |
20130034666 | Liang et al. | Feb 2013 | A1 |
20130034968 | Zhang et al. | Feb 2013 | A1 |
20130037919 | Sapra et al. | Feb 2013 | A1 |
20130045605 | Wang et al. | Feb 2013 | A1 |
20130049592 | Yeom et al. | Feb 2013 | A1 |
20130052804 | Song | Feb 2013 | A1 |
20130052827 | Wang et al. | Feb 2013 | A1 |
20130052833 | Ranjan et al. | Feb 2013 | A1 |
20130059440 | Wang et al. | Mar 2013 | A1 |
20130062675 | Thomas | Mar 2013 | A1 |
20130065398 | Ohsawa et al. | Mar 2013 | A1 |
20130082197 | Yang et al. | Apr 2013 | A1 |
20130084654 | Gaylord et al. | Apr 2013 | A1 |
20130087309 | Volfovski | Apr 2013 | A1 |
20130089988 | Wang et al. | Apr 2013 | A1 |
20130098868 | Nishimura et al. | Apr 2013 | A1 |
20130105303 | Lubomirsky et al. | May 2013 | A1 |
20130105948 | Kewley | May 2013 | A1 |
20130115372 | Pavol et al. | May 2013 | A1 |
20130118686 | Carducci et al. | May 2013 | A1 |
20130119016 | Kagoshima | May 2013 | A1 |
20130119457 | Lue et al. | May 2013 | A1 |
20130119483 | Alptekin et al. | May 2013 | A1 |
20130130507 | Wang et al. | May 2013 | A1 |
20130133578 | Hwang | May 2013 | A1 |
20130150303 | Kungl et al. | Jun 2013 | A1 |
20130155568 | Todorow et al. | Jun 2013 | A1 |
20130161726 | Kim et al. | Jun 2013 | A1 |
20130175654 | Muckenhirn et al. | Jul 2013 | A1 |
20130187220 | Surthi | Jul 2013 | A1 |
20130193108 | Zheng | Aug 2013 | A1 |
20130213935 | Liao et al. | Aug 2013 | A1 |
20130217243 | Underwood et al. | Aug 2013 | A1 |
20130224953 | Salinas et al. | Aug 2013 | A1 |
20130224960 | Payyapilly et al. | Aug 2013 | A1 |
20130260533 | Sapre et al. | Oct 2013 | A1 |
20130260564 | Sapre et al. | Oct 2013 | A1 |
20130279066 | Lubomirsky et al. | Oct 2013 | A1 |
20130284369 | Kobayashi et al. | Oct 2013 | A1 |
20130284370 | Kobayashi et al. | Oct 2013 | A1 |
20130284373 | Sun et al. | Oct 2013 | A1 |
20130284374 | Lubomirsky et al. | Oct 2013 | A1 |
20130286530 | Lin et al. | Oct 2013 | A1 |
20130295297 | Chou et al. | Nov 2013 | A1 |
20130298942 | Ren et al. | Nov 2013 | A1 |
20130302980 | Chandrashekar et al. | Nov 2013 | A1 |
20130337655 | Lee et al. | Dec 2013 | A1 |
20130343829 | Benedetti et al. | Dec 2013 | A1 |
20140004707 | Thedjoisworo et al. | Jan 2014 | A1 |
20140004708 | Thedjoisworo | Jan 2014 | A1 |
20140008880 | Miura et al. | Jan 2014 | A1 |
20140020708 | Kim et al. | Jan 2014 | A1 |
20140021673 | Chen et al. | Jan 2014 | A1 |
20140026813 | Wang et al. | Jan 2014 | A1 |
20140053866 | Baluja et al. | Feb 2014 | A1 |
20140057447 | Yang et al. | Feb 2014 | A1 |
20140062285 | Chen | Mar 2014 | A1 |
20140065827 | Kang et al. | Mar 2014 | A1 |
20140065842 | Anthis et al. | Mar 2014 | A1 |
20140076234 | Kao et al. | Mar 2014 | A1 |
