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Hiroaki Takikawa
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Chagasaki-City, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of preventing resist poisoning in dual damascene structures
Patent number
6,969,683
Issue date
Nov 29, 2005
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preventing resist poisoning in dual damascene structures
Patent number
6,713,386
Issue date
Mar 30, 2004
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Anti-reflective coatings for use at 248 nm and 193 nm
Patent number
6,686,272
Issue date
Feb 3, 2004
LSI Logic Corporation
Sang-Yun Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method of preventing resist poisoning in dual damascene structures
Publication number
20040161927
Publication date
Aug 19, 2004
LSI Logic Corporation
Rongxiang Hu
H01 - BASIC ELECTRIC ELEMENTS