HIROAKI TAKEISHI

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and a device manufacturing method using the same
- Patent number 7,518,717
- Issue date Apr 14, 2009
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and a device manufacturing method using the same
- Patent number 7,339,662
- Issue date Mar 4, 2008
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan exposure apparatus and method, and device manufacturing method
- Patent number 7,199,878
- Issue date Apr 3, 2007
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan exposure apparatus and method, and device manufacturing method
- Patent number 6,970,244
- Issue date Nov 29, 2005
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and a device manufacturing method using the same
- Patent number 6,897,949
- Issue date May 24, 2005
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, method of controlling same, and exposure apparatus
- Patent number 6,859,265
- Issue date Feb 22, 2005
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning type exposure apparatus and a device manufacturing method...
- Patent number 6,630,986
- Issue date Oct 7, 2003
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and semiconductor device manuf...
- Patent number 6,573,976
- Issue date Jun 3, 2003
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,462,828
- Issue date Oct 8, 2002
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and a device manufacturing method using the same
- Patent number 6,456,374
- Issue date Sep 24, 2002
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,411,365
- Issue date Jun 25, 2002
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,256,085
- Issue date Jul 3, 2001
- Canon Kabushiki Kaishi
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wave driven motor
- Patent number 5,945,769
- Issue date Aug 31, 1999
- Canon Kabushiki Kaisha
- Reiji Mitarai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,933,215
- Issue date Aug 3, 1999
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control device for a vibration driven motor
- Patent number 5,874,799
- Issue date Feb 23, 1999
- Canon Kabushiki Kaisha
- Reiji Mitarai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Control apparatus for vibration wave motor
- Patent number 5,841,215
- Issue date Nov 24, 1998
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Drive control apparatus
- Patent number 5,757,149
- Issue date May 26, 1998
- Canon Kabushiki Kaisha
- Mikio Sato
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vibration wave motor
- Patent number 5,736,822
- Issue date Apr 7, 1998
- Canon Kabushiki Kaisha
- Reiji Mitarai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Servo system adjusting method and servo control system
- Patent number 5,691,614
- Issue date Nov 25, 1997
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Signal processing apparatus and displacement detecting apparatus us...
- Patent number 5,625,310
- Issue date Apr 29, 1997
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G01 - MEASURING TESTING
Information Patent Grant
Feedback controller
- Patent number 5,625,551
- Issue date Apr 29, 1997
- Canon Kabushiki Kaisha
- Reiji Mitarai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device and method comprising a motor and/or a digital signal proces...
- Patent number 5,612,602
- Issue date Mar 18, 1997
- Canon Kabushiki Kaisha
- Yoichi Kubota
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control apparatus for travelling wave driven motor
- Patent number 5,459,369
- Issue date Oct 17, 1995
- Canon Kabushiki Kaisha
- Reiji Mitarai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND A DEVICE MANFACTURING METHOD USING THE SAME
- Publication number 20070030465
- Publication date Feb 8, 2007
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scan exposure apparatus and method, and device manufacturing method
- Publication number 20050213098
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and a device manufacturing method using the same
- Publication number 20050185164
- Publication date Aug 25, 2005
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device, method of controlling same, and exposure apparatus
- Publication number 20030202166
- Publication date Oct 30, 2003
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving apparatus and control method therefor, and device manufactur...
- Publication number 20030139044
- Publication date Jul 24, 2003
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING TYPE EXPOSURE APPARATUS AND A DEVICE MANUFACTURING METHOD...
- Publication number 20030128345
- Publication date Jul 10, 2003
- MITSURU INOUE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scan exposure apparatus and method, and device manufacturing method
- Publication number 20030067604
- Publication date Apr 10, 2003
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and a device manufacturing method using the same
- Publication number 20020191180
- Publication date Dec 19, 2002
- Canon Kabushiki Kaisha
- Hiroaki Takeishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

HIROAKI TAKEISHI

Person

Patents Grantslast 30 patents

Exposure apparatus and a device manufacturing method using the same

Exposure apparatus and a device manufacturing method using the same

Scan exposure apparatus and method, and device manufacturing method

Scan exposure apparatus and method, and device manufacturing method

Exposure apparatus and a device manufacturing method using the same

Stage device, method of controlling same, and exposure apparatus

Scanning type exposure apparatus and a device manufacturing method...

Exposure apparatus, exposure method, and semiconductor device manuf...

Exposure apparatus

Exposure apparatus and a device manufacturing method using the same

Exposure method and exposure apparatus

Exposure apparatus

Wave driven motor

Exposure apparatus and device manufacturing method using the same

Control device for a vibration driven motor

Control apparatus for vibration wave motor

Drive control apparatus

Vibration wave motor

Servo system adjusting method and servo control system

Signal processing apparatus and displacement detecting apparatus us...

Feedback controller

Device and method comprising a motor and/or a digital signal proces...

Control apparatus for travelling wave driven motor

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND A DEVICE MANFACTURING METHOD USING THE SAME

Scan exposure apparatus and method, and device manufacturing method

Exposure apparatus and a device manufacturing method using the same

Stage device, method of controlling same, and exposure apparatus

Moving apparatus and control method therefor, and device manufactur...

SCANNING TYPE EXPOSURE APPARATUS AND A DEVICE MANUFACTURING METHOD...

Scan exposure apparatus and method, and device manufacturing method

Exposure apparatus and a device manufacturing method using the same