20140080308 | Chen et al. | Mar 2014 | A1 |
20140080309 | Park | Mar 2014 | A1 |
20140080310 | Chen et al. | Mar 2014 | A1 |
20140083362 | Lubomirsky et al. | Mar 2014 | A1 |
20140087488 | Nam et al. | Mar 2014 | A1 |
20140097270 | Liang et al. | Apr 2014 | A1 |
20140099794 | Ingle et al. | Apr 2014 | A1 |
20140102367 | Ishibashi | Apr 2014 | A1 |
20140124364 | Yoo et al. | May 2014 | A1 |
20140134842 | Zhange et al. | May 2014 | A1 |
20140134847 | Seya | May 2014 | A1 |
20140141621 | Ren et al. | May 2014 | A1 |
20140147126 | Yamashita et al. | May 2014 | A1 |
20140152312 | Snow et al. | Jun 2014 | A1 |
20140154889 | Wang et al. | Jun 2014 | A1 |
20140165912 | Kao et al. | Jun 2014 | A1 |
20140166617 | Chen | Jun 2014 | A1 |
20140166618 | Tadigadapa et al. | Jun 2014 | A1 |
20140175534 | Kofuji et al. | Jun 2014 | A1 |
20140186772 | Pohlers et al. | Jul 2014 | A1 |
20140190410 | Kim | Jul 2014 | A1 |
20140191388 | Chen | Jul 2014 | A1 |
20140199850 | Kim et al. | Jul 2014 | A1 |
20140199851 | Nemani et al. | Jul 2014 | A1 |
20140209245 | Yamamoto et al. | Jul 2014 | A1 |
20140216337 | Swaminathan et al. | Aug 2014 | A1 |
20140225504 | Kaneko et al. | Aug 2014 | A1 |
20140227881 | Lubomirsky et al. | Aug 2014 | A1 |
20140234466 | Gao et al. | Aug 2014 | A1 |
20140248773 | Tsai et al. | Sep 2014 | A1 |
20140248780 | Ingle et al. | Sep 2014 | A1 |
20140251956 | Jeon et al. | Sep 2014 | A1 |
20140256131 | Wang et al. | Sep 2014 | A1 |
20140256145 | Abdallah et al. | Sep 2014 | A1 |
20140262031 | Belostotskiy et al. | Sep 2014 | A1 |
20140262038 | Wang et al. | Sep 2014 | A1 |
20140263172 | Xie et al. | Sep 2014 | A1 |
20140263272 | Duan et al. | Sep 2014 | A1 |
20140264507 | Lee et al. | Sep 2014 | A1 |
20140264533 | Simsek-Ege | Sep 2014 | A1 |
20140271097 | Wang et al. | Sep 2014 | A1 |
20140273373 | Makala et al. | Sep 2014 | A1 |
20140273406 | Wang et al. | Sep 2014 | A1 |
20140273451 | Wang et al. | Sep 2014 | A1 |
20140273462 | Simsek-Ege et al. | Sep 2014 | A1 |
20140273487 | Deshmukh et al. | Sep 2014 | A1 |
20140273489 | Wang et al. | Sep 2014 | A1 |
20140273491 | Zhang et al. | Sep 2014 | A1 |
20140273492 | Anthis et al. | Sep 2014 | A1 |
20140273496 | Kao | Sep 2014 | A1 |
20140288528 | Py et al. | Sep 2014 | A1 |
20140302678 | Paterson et al. | Oct 2014 | A1 |
20140302680 | Singh | Oct 2014 | A1 |
20140308758 | Nemani et al. | Oct 2014 | A1 |
20140308816 | Wang et al. | Oct 2014 | A1 |
20140311581 | Belostotskiy et al. | Oct 2014 | A1 |
20140342532 | Zhu | Nov 2014 | A1 |
20140342569 | Zhu et al. | Nov 2014 | A1 |
20140349477 | Chandrashekar et al. | Nov 2014 | A1 |
20140357083 | Ling et al. | Dec 2014 | A1 |
20140361684 | Ikeda | Dec 2014 | A1 |
20140363977 | Morimoto et al. | Dec 2014 | A1 |
