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Hiroaki Funada
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Chuo-ku, JP
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last 30 patents
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Patent Grant
Method for forming a pattern film with a narrower width
Patent number
7,866,029
Issue date
Jan 11, 2011
TDK Corporation
Hirotaka Gomi
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
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Patent Application
Forming method of pattern film with narrower width and thin-film ma...
Publication number
20070223141
Publication date
Sep 27, 2007
TDK Corporation
Hirotaka Gomi
G11 - INFORMATION STORAGE