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Hirofumi HAGA
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,861,675
Issue date
Dec 8, 2020
Tokyo Electron Limited
Takao Funakubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
10,276,405
Issue date
Apr 30, 2019
Tokyo Electron Limited
Akinori Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,204,763
Issue date
Feb 12, 2019
Tokyo Electron Limited
Takao Funakubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evacuation method and vacuum processing apparatus
Patent number
9,984,907
Issue date
May 29, 2018
Tokyo Electron Limited
Hirofumi Haga
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190139744
Publication date
May 9, 2019
TOKYO ELECTRON LIMITED
Takao FUNAKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVACUATION METHOD AND VACUUM PROCESSING APPARATUS
Publication number
20160189988
Publication date
Jun 30, 2016
TOKYO ELECTRON LIMITED
Hirofumi HAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20160172217
Publication date
Jun 16, 2016
TOKYO ELECTRON LIMITED
Akinori MIYATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20150380282
Publication date
Dec 31, 2015
TOKYO ELECTRON LIMITED
Takao FUNAKUBO
H01 - BASIC ELECTRIC ELEMENTS