20140363979 | Or et al. | Dec 2014 | A1 |
20150011096 | Chandrasekharan et al. | Jan 2015 | A1 |
20150014152 | Hoinkis et al. | Jan 2015 | A1 |
20150031211 | Sapre et al. | Jan 2015 | A1 |
20150037980 | Rha | Feb 2015 | A1 |
20150041430 | Yoshino et al. | Feb 2015 | A1 |
20150050812 | Smith | Feb 2015 | A1 |
20150060265 | Cho et al. | Mar 2015 | A1 |
20150064918 | Ranjan et al. | Mar 2015 | A1 |
20150072508 | Or et al. | Mar 2015 | A1 |
20150076110 | Wu et al. | Mar 2015 | A1 |
20150076586 | Rabkin et al. | Mar 2015 | A1 |
20150079797 | Chen et al. | Mar 2015 | A1 |
20150093891 | Zope | Apr 2015 | A1 |
20150118822 | Zhang et al. | Apr 2015 | A1 |
20150118858 | Takaba | Apr 2015 | A1 |
20150126035 | Diao et al. | May 2015 | A1 |
20150126039 | Korolik et al. | May 2015 | A1 |
20150126040 | Korolik et al. | May 2015 | A1 |
20150129541 | Wang et al. | May 2015 | A1 |
20150129545 | Ingle et al. | May 2015 | A1 |
20150129546 | Ingle et al. | May 2015 | A1 |
20150132953 | Nowling | May 2015 | A1 |
20150132968 | Ren et al. | May 2015 | A1 |
20150152072 | Cantat et al. | Jun 2015 | A1 |
20150155177 | Zhang et al. | Jun 2015 | A1 |
20150170811 | Tanigawa | Jun 2015 | A1 |
20150170879 | Nguyen et al. | Jun 2015 | A1 |
20150170920 | Purayath et al. | Jun 2015 | A1 |
20150170924 | Nguyen et al. | Jun 2015 | A1 |
20150170926 | Michalak | Jun 2015 | A1 |
20150170935 | Wang et al. | Jun 2015 | A1 |
20150170943 | Nguyen et al. | Jun 2015 | A1 |
20150171008 | Luo | Jun 2015 | A1 |
20150179464 | Wang et al. | Jun 2015 | A1 |
20150187625 | Busche et al. | Jul 2015 | A1 |
20150194435 | Lee | Jul 2015 | A1 |
20150200042 | Ling et al. | Jul 2015 | A1 |
20150206764 | Wang et al. | Jul 2015 | A1 |
20150214066 | Luere et al. | Jul 2015 | A1 |
20150214067 | Zhang et al. | Jul 2015 | A1 |
20150214092 | Purayath et al. | Jul 2015 | A1 |
20150214337 | Ko et al. | Jul 2015 | A1 |
20150221479 | Chen et al. | Aug 2015 | A1 |
20150221541 | Nemani et al. | Aug 2015 | A1 |
20150228456 | Ye et al. | Aug 2015 | A1 |
20150235809 | Ito et al. | Aug 2015 | A1 |
20150235860 | Tomura et al. | Aug 2015 | A1 |
20150235863 | Chen | Aug 2015 | A1 |
20150235865 | Wang et al. | Aug 2015 | A1 |
20150235867 | Nishizuka | Aug 2015 | A1 |
20150247231 | Nguyen et al. | Sep 2015 | A1 |
20150249018 | Park et al. | Sep 2015 | A1 |
20150255481 | Baenninger et al. | Sep 2015 | A1 |
20150270105 | Kobayashi | Sep 2015 | A1 |
20150270140 | Gupta et al. | Sep 2015 | A1 |
20150275361 | Lubomirsky et al. | Oct 2015 | A1 |
20150275375 | Kim et al. | Oct 2015 | A1 |
20150279687 | Xue et al. | Oct 2015 | A1 |
20150294980 | Lee et al. | Oct 2015 | A1 |
20150332930 | Wang et al. | Nov 2015 | A1 |
