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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cleaning method and film deposition apparatus
Patent number
12,077,855
Issue date
Sep 3, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,768
Issue date
Apr 30, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma purge method
Patent number
11,725,276
Issue date
Aug 15, 2023
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing method
Patent number
11,414,753
Issue date
Aug 16, 2022
Tokyo Electron Limited
Hideomi Hane
B08 - CLEANING
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,201,053
Issue date
Dec 14, 2021
Tokyo Electron Limited
Noriaki Fukiage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,171,014
Issue date
Nov 9, 2021
Tokyo Electron Limited
Hideomi Hane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and apparatus of manuf...
Patent number
10,900,121
Issue date
Jan 26, 2021
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
10,714,332
Issue date
Jul 14, 2020
Tokyo Electron Limited
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and operation method of film forming apparatus
Patent number
10,550,470
Issue date
Feb 4, 2020
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method, film forming apparatus, and storage medium
Patent number
10,438,791
Issue date
Oct 8, 2019
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus
Patent number
10,344,382
Issue date
Jul 9, 2019
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a film on a substrate, and film deposition ap...
Patent number
9,388,496
Issue date
Jul 12, 2016
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CLEANING METHOD AND FILM DEPOSITION APPARATUS
Publication number
20230175125
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Hideomi HANE
B08 - CLEANING
Information
Patent Application
HEAT TREATMENT APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
Publication number
20230175137
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Morihito INAGAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PURGE METHOD
Publication number
20220081766
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
B08 - CLEANING
Information
Patent Application
PLASMA PURGE METHOD
Publication number
20220081764
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD
Publication number
20210130950
Publication date
May 6, 2021
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20210054501
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20210054502
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20200294787
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20190292662
Publication date
Sep 26, 2019
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
Publication number
20190127849
Publication date
May 2, 2019
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
Publication number
20180366315
Publication date
Dec 20, 2018
TOKYO ELECTRON LIMITED
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180358235
Publication date
Dec 13, 2018
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180237914
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Jun OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...
Publication number
20180142350
Publication date
May 24, 2018
TOKYO ELECTRON LIMITED
Noriaki Fukiage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20170271143
Publication date
Sep 21, 2017
TOKYO ELECTRON LIMITED
Noriaki FUKIAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Apparatus
Publication number
20150329964
Publication date
Nov 19, 2015
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150214029
Publication date
Jul 30, 2015
TOKYO ELECTRON LIMITED
Hideomi HANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...