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Hiroaki Ogamino
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Turbo vacuum pump
Patent number
8,109,744
Issue date
Feb 7, 2012
Ebara Corporation
Hiroyuki Kawasaki
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Patent number
8,066,495
Issue date
Nov 29, 2011
Ebara Corporation
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Patent number
7,717,684
Issue date
May 18, 2010
Ebara Corporation
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Flowmeter having a float and a displacement sensor
Patent number
7,360,454
Issue date
Apr 22, 2008
Ebara Corporation
Hiroyasu Kawashima
G01 - MEASURING TESTING
Information
Patent Grant
Turbo-molecular pump
Patent number
6,926,493
Issue date
Aug 9, 2005
Ebara Corporation
Matsutaro Miyamoto
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Multishaft electric motor and positive-displacement pump combined w...
Patent number
6,761,542
Issue date
Jul 13, 2004
Ebara Corporation
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Turbo-molecular pump
Patent number
6,589,009
Issue date
Jul 8, 2003
Ebara Corporation
Atsushi Shiokawa
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Multishaft electric motor and positive-displacement pump combined w...
Patent number
6,447,271
Issue date
Sep 10, 2002
Ebara Corporation
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Evacuation system
Patent number
6,332,925
Issue date
Dec 25, 2001
Ebara Corporation
Nobuharu Noji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multishaft electric motor and positive-displacement pump combined w...
Patent number
6,183,218
Issue date
Feb 6, 2001
Ebara Corporation
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Multistage positive-displacement vacuum pump
Patent number
5,816,782
Issue date
Oct 6, 1998
Ebara Corporation
Masami Nagayama
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Multishaft electric motor and positive-displacement pump combined w...
Patent number
5,814,913
Issue date
Sep 29, 1998
Ebara Corporation
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Patents Applications
last 30 patents
Information
Patent Application
TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING...
Publication number
20100047096
Publication date
Feb 25, 2010
EBARA CORPORATION
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
TURBO VACUUM PUMP
Publication number
20090246038
Publication date
Oct 1, 2009
EBARA CORPORATION
Hiroyuki KAWASAKI
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Substrate processing system
Publication number
20090087564
Publication date
Apr 2, 2009
Takao Horiuchi
C30 - CRYSTAL GROWTH
Information
Patent Application
Vacuum evacuation device and method, and substrate processing appar...
Publication number
20070048145
Publication date
Mar 1, 2007
Katsutoshi Ishii
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Substrate processing system
Publication number
20070026150
Publication date
Feb 1, 2007
Takao Horiuchi
C30 - CRYSTAL GROWTH
Information
Patent Application
Flowmeter
Publication number
20060254368
Publication date
Nov 16, 2006
Hiroyasu Kawashima
G01 - MEASURING TESTING
Information
Patent Application
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Publication number
20050042118
Publication date
Feb 24, 2005
EBARA CORPORATION
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Multishaft electric motor and positive-displacement pump combined w...
Publication number
20040213686
Publication date
Oct 28, 2004
EBARA CORPORATION
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Turbo-molecular pump
Publication number
20030017047
Publication date
Jan 23, 2003
EBARA CORPORATION
Atsushi Shiokawa
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Multishaft electric motor and positive-displacement pump combined w...
Publication number
20020172599
Publication date
Nov 21, 2002
EBARA CORPORATION
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Multishaft electric motor and positive-displacement pump combined w...
Publication number
20010000722
Publication date
May 3, 2001
EBARA CORPORATION
Yoshinori Ojima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...