20150340225 | Kim et al. | Nov 2015 | A1 |
20150340371 | Lue | Nov 2015 | A1 |
20150345029 | Wang et al. | Dec 2015 | A1 |
20150357201 | Chen et al. | Dec 2015 | A1 |
20150357205 | Wang et al. | Dec 2015 | A1 |
20150371861 | Li et al. | Dec 2015 | A1 |
20150371864 | Hsu et al. | Dec 2015 | A1 |
20150371865 | Chen et al. | Dec 2015 | A1 |
20150371866 | Chen et al. | Dec 2015 | A1 |
20150380419 | Gunji-Yoneoka et al. | Dec 2015 | A1 |
20150380431 | Kanamori et al. | Dec 2015 | A1 |
20160005572 | Liang et al. | Jan 2016 | A1 |
20160005833 | Collins et al. | Jan 2016 | A1 |
20160020071 | Khaja et al. | Jan 2016 | A1 |
20160027654 | Kim et al. | Jan 2016 | A1 |
20160027673 | Wang et al. | Jan 2016 | A1 |
20160035586 | Purayath et al. | Feb 2016 | A1 |
20160035614 | Purayath et al. | Feb 2016 | A1 |
20160042968 | Purayath et al. | Feb 2016 | A1 |
20160043099 | Purayath et al. | Feb 2016 | A1 |
20160056167 | Wang et al. | Feb 2016 | A1 |
20160064212 | Thedjoisworo et al. | Mar 2016 | A1 |
20160064233 | Wang et al. | Mar 2016 | A1 |
20160079062 | Zheng et al. | Mar 2016 | A1 |
20160079072 | Wang et al. | Mar 2016 | A1 |
20160086772 | Khaja | Mar 2016 | A1 |
20160086807 | Park et al. | Mar 2016 | A1 |
20160086808 | Zhang et al. | Mar 2016 | A1 |
20160086815 | Pandit et al. | Mar 2016 | A1 |
20160086816 | Wang et al. | Mar 2016 | A1 |
20160093505 | Chen et al. | Mar 2016 | A1 |
20160093506 | Chen et al. | Mar 2016 | A1 |
20160093737 | Li et al. | Mar 2016 | A1 |
20160104606 | Park et al. | Apr 2016 | A1 |
20160104648 | Park | Apr 2016 | A1 |
20160109863 | Valcore et al. | Apr 2016 | A1 |
20160117425 | Povolny et al. | Apr 2016 | A1 |
20160118227 | Valcore et al. | Apr 2016 | A1 |
20160118268 | Ingle et al. | Apr 2016 | A1 |
20160118396 | Rabkin et al. | Apr 2016 | A1 |
20160126118 | Chen et al. | May 2016 | A1 |
20160133480 | Ko et al. | May 2016 | A1 |
20160136660 | Song | May 2016 | A1 |
20160141419 | Baenninger et al. | May 2016 | A1 |
20160148805 | Jongbloed et al. | May 2016 | A1 |
20160148821 | Singh et al. | May 2016 | A1 |
20160163512 | Lubomirsky | Jun 2016 | A1 |
20160163513 | Lubomirsky | Jun 2016 | A1 |
20160172216 | Marakhtanov et al. | Jun 2016 | A1 |
20160181112 | Xue et al. | Jun 2016 | A1 |
20160181116 | Berry et al. | Jun 2016 | A1 |
20160189933 | Kobayashi et al. | Jun 2016 | A1 |
20160196969 | Berry et al. | Jul 2016 | A1 |
20160196984 | Lill et al. | Jul 2016 | A1 |
20160196985 | Tan et al. | Jul 2016 | A1 |
20160203958 | Arase et al. | Jul 2016 | A1 |
20160204009 | Nguyen et al. | Jul 2016 | A1 |
20160218018 | Lieu et al. | Jul 2016 | A1 |
20160222522 | Wang et al. | Aug 2016 | A1 |
20160225651 | Tran et al. | Aug 2016 | A1 |
20160225652 | Tran et al. | Aug 2016 | A1 |
