Hideyuki OSADA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, purge gas control method, and vacuu...
- Patent number 12,285,786
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B08 - CLEANING
Information Patent Grant
Substrate processing system and particle removal method
- Patent number 12,062,557
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Genichi Nanasaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PAD AND END EFFECTOR
- Publication number 20240181654
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Hideyuki OSADA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER SYSTEM, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20240178044
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Kento TOKAIRIN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MOUNTING PAD, MOUNTING MECHANISM, AND SUBSTRATE TRANSFER MECHANISM
- Publication number 20230395421
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Masato OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20230245871
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20220199435
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Genichi NANASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
- Publication number 20220080476
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B08 - CLEANING