Hieu A. Lam

Person

Richardson, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining an etch property using an endp...
- Patent number 8,048,326
- Issue date Nov 1, 2011
- Tokyo Electron Limited
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for predicting process performance using material...
- Patent number 7,844,559
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Hieu A. Lam
- G05 - CONTROLLING REGULATING
Information Patent Grant
Process system health index and method of using the same
- Patent number 7,713,760
- Issue date May 11, 2010
- Tokyo Electron Limited
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for using a pressure control system to monitor...
- Patent number 7,430,496
- Issue date Sep 30, 2008
- Tokyo Electron Limited
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for automatic configuration of processing system
- Patent number 7,213,478
- Issue date May 8, 2007
- Tokyo Electron Limited
- Satoshi Harada
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system of discriminating substrate type
- Patent number 7,211,196
- Issue date May 1, 2007
- Tokyo Electron Limited
- Hieu A. Lam
- G01 - MEASURING TESTING
Information Patent Grant
Controlling a material processing tool and performance data
- Patent number 7,167,766
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Hieu A. Lam
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system of determining chamber seasoning condition by opt...
- Patent number 6,825,920
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Hieu A. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE
- Publication number 20090311634
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL...
- Publication number 20090099991
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Hieu A. LAM
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for determining an etch property using an endp...
- Publication number 20060048891
- Publication date Mar 9, 2006
- TOKYO ELECTRON LIMITED
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for using a pressure control system to monitor...
- Publication number 20050283321
- Publication date Dec 22, 2005
- TOKYO ELECTRON LIMITED
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for predicting process performance using material...
- Publication number 20050252884
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Hieu A. Lam
- G05 - CONTROLLING REGULATING
Information Patent Application
Controlling a material processing tool and performance data
- Publication number 20050234574
- Publication date Oct 20, 2005
- Hieu A. Lam
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system of discriminating substrate type
- Publication number 20050211669
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Hieu A. Lam
- G01 - MEASURING TESTING
Information Patent Application
Method for automatic configuration of processing system
- Publication number 20050015176
- Publication date Jan 20, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Harada
- G05 - CONTROLLING REGULATING
Information Patent Application
Process system health index and method of using the same
- Publication number 20040259276
- Publication date Dec 23, 2004
- TOKYO ELECTRON LIMITED
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system of determining chamber seasoning condition by opt...
- Publication number 20040008336
- Publication date Jan 15, 2004
- TOKYO ELECTRON LIMITED
- Hieu A. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hieu A. Lam

Person

Patents Grantslast 30 patents

Method and apparatus for determining an etch property using an endp...

Method and system for predicting process performance using material...

Process system health index and method of using the same

Method and apparatus for using a pressure control system to monitor...

Method for automatic configuration of processing system

Method and system of discriminating substrate type

Controlling a material processing tool and performance data

Method and system of determining chamber seasoning condition by opt...

Patents Applicationslast 30 patents

METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE

METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL...

Method and apparatus for determining an etch property using an endp...

Method and apparatus for using a pressure control system to monitor...

Method and system for predicting process performance using material...

Controlling a material processing tool and performance data

Method and system of discriminating substrate type

Method for automatic configuration of processing system

Process system health index and method of using the same

Method and system of determining chamber seasoning condition by opt...