20160237570 | Tan et al. | Aug 2016 | A1 |
20160240353 | Nagami | Aug 2016 | A1 |
20160240389 | Zhang et al. | Aug 2016 | A1 |
20160240402 | Park et al. | Aug 2016 | A1 |
20160260588 | Park et al. | Sep 2016 | A1 |
20160260616 | Li et al. | Sep 2016 | A1 |
20160260619 | Zhang et al. | Sep 2016 | A1 |
20160284556 | Ingle et al. | Sep 2016 | A1 |
20160293398 | Danek et al. | Oct 2016 | A1 |
20160293438 | Zhou et al. | Oct 2016 | A1 |
20160300694 | Yang et al. | Oct 2016 | A1 |
20160307772 | Choi et al. | Oct 2016 | A1 |
20160307773 | Lee et al. | Oct 2016 | A1 |
20160314961 | Liu et al. | Oct 2016 | A1 |
20160314985 | Yang et al. | Oct 2016 | A1 |
20160319452 | Eidschun et al. | Nov 2016 | A1 |
20160343548 | Howald et al. | Nov 2016 | A1 |
20160358793 | Okumura et al. | Dec 2016 | A1 |
20170011922 | Tanimura et al. | Jan 2017 | A1 |
20170040175 | Xu et al. | Feb 2017 | A1 |
20170040190 | Benjaminson et al. | Feb 2017 | A1 |
20170040191 | Benjaminson et al. | Feb 2017 | A1 |
20170040207 | Purayath | Feb 2017 | A1 |
20170040214 | Lai et al. | Feb 2017 | A1 |
20170053808 | Kamp et al. | Feb 2017 | A1 |
20170062184 | Tran et al. | Mar 2017 | A1 |
20170110290 | Kobayashi et al. | Apr 2017 | A1 |
20170110335 | Yang et al. | Apr 2017 | A1 |
20170110475 | Liu et al. | Apr 2017 | A1 |
20170133202 | Berry | May 2017 | A1 |
20170178894 | Stone et al. | Jun 2017 | A1 |
20170178899 | Kabansky et al. | Jun 2017 | A1 |
20170178924 | Chen et al. | Jun 2017 | A1 |
20170207088 | Kwon et al. | Jul 2017 | A1 |
20170226637 | Lubomirsky et al. | Aug 2017 | A1 |
20170229287 | Xu et al. | Aug 2017 | A1 |
20170229289 | Lubomirsky et al. | Aug 2017 | A1 |
20170229291 | Singh et al. | Aug 2017 | A1 |
20170229293 | Park et al. | Aug 2017 | A1 |
20170229326 | Tran et al. | Aug 2017 | A1 |
20170229328 | Benjaminson et al. | Aug 2017 | A1 |
20170229329 | Benjaminson et al. | Aug 2017 | A1 |
20170236694 | Eason et al. | Aug 2017 | A1 |
20170250193 | Huo | Aug 2017 | A1 |
20170294445 | Son et al. | Oct 2017 | A1 |
20170309509 | Tran et al. | Oct 2017 | A1 |
20170338133 | Tan et al. | Nov 2017 | A1 |
20170338134 | Tan et al. | Nov 2017 | A1 |
20180005850 | Citla et al. | Jan 2018 | A1 |
20180025900 | Park et al. | Jan 2018 | A1 |
20180069000 | Bergendahl et al. | Mar 2018 | A1 |
20180076031 | Yan et al. | Mar 2018 | A1 |
20180076044 | Choi et al. | Mar 2018 | A1 |
20180076083 | Ko et al. | Mar 2018 | A1 |
20180080124 | Bajaj et al. | Mar 2018 | A1 |
20180082861 | Citla et al. | Mar 2018 | A1 |
20180096818 | Lubomirsky | Apr 2018 | A1 |
20180096819 | Lubomirsky et al. | Apr 2018 | A1 |
20180096821 | Lubomirsky et al. | Apr 2018 | A1 |
20180096865 | Lubomirsky et al. | Apr 2018 | A1 |
20180102255 | Chen et al. | Apr 2018 | A1 |
20180102256 | Chen et al. | Apr 2018 | A1 |
20180102259 | Wang et al. | Apr 2018 | A1 |
20180130818 | Kim et al. | May 2018 | A1 |
20180138049 | Ko et al. | May 2018 | A1 |
20180138055 | Xu et al. | May 2018 | A1 |
20180138075 | Kang et al. | May 2018 | A1 |
20180138085 | Wang et al. | May 2018 | A1 |
20180175051 | Lue et al. | Jun 2018 | A1 |
20180182633 | Pandit et al. | Jun 2018 | A1 |
20180182777 | Cui et al. | Jun 2018 | A1 |
20180223437 | George et al. | Aug 2018 | A1 |
20180226223 | Lubomirsky | Aug 2018 | A1 |
20180226259 | Choi et al. | Aug 2018 | A1 |
20180226278 | Arnepalli et al. | Aug 2018 | A1 |
20180226425 | Purayath | Aug 2018 | A1 |
20180226426 | Purayath | Aug 2018 | A1 |
20180240654 | Park et al. | Aug 2018 | A1 |
20180261516 | Lin et al. | Sep 2018 | A1 |
20180261686 | Lin et al. | Sep 2018 | A1 |
Number | Date | Country |
---|---|---|
1124364 | Jun 1996 | CN |
1847450 | Oct 2006 | CN |
101236893 | Aug 2008 | CN |
101378850 | Mar 2009 | CN |
102893705 | Jan 2013 | CN |
1675160 | Jun 2006 | EP |
S59-126778 | Jul 1984 | JP |
S62-45119 | Feb 1987 | JP |
63301051 | Dec 1988 | JP |
H01-200627 | Aug 1989 | JP |
H02-114525 | Apr 1990 | JP |
H07-153739 | Jun 1995 | JP |
H8-31755 | Feb 1996 | JP |
H08-107101 | Apr 1996 | JP |
H08-264510 | Oct 1996 | JP |
H09-260356 | Oct 1997 | JP |
2001-313282 | Nov 2001 | JP |
2001-332608 | Nov 2001 | JP |
2002-075972 | Mar 2002 | JP |
2002-083869 | Mar 2002 | JP |
2003-174020 | Jun 2003 | JP |
2003-282591 | Oct 2003 | JP |
2004-508709 | Mar 2004 | JP |
2004-296467 | Oct 2004 | JP |
2005-050908 | Feb 2005 | JP |
2006-041039 | Feb 2006 | JP |
2006-066408 | Mar 2006 | JP |
2008-288560 | Nov 2008 | JP |
4191137 | Dec 2008 | JP |
2009-141343 | Jun 2009 | JP |
2009-530871 | Aug 2009 | JP |
2009-239056 | Oct 2009 | JP |
2010-180458 | Aug 2010 | JP |
2011-508436 | Mar 2011 | JP |
2011-518408 | Jun 2011 | JP |
4763293 | Aug 2011 | JP |
2011-171378 | Sep 2011 | JP |
2012-19164 | Jan 2012 | JP |
2012-019194 | Jan 2012 | JP |
2012-512531 | May 2012 | JP |
2013-243418 | Dec 2013 | JP |
5802323 | Oct 2015 | JP |
2016-111177 | Jun 2016 | JP |
10-2000-008278 | Feb 2000 | KR |
10-2000-0064946 | Nov 2000 | KR |
10-2001-0056735 | Jul 2001 | KR |
2003-0023964 | Mar 2003 | KR |
10-2003-0054726 | Jul 2003 | KR |
10-2003-0083663 | Oct 2003 | KR |
100441297 | Jul 2004 | KR |
10-2005-0007143 | Jan 2005 | KR |
10-2005-0042701 | May 2005 | KR |
2005-0049903 | May 2005 | KR |
10-2006-0080509 | Jul 2006 | KR |
1006-41762 | Nov 2006 | KR |
10-2006-0127173 | Dec 2006 | KR |
100663668 | Jan 2007 | KR |
100678696 | Jan 2007 | KR |
100712727 | Apr 2007 | KR |
2007-0079870 | Aug 2007 | KR |
10-2008-0063988 | Jul 2008 | KR |
10-0843236 | Jul 2008 | KR |
10-2009-0040869 | Apr 2009 | KR |
10-2009-0128913 | Dec 2009 | KR |
10-2010-0013980 | Feb 2010 | KR |
10-2010-0093358 | Aug 2010 | KR |
10-2011-0086540 | Jul 2011 | KR |
10-2011-0114538 | Oct 2011 | KR |
10-2011-0126675 | Nov 2011 | KR |
10-2012-0022251 | Mar 2012 | KR |
10-2012-0082640 | Jul 2012 | KR |
10-2016-0002543 | Jan 2016 | KR |
2006-12480 | Apr 2006 | TW |
200709256 | Mar 2007 | TW |
2007-35196 | Sep 2007 | TW |
2011-27983 | Aug 2011 | TW |
2012-07619 | Feb 2012 | TW |
2012-13594 | Apr 2012 | TW |
2012-33842 | Aug 2012 | TW |
2008-112673 | Sep 2008 | WO |
2009-009611 | Jan 2009 | WO |
2009-084194 | Jul 2009 | WO |
2010-010706 | Jan 2010 | WO |
2010-113946 | Oct 2010 | WO |
2011-027515 | Mar 2011 | WO |
2011-031556 | Mar 2011 | WO |
2011070945 | Jun 2011 | WO |
2011-095846 | Aug 2011 | WO |
2011-149638 | Dec 2011 | WO |
2012-050321 | Apr 2012 | WO |
2012-118987 | Sep 2012 | WO |
2012-125656 | Sep 2012 | WO |
2012-148568 | Nov 2012 | WO |
2013-118260 | Aug 2013 | WO |
Entry |
---|
International Search Report and Written Opinion of PCT/US2017/047209 dated Nov. 24, 2017, all pages. |
International Search Report and Written Opinion of PCT/US2017/033362 dated Aug. 24, 2017, all pages. |
Won et al. Derwent 2006-065772; Sep. 7, 2014, 10 pages. |
International Search Report and Written Opinion of PCT/US2017/060696 dated Jan. 25, 2018, all pages. |
International Search Report and Written Opinion of PCT/US2017/055431 dated Jan. 19, 2018, all pages. |
J.J. Wang and et al., “Inductively coupled plasma etching of bulk 1-20 6H—SiC and thin-film SiCN in NF3 chemistries,” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16, 2204 (1998). |
H. Xiao, Introduction to Semiconductor Manufacturing Technology, published by Prentice Hall, 2001, ISBN 0-13-022404-9, pp. 354-356. |
Manual No. TQMA72E1. “Bayard-Alpert Pirani Gauge FRG-730: Short Operating Instructions” Mar. 2012. Agilent Technologies, Lexington, MA 02421, USA. pp. 1-45. |
International Search Report and Written Opinion of PCT/US2016/045551 dated Nov. 17, 2016, all pages. |
International Search Report and Written Opinion of PCT/US2016/045543 dated Nov. 17, 2016, all pages. |
“Liang et al. Industrial Application of Plasma Process vol. 3, pp. 61-74, 2010”. |
Instrument Manual: Vacuum Gauge Model MM200, Rev D. TELEVAC (website: www.televac.com), A Division of the Fredericks Company, Huntingdon Valley, PA, US. 2008. pp. 162. |
International Search Report and Written Opinion of PCT/US2018/016261 dated May 21, 2018, all pages. |
International Search Report and Written Opinion of PCT/US2018/016648 dated May 18, 2018, all pages. |
Number | Date | Country | |
---|---|---|---|
20180226230 A1 | Aug 2018